公开(公告)号：US10676341B2

公开(公告)日：2020-06-09

申请号：US15897206

申请日：2018-02-15

Applicant: Entegris, Inc.

Inventor： Glenn M. Tom ,  Joseph Patrick Menning ,  Matthew Kusz ,  Amy Koland ,  Donald D. Ware ,  Richard D. Chism

IPC: B65D47/32 ,  B67D7/02 ,  B67D7/72 ,  B67D7/76 ,  C02F1/20 ,  C02F1/00

Abstract: A dispensing assembly for a pressure dispense package includes a connector having separate and distinct liquid and extraction conduits, and having a pressurization gas conduit. A liner fitment adapter may include a longitudinal bore to receive a probe portion of a connector defining a liquid extraction conduit, and may include a lateral bore to enable removal of gas. Insertion of a connector into a dispensing assembly simultaneously makes fluidic connections between (a) a gas extraction conduit and a dispensing volume; (b) a liquid extraction conduit and the dispensing volume, and (c) a pressurization gas conduit and a space to be pressurized within a pressure dispense vessel.

公开(公告)号：US20180029865A1

公开(公告)日：2018-02-01

申请号：US15728076

申请日：2017-10-09

Applicant: Entegris, Inc.

Inventor： Donald D. Ware ,  Glenn M. Tom ,  Amy Koland ,  Dale Gene Mowrey ,  Bruce Musolf

IPC: B67D7/02 ,  B67D7/06 ,  B65D25/14 ,  B65D81/32 ,  B65D77/06

Abstract: A liner-based pressure dispensing container includes a connector-mounted probe arranged to seat a dip tube against an inner surface of a liner fitment for sealing utility. A dip tube and probe may include increased and/or matched flow area. A reverse flow prevention element can be arranged proximate to a liquid extraction opening to inhibit reverse flow of liquid from a dip tube into a container. A liner-less container may include a reduce diameter lower portion arranged to receive a dip tube, with at least one associated sensor to sense a condition indicative of depletion of liquid from the lower portion. A shipping cap can be included for removing headspace gas from the liner. In one embodiment, the shipping cap is suitable for direct connection to a dispensing process.

公开(公告)号：US09802749B2

公开(公告)日：2017-10-31

申请号：US14688778

申请日：2015-04-16

Applicant: ENTEGRIS, INC

Inventor： Minna Hovinen ,  John R. Kingery ,  Glenn M. Tom ,  Kevin T. O'Dougherty ,  Kirk Mikkelsen ,  Donald D. Ware ,  Peter C. Van Buskirk

IPC: B65D83/00 ,  B01J4/02 ,  G01F23/18

CPC classification number: B65D83/0061 ,  B01J4/02 ,  B01J2219/00065 ,  B01J2219/00067 ,  B01J2219/00069 ,  B01J2219/00164 ,  G01F23/18

Abstract: Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.

公开(公告)号：US20190078696A1

公开(公告)日：2019-03-14

申请号：US15743109

申请日：2016-07-08

Applicant: Entegris, Inc.

Inventor： Glenn M. Tom ,  Karl W. Olander ,  James A. Dietz ,  Michael J. Wodjenski ,  Edward A. Sturm ,  Susan K. Dimascio ,  Luping Wang ,  James V. McManus ,  Steven M. Lurcott ,  Jose I. Amo ,  Paul J. Marganski ,  Joseph D. Sweeney ,  Shaun M. Wilson ,  Steven E. Bishop ,  Greg Nelson ,  Donald J. Carruthers ,  Sharad N. Yedave ,  Ying Tang ,  Joseph Despres ,  Barry Chambers ,  Richard Ray ,  Daniel Elzer

IPC: F16K17/00 ,  F16K17/04 ,  F16K31/00 ,  F16K31/06 ,  F17C13/04

Abstract: Fluid supply packages of varying types are described, which are useful for delivery of fluids to fluid-utilizing facilities such as semiconductor manufacturing facilities, solar panel manufacturing facilities, and flat-panel display manufacturing facilities. The fluid supply packages include fluid supply vessels and valve heads of varied configuration, as useful to constitute fluid supply packages that are pressure-regulated and/or adsorbent-based in character.

公开(公告)号：US09695985B2

公开(公告)日：2017-07-04

申请号：US14380646

申请日：2013-02-22

Applicant: ENTEGRIS, INC.

Inventor： Jordan Hodges ,  Richard D. Chism ,  Mitchell W. McFeron ,  Donald D. Ware ,  Glenn M. Tom

IPC: F17C9/00 ,  B67D7/02

CPC classification number: F17C9/00 ,  B67D7/00 ,  B67D7/02 ,  B67D7/025 ,  B67D7/0272 ,  B67D7/0283 ,  F17C7/00

Abstract: A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.

公开(公告)号：US09802807B2

公开(公告)日：2017-10-31

申请号：US15023231

申请日：2014-09-17

Applicant: ENTEGRIS, INC.

Inventor： Donald D. Ware ,  Glenn M. Tom ,  Amy Koland ,  Dale Gene Mowrey ,  Bruce Musolf

IPC: B67D7/02 ,  B67D7/06 ,  B65D25/14 ,  B65D77/06 ,  B65D81/32

CPC classification number: B67D7/0261 ,  B65D25/14 ,  B65D77/06 ,  B65D81/3233 ,  B67D7/06

Abstract: A liner-based pressure dispensing container includes a connector-mounted probe arranged to seat a dip tube against an inner surface of a liner fitment for sealing utility. A dip tube and probe may include increased and/or matched flow area. A reverse flow prevention element can be arranged proximate to a liquid extraction opening to inhibit reverse flow of liquid from a dip tube into a container. A liner-less container may include a reduce diameter lower portion arranged to receive a dip tube, with at least one associated sensor to sense a condition indicative of depletion of liquid from the lower portion. A shipping cap can be included for removing headspace gas from the liner. In one embodiment, the shipping cap is suitable for direct connection to a dispensing process.

公开(公告)号：US09802808B2

公开(公告)日：2017-10-31

申请号：US14812651

申请日：2015-07-29

Applicant: ENTEGRIS, INC.

Inventor： Kevin T. O'Dougherty ,  Glenn M. Tom

IPC: B67D7/02 ,  F16K35/00 ,  B67D7/32 ,  F16K35/02 ,  B67D7/34 ,  F16L37/08

CPC classification number: B67D7/0288 ,  B67D7/0261 ,  B67D7/32 ,  B67D7/3227 ,  B67D7/3281 ,  B67D7/34 ,  B67D7/344 ,  F16K35/00 ,  F16K35/025 ,  F16L37/08 ,  Y10T29/49826 ,  Y10T29/53

Abstract: Fluid storage and dispensing systems and processes involving various structures methods for fluid storage and dispensing, including, pre-connect verification couplings that are usefully employed with fluid storage and dispensing packages to ensure proper coupling and avoid fluid contamination issues, empty detect systems (e.g., monitoring pressure of dispensed liquid medium to detect pressure droop conditions) useable with fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.