公开(公告)号：US09322844B2

公开(公告)日：2016-04-26

申请号：US14234679

申请日：2012-07-30

申请人： Eiichi Shinohara ,  Ikuo Ogasawara ,  Ken Taoka

发明人： Eiichi Shinohara ,  Ikuo Ogasawara ,  Ken Taoka

IPC分类号： G01R1/067 ,  G01R31/26

CPC分类号： G01R1/06711 ,  G01R1/06777 ,  G01R31/2601 ,  G01R31/2608 ,  G01R31/2621 ,  G01R31/263 ,  G01R31/2632

摘要： A probe card 10 includes a first probe 11 configured to come into electric contact with an emitter electrode of a power device D; a block-shaped first connecting terminal 12 to which the first probe 11 is connected; a second probe 13 configured to come into electric contact with a gate electrode of the power device D; a block-shaped second connecting terminal 14 to which the second probe 13 is connected; a contact plate 15 configured to come into electric contact with a collector electrode of the power device D; and a block-shaped third connecting terminal 16 fixed to the contact plate 15. Further, the first connecting terminal 12, the second connecting terminal 14 and the third connecting terminal 16 electrically come into direct contact with corresponding connection terminals of a tester, respectively.

摘要翻译： 探针卡10包括被配置为与功率器件D的发射电极电接触的第一探头11; 连接有第一探针11的块状的第一连接端子12; 配置为与功率器件D的栅电极电接触的第二探头13; 连接有第二探针13的块状的第二连接端子14; 接触板15，被配置为与电力设备D的集电极电接触; 以及固定到接触板15的块状的第三连接端子16.此外，第一连接端子12，第二连接端子14和第三连接端子16分别与测试器的对应的连接端子直接接触。

公开(公告)号：US20130063171A1

公开(公告)日：2013-03-14

申请号：US13634409

申请日：2011-03-11

申请人： Isao Kouno ,  Ken Taoka ,  Eiichi Shinohara ,  Ikuo Ogasawara

发明人： Isao Kouno ,  Ken Taoka ,  Eiichi Shinohara ,  Ikuo Ogasawara

IPC分类号： G01R31/26

CPC分类号： G01R31/2886 ,  G01R1/0466 ,  G01R31/2608

摘要： A probe apparatus includes a movable mounting table for holding a test object provided with a plurality of power devices including diodes; a probe card arranged above the mounting table with probes; a measuring unit for measuring electrical characteristics of the power devices by bringing the probes into electrical contact with the test object in a state that a conductive film electrode formed on at least a mounting surface of the mounting table is electrically connected to a conductive layer formed on a rear surface of the test object; and a conduction member for electrically interconnecting the conductive film electrode and the measuring unit when measuring the electrical characteristics. The conduction member is interposed between an outer peripheral portion of the probe card and an outer peripheral portion of the mounting table.

摘要翻译： 一种探针装置，包括：用于保持具有包括二极管的多个功率器件的测试对象的可移动安装台; 探针卡布置在安装台上方的探头上; 测量单元，用于通过在形成在所述安装台的至少安装表面上的导电膜电极与形成在所述安装台的至少一个安装表面上的导电层电连接的状态下使所述探针与所述测试对象电接触来测量所述功率器件的电特性; 测试对象的后表面; 以及用于在测量电特性时使导电膜电极和测量单元电连接的导电构件。 导电构件设置在探针卡的外周部和安装台的外周部之间。

公开(公告)号：US09658285B2

公开(公告)日：2017-05-23

申请号：US13634409

申请日：2011-03-11

申请人： Isao Kouno ,  Ken Taoka ,  Eiichi Shinohara ,  Ikuo Ogasawara

发明人： Isao Kouno ,  Ken Taoka ,  Eiichi Shinohara ,  Ikuo Ogasawara

IPC分类号： G01R31/28 ,  G01R1/04 ,  G01R31/26

CPC分类号： G01R31/2886 ,  G01R1/0466 ,  G01R31/2608

摘要： A probe apparatus includes a movable mounting table for holding a test object provided with a plurality of power devices including diodes; a probe card arranged above the mounting table with probes; a measuring unit for measuring electrical characteristics of the power devices by bringing the probes into electrical contact with the test object in a state that a conductive film electrode formed on at least a mounting surface of the mounting table is electrically connected to a conductive layer formed on a rear surface of the test object; and a conduction member for electrically interconnecting the conductive film electrode and the measuring unit when measuring the electrical characteristics. The conduction member is interposed between an outer peripheral portion of the probe card and an outer peripheral portion of the mounting table.

