公开(公告)号：US11158487B2

公开(公告)日：2021-10-26

申请号：US16370023

申请日：2019-03-29

Applicant: FEI Company

Inventor： Clifford Russell Bugge ,  Craig Henry ,  Michael B. Schmidt ,  Mark Najarian

IPC: H01J37/305 ,  H01J37/20 ,  H01J37/147 ,  H01J37/28 ,  H01L21/67

Abstract: Ion beams are directed to a substrate surface to expose a tapered, tilted surface in the substrate. The ion beams and the substrate are situated so that a first ion beam is incident along a first axis at a glancing angle, and a second ion beam is incident along a second axis in a plane defined by the glancing angle and at an angle with respect to the first axis. Exposure to the second ion beam tends to produced superior quality in the exposed surface such as by reducing curtain artifacts.

公开(公告)号：US09653260B2

公开(公告)日：2017-05-16

申请号：US13691270

申请日：2012-11-30

Applicant: FEI Company

Inventor： Paul Keady ,  Brennan Peterson ,  Guus Das ,  Craig Henry ,  Larry Dworkin ,  Jeff Blackwood ,  Stacey Stone ,  Michael Schmidt

IPC: G01N1/32 ,  H01J37/305 ,  C23C14/58 ,  H01J37/28 ,  H01J37/30

CPC classification number: H01J37/3056 ,  C23C14/5833 ,  G01N1/32 ,  H01J37/20 ,  H01J37/28 ,  H01J37/3005 ,  H01J2237/024 ,  H01J2237/20207 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method for TEM sample preparation and analysis that can be used in a FIB-SEM system without re-welds, unloads, user handling of the lamella, or a motorized flip stage. The method allows a dual beam FIB-SEM system with a typical tilt stage to be used to extract a sample to from a substrate, mount the sample onto a TEM sample holder capable of tilting, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to an electron column for STEM imaging.

公开(公告)号：US20200312618A1

公开(公告)日：2020-10-01

申请号：US16370023

申请日：2019-03-29

Applicant: FEI Company

Inventor： Clifford Russell Bugge ,  Craig Henry ,  Michael B. Schmidt ,  Mark Najarian

IPC: H01J37/305 ,  H01J37/147 ,  H01J37/20 ,  H01J37/28 ,  H01L21/67

Abstract: Ion beams are directed to a substrate surface to expose a tapered, tilted surface in the substrate. The ion beams and the substrate are situated so that a first ion beam is incident along a first axis at a glancing angle, and a second ion beam is incident along a second axis in a plane defined by the glancing angle and at an angle with respect to the first axis. Exposure to the second ion beam tends to produced superior quality in the exposed surface such as by reducing curtain artifacts.

公开(公告)号：US20130248354A1

公开(公告)日：2013-09-26

申请号：US13691270

申请日：2012-11-30

Applicant: FEI Company

Inventor： Paul Keady ,  Brennan Peterson ,  Guus Das ,  Craig Henry ,  Larry Dworkin ,  Jeff Blackwood ,  Stacey Stone ,  Michael Schmidt

IPC: H01J37/305 ,  H01J37/30

CPC classification number: H01J37/3056 ,  C23C14/5833 ,  G01N1/32 ,  H01J37/20 ,  H01J37/28 ,  H01J37/3005 ,  H01J2237/024 ,  H01J2237/20207 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method for TEM sample preparation and analysis that can be used in a FIB-SEM system without re-welds, unloads, user handling of the lamella, or a motorized flip stage. The method allows a dual beam FIB-SEM system with a typical tilt stage to be used to extract a sample to from a substrate, mount the sample onto a TEM sample holder capable of tilting, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to an electron column for STEM imaging.

Abstract translation: 可用于FIB-SEM系统中的TEM样品制备和分析方法，无需重新焊接，卸载，用户处理薄片或电动翻转阶段。 该方法允许使用具有典型倾斜台的双光束FIB-SEM系统将样品从基底提取，将样品安装到能够倾斜的TEM样品保持器上，使用FIB研磨使样品变薄，并旋转样品 使得样品面垂直于用于STEM成像的电子柱。