公开(公告)号：US09633816B2

公开(公告)日：2017-04-25

申请号：US14715432

申请日：2015-05-18

Applicant: FEI Company

Inventor： Toby Shanley ,  John Scott ,  Milos Toth

IPC: H01J37/244 ,  H01J37/18 ,  H01J37/22 ,  H01J37/28

CPC classification number: H01J37/18 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/182 ,  H01J2237/2448 ,  H01J2237/2605 ,  H01J2237/2608 ,  H01J2237/2801 ,  H01J2237/2806

Abstract: Charged particle beam imaging and measurement systems are provided using gas amplification with an improved imaging gas. The system includes a charged particle beam source for directing a charged particle beam to work piece, a focusing lens for focusing the charged particles onto the work piece, and an electrode for accelerating secondary electrons generated from the work piece irradiation by the charged practice beam, or another gas cascade detection scheme. The gas imaging is performed in a high pressure scanning electron microscope (HPSEM) chamber for enclosing the improved imaging gas including CH3CH2OH (ethanol) vapor. The electrode accelerates the secondary electrons though the CH3CH2OH to ionize the CH3CH2OH through ionization cascade to amplify the number of secondary electrons for detection. An optimal configuration is provided for use of the improved imaging gas, and techniques are provided to conduct imaging studies of organic liquids and solvents, and other CH3CH2OH-based processes.

公开(公告)号：US20160343537A1

公开(公告)日：2016-11-24

申请号：US14715432

申请日：2015-05-18

Applicant: FEI Company

Inventor： Toby Shanley ,  John Scott ,  Milos Toth

IPC: H01J37/18 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/18 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/182 ,  H01J2237/2448 ,  H01J2237/2605 ,  H01J2237/2608 ,  H01J2237/2801 ,  H01J2237/2806

Abstract: Charged particle beam imaging and measurement systems are provided using gas amplification with an improved imaging gas. The system includes a charged particle beam source for directing a charged particle beam to work piece, a focusing lens for focusing the charged particles onto the work piece, and an electrode for accelerating secondary electrons generated from the work piece irradiation by the charged practice beam, or another gas cascade detection scheme. The gas imaging is performed in a high pressure scanning electron microscope (HPSEM) chamber for enclosing the improved imaging gas including CH3CH2OH (ethanol) vapor. The electrode accelerates the secondary electrons though the CH3CH2OH to ionize the CH3CH2OH through ionization cascade to amplify the number of secondary electrons for detection. An optimal configuration is provided for use of the improved imaging gas, and techniques are provided to conduct imaging studies of organic liquids and solvents, and other CH3CH2OH-based processes.

Abstract translation: 使用具有改进的成像气体的气体放大来提供带电粒子束成像和测量系统。 该系统包括用于将带电粒子束引导到工件的带电粒子束源，用于将带电粒子聚焦到工件上的聚焦透镜，以及用于加速通过带电实践光束从工件照射产生的二次电子的电极， 或另一种气体级联检测方案。 气体成像在高压扫描电子显微镜（HPSEM）室中进行，用于包围改进的成像气体，包括CH 3 CH 2 OH（乙醇）蒸气。 电极通过CH3CH2OH加速二次电子，通过离子化级联离子化CH 3 CH 2 OH，以放大用于检测的二次电子数。 提供了使用改进的成像气体的最佳配置，并且提供了用于进行有机液体和溶剂的成像研究的技术以及其它基于CH 3 CH 2 OH的方法。