公开(公告)号：US20140176173A1

公开(公告)日：2014-06-26

申请号：US14234679

申请日：2012-07-30

申请人： Eiichi Shinohara ,  Ikuo Ogasawara ,  Ken Taoka

发明人： Eiichi Shinohara ,  Ikuo Ogasawara ,  Ken Taoka

IPC分类号： G01R1/067

CPC分类号： G01R1/06711 ,  G01R1/06777 ,  G01R31/2601 ,  G01R31/2608 ,  G01R31/2621 ,  G01R31/263 ,  G01R31/2632

摘要： A probe card 10 includes a first probe 11 configured to come into electric contact with an emitter electrode of a power device D; a block-shaped first connecting terminal 12 to which the first probe 11 is connected; a second probe 13 configured to come into electric contact with a gate electrode of the power device D; a block-shaped second connecting terminal 14 to which the second probe 13 is connected; a contact plate 15 configured to come into electric contact with a collector electrode of the power device D; and a block-shaped third connecting terminal 16 fixed to the contact plate 15. Further, the first connecting terminal 12, the second connecting terminal 14 and the third connecting terminal 16 electrically come into direct contact with corresponding connection terminals of a tester, respectively.

摘要翻译： 探针卡10包括被配置为与功率器件D的发射电极电接触的第一探头11; 连接有第一探针11的块状的第一连接端子12; 配置为与功率器件D的栅电极电接触的第二探头13; 连接有第二探针13的块状的第二连接端子14; 接触板15，被配置为与电力设备D的集电极电接触; 以及固定到接触板15的块状的第三连接端子16.此外，第一连接端子12，第二连接端子14和第三连接端子16分别与测试器的对应的连接端子直接接触。

公开(公告)号：US20140247037A1

公开(公告)日：2014-09-04

申请号：US14346381

申请日：2012-07-30

申请人： Eiichi Shinohara ,  Ken Taoka

发明人： Eiichi Shinohara ,  Ken Taoka

IPC分类号： G01R1/04 ,  G01R1/067

CPC分类号： G01R1/0491 ,  G01R1/067 ,  G01R31/2887 ,  G01R31/2891

摘要： A probe apparatus 10 has a movable mounting table 12 that mounts a wafer W on which multiple power devices are formed; a probe card 14 that is provided above the mounting table 12 and has multiple probes 14A; a conductive film electrode 13 formed on a mounting surface of the mounting table 12 and an outer peripheral surface thereof; and a measurement line 16 that electrically connects the conductive film electrode 13 to a tester 17. Further, the probe apparatus measures electrical characteristics of the power devices on the mounting table 12 at a wafer level. Furthermore, the measurement line 16 includes a switch device 18 configured to open and close an electric path of the measurement line 16 between the conductive film electrode 13 and the tester 17.

摘要翻译： 探针装置10具有安装在其上形成有多个功率器件的晶片W的可移动安装台12; 探针卡14，其设置在安装台12的上方并具有多个探针14A; 形成在安装台12的安装面上的导电膜电极13及其外周面; 以及将导电膜电极13电连接到测试器17的测量线16.此外，探针装置测量晶片级上的安装台12上的功率器件的电特性。 此外，测量线16包括开关装置18，其被配置为打开和关闭导电膜电极13和测试器17之间的测量线16的电路。

