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公开(公告)号：US08872105B2
公开(公告)日：2014-10-28
申请号：US13770765
申请日：2013-02-19
Applicant: FEI Company
IPC: G01N21/64 , H01J37/30 , H01J37/26 , G01N23/225 , H01J37/22
CPC classification number: H01J37/226 , G01N21/64 , G01N21/6458 , G01N2021/6439 , H01J37/26 , H01J37/28 , H01J2237/006
Abstract: Vapor is provided locally at a sample surface to allow fluorescence of the fluorescent markers in a vacuum chamber. For example, a nanocapillary can dispense a liquid near a region of interest, the liquid evaporating to increase the vapor pressure near the fluorescent markers. The increase in vapor pressure at the fluorescent marker is preferably sufficiently great to prevent deactivation or to reactivate the fluorescent marker, while the overall pressure in the vacuum chamber is preferably sufficiently low to permit charged particle beam operation with little or no additional evacuation pumping.
Abstract translation: 在样品表面局部提供蒸气，以允许荧光标记在真空室中的荧光。 例如，纳米毛细管可以分配感兴趣区域附近的液体，液体蒸发以增加荧光标记附近的蒸气压。 荧光标记物上的蒸气压的增加优选足够大，以防止失活或重新激活荧光标记物，而真空室中的总体压力优选足够低以允许带电粒子束操作很少或不需要额外的抽真空泵送。
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Patent Agency Ranking
公开(公告)号：US20150028205A1
公开(公告)日：2015-01-29
申请号：US14496555
申请日：2014-09-25
Applicant: FEI Company
CPC classification number: H01J37/226 , G01N21/64 , G01N21/6458 , G01N2021/6439 , H01J37/26 , H01J37/28 , H01J2237/006
Abstract: Vapor is provided locally at a sample surface to allow fluorescence of the fluorescent markers in a vacuum chamber. For example, a nanocapillary can dispense a liquid near a region of interest, the liquid evaporating to increase the vapor pressure near the fluorescent markers. The increase in vapor pressure at the fluorescent marker is preferably sufficiently great to prevent deactivation or to reactivate the fluorescent marker, while the overall pressure in the vacuum chamber is preferably sufficiently low to permit charged particle beam operation with little or no additional evacuation pumping.
Abstract translation: 在样品表面局部提供蒸气，以允许荧光标记在真空室中的荧光。 例如，纳米毛细管可以分配感兴趣区域附近的液体，液体蒸发以增加荧光标记附近的蒸气压。 荧光标记物上的蒸气压的增加优选足够大，以防止失活或重新激活荧光标记物，而真空室中的总体压力优选足够低以允许带电粒子束操作很少或不需要额外的抽真空泵送。
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公开(公告)号：US20190013178A1
公开(公告)日：2019-01-10
申请号：US16028622
申请日：2018-07-06
Applicant: FEI Company
Inventor： Cameron James Zachreson , Dolf Timmerman , Milos Toth , Jorge Filevich , Steven Randolph , Aurelien Philippe Jean Maclou Botman
IPC: H01J37/28 , H01J37/147 , G02B26/10 , G02B27/09
CPC classification number: H01J37/28 , G02B26/10 , G02B27/0916 , H01J37/1471 , H01J37/228 , H01J37/265
Abstract: A method and system are disclosed for observing and aligning a beam of light in the sample chamber of a charged particle beam (CPB) system, such as an electron microscope or focused ion beam system. The method comprises providing an imaging aid inside the sample chamber with a calibration surface configured such that when illuminated by light, and simultaneously illuminated by a CPB, the intensity of the secondary radiation induced by the CPB is different in regions also illuminated by light relative to regions with lower light illumination levels, thereby providing an image of the light beam on the calibration surface. The image of the light beam may be used to align the light beam to the charged particle beam.
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公开(公告)号：US20140231644A1
公开(公告)日：2014-08-21
申请号：US13770765
申请日：2013-02-19
Applicant: FEI Company
IPC: G01N23/225
CPC classification number: H01J37/226 , G01N21/64 , G01N21/6458 , G01N2021/6439 , H01J37/26 , H01J37/28 , H01J2237/006
Abstract: Vapor is provided locally at a sample surface to allow fluorescence of the fluorescent markers in a vacuum chamber. For example, a nanocapillary can dispense a liquid near a region of interest, the liquid evaporating to increase the vapor pressure near the fluorescent markers. The increase in vapor pressure at the fluorescent marker is preferably sufficiently great to prevent deactivation or to reactivate the fluorescent marker, while the overall pressure in the vacuum chamber is preferably sufficiently low to permit charged particle beam operation with little or no additional evacuation pumping.
Abstract translation: 在样品表面局部提供蒸气，以允许荧光标记在真空室中的荧光。 例如，纳米毛细管可以分配感兴趣区域附近的液体，液体蒸发以增加荧光标记附近的蒸气压。 荧光标记物上的蒸气压的增加优选足够大，以防止失活或重新激活荧光标记物，而真空室中的总体压力优选足够低以允许带电粒子束操作很少或不需要额外的抽真空泵送。
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公开(公告)号：US10777383B2
公开(公告)日：2020-09-15
申请号：US16028622
申请日：2018-07-06
Applicant: FEI Company
Inventor： Cameron James Zachreson , Dolf Timmerman , Milos Toth , Jorge Filevich , Steven Randolph , Aurelien Philippe Jean Maclou Botman
Abstract: A method and system are disclosed for observing and aligning a beam of light in the sample chamber of a charged particle beam (CPB) system, such as an electron microscope or focused ion beam system. The method comprises providing an imaging aid inside the sample chamber with a calibration surface configured such that when illuminated by light, and simultaneously illuminated by a CPB, the intensity of the secondary radiation induced by the CPB is different in regions also illuminated by light relative to regions with lower light illumination levels, thereby providing an image of the light beam on the calibration surface. The image of the light beam may be used to align the light beam to the charged particle beam.
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公开(公告)号：US09269530B2
公开(公告)日：2016-02-23
申请号：US14496555
申请日：2014-09-25
Applicant: FEI Company
IPC: H01J37/22 , G01N21/64 , G01N23/225 , H01J37/26
CPC classification number: H01J37/226 , G01N21/64 , G01N21/6458 , G01N2021/6439 , H01J37/26 , H01J37/28 , H01J2237/006
Abstract: Vapor is provided locally at a sample surface to allow fluorescence of the fluorescent markers in a vacuum chamber. For example, a nanocapillary can dispense a liquid near a region of interest, the liquid evaporating to increase the vapor pressure near the fluorescent markers. The increase in vapor pressure at the fluorescent marker is preferably sufficiently great to prevent deactivation or to reactivate the fluorescent marker, while the overall pressure in the vacuum chamber is preferably sufficiently low to permit charged particle beam operation with little or no additional evacuation pumping.
Abstract translation: 在样品表面局部提供蒸气，以允许荧光标记在真空室中的荧光。 例如，纳米毛细管可以分配感兴趣区域附近的液体，液体蒸发以增加荧光标记附近的蒸气压。 荧光标记物上的蒸气压的增加优选足够大，以防止失活或重新激活荧光标记物，而真空室中的总体压力优选足够低以允许带电粒子束操作很少或不需要额外的抽真空泵送。
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