公开(公告)号：US09347970B2

公开(公告)日：2016-05-24

申请号：US14346381

申请日：2012-07-30

申请人： Eiichi Shinohara ,  Ken Taoka

发明人： Eiichi Shinohara ,  Ken Taoka

IPC分类号： G01R1/04 ,  G01R1/067 ,  G01R31/28

CPC分类号： G01R1/0491 ,  G01R1/067 ,  G01R31/2887 ,  G01R31/2891

摘要： A probe apparatus 10 has a movable mounting table 12 that mounts a wafer W on which multiple power devices are formed; a probe card 14 that is provided above the mounting table 12 and has multiple probes 14A; a conductive film electrode 13 formed on a mounting surface of the mounting table 12 and an outer peripheral surface thereof; and a measurement line 16 that electrically connects the conductive film electrode 13 to a tester 17. Further, the probe apparatus measures electrical characteristics of the power devices on the mounting table 12 at a wafer level. Furthermore, the measurement line 16 includes a switch device 18 configured to open and close an electric path of the measurement line 16 between the conductive film electrode 13 and the tester 17.

摘要翻译： 探针装置10具有安装在其上形成有多个功率器件的晶片W的可移动安装台12; 探针卡14，其设置在安装台12的上方并具有多个探针14A; 形成在安装台12的安装面上的导电膜电极13及其外周面; 以及将导电膜电极13电连接到测试器17的测量线16.此外，探针装置测量晶片级上的安装台12上的功率器件的电特性。 此外，测量线16包括开关装置18，其被配置为打开和关闭导电膜电极13和测试器17之间的测量线16的电路。

公开(公告)号：USD609652S1

公开(公告)日：2010-02-09

申请号：US29331222

申请日：2009-01-22

申请人： Munetoshi Nagasaka ,  Ikuo Ogasawara ,  Eiichi Shinohara

设计人： Munetoshi Nagasaka ,  Ikuo Ogasawara ,  Eiichi Shinohara

公开(公告)号：US08085052B2

公开(公告)日：2011-12-27

申请号：US12842756

申请日：2010-07-23

申请人： Eiichi Shinohara ,  Kazuki Hanawa

发明人： Eiichi Shinohara ,  Kazuki Hanawa

IPC分类号： G01N27/60 ,  G01R31/20

CPC分类号： H05F3/02 ,  G01R31/2891

摘要： A charge eliminating apparatus eliminates, when an electrical characteristics test of a target object is performed by moving a mounting table mounting the target object thereon and a probe card relative to each other to bring the target object into electrical contact with the probe card, static electricity of the target object via the mounting table. The charge eliminating apparatus includes a grounding wiring for grounding the mounting table; a relay switch disposed on the grounding wiring; and a switch controller that controls the relay switch to be opened or closed.

摘要翻译： 电荷消除装置通过将安装目标物体的安装台和探针卡相对于彼此移动来使目标物体与探针卡电接触来进行目标物体的电气特性试验时的静电 的目标对象。 电荷消除装置包括用于将安装台接地的接地线; 设置在接地布线上的继电器开关; 以及控制继电器开关打开或关闭的开关控制器。

公开(公告)号：US07859279B2

公开(公告)日：2010-12-28

申请号：US11861905

申请日：2007-09-26

申请人： Eiichi Shinohara ,  Kazuki Hanawa

发明人： Eiichi Shinohara ,  Kazuki Hanawa

IPC分类号： G01R31/26

CPC分类号： H05F3/02 ,  G01R31/2891

摘要： A charge eliminating apparatus eliminates, when an electrical characteristics test of a target object is performed by moving a mounting table mounting the target object thereon and a probe card relative to each other to bring the target object into electrical contact with the probe card, static electricity of the target object via the mounting table. The charge eliminating apparatus includes a grounding wiring for grounding the mounting table; a relay switch disposed on the grounding wiring; and a switch controller that controls the relay switch to be opened or closed.

摘要翻译： 电荷消除装置通过将安装目标物体的安装台和探针卡相对于彼此移动来使目标物体与探针卡电接触来进行目标物体的电气特性试验时的静电 的目标对象。 电荷消除装置包括用于将安装台接地的接地线; 设置在接地布线上的继电器开关; 以及控制继电器开关打开或关闭的开关控制器。