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公开(公告)号：US20170082497A1
公开(公告)日：2017-03-23
申请号：US14730116
申请日：2015-06-03
申请人： FLIR Systems, Inc.
发明人： Robert F. Cannata , Kevin Peters , Patrick Franklin , James L. Dale , Tommy Marx , Craig Shott , Reza Salafian , Richard E. Bornfreund , Saumya Kothari
IPC分类号： G01J5/24
CPC分类号： G01J5/24 , G01J5/024 , G01J5/046 , G01J5/0853 , G01J5/20 , G01J2005/0077
摘要： Systems and methods may be provided for forming enhanced infrared absorption microbolometers. An enhanced infrared absorption microbolometer may include a metal cap formed from a thin layer of oxidizing metal such as titanium and/or a titanium oxide. The metal cap may be formed within a bridge portion of the microbolometer. The bridge portion may include other layers such as first and second absorber layers disposed on opposing sides of a layer of temperature sensitive resistive material. The layer of temperature sensitive resistive material may be located between the metal cap and a reflecting metal layer formed on a readout integrated circuit for the microbolometer.
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公开(公告)号：US10677656B2
公开(公告)日：2020-06-09
申请号：US15465505
申请日：2017-03-21
申请人： FLIR SYSTEMS, INC.
发明人： Eric A. Kurth , Chris Chan , Kevin Peters , Patrick Franklin , Robert F. Cannata , James L. Dale , Tommy Marx , David Howard , Jefferson Rose , Michael DeBar
IPC分类号： G01J5/02 , H01L27/146 , H01L25/04 , G01M3/38 , G01L21/12 , G01J5/06 , G01M3/34 , G01J5/20 , G01J5/00 , G01M3/00
摘要： A device is disclosed including a substrate and a floating blinded infrared detector and/or a shunted blinded infrared detector. The floating blinded infrared detector may include an infrared detector coupled to and thermally isolated from the substrate; and a blocking structure disposed above the infrared detector to block external thermal radiation from being received by the infrared detector; and wherein the blocking structure comprises a plurality of openings. The shunted blinded infrared detector may include an additional infrared detector coupled to the substrate; an additional blocking structure disposed above the infrared detector to block external thermal radiation from being received by the additional infrared detector; and a material that thermally couples the additional infrared detector to the substrate and the additional blocking structure. Methods for using and forming the device are also disclosed.
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公开(公告)号：US09945729B2
公开(公告)日：2018-04-17
申请号：US14730116
申请日：2015-06-03
申请人： FLIR Systems, Inc.
发明人： Robert F. Cannata , Kevin Peters , Patrick Franklin , Eric A. Kurth , James L. Dale , Tommy Marx , Craig Shott , Reza Salafian , Richard E. Bornfreund , Saumya Kothari
CPC分类号： G01J5/24 , G01J5/024 , G01J5/046 , G01J5/0853 , G01J5/20 , G01J2005/0077
摘要： Systems and methods may be provided for forming enhanced infrared absorption microbolometers. An enhanced infrared absorption microbolometer may include a metal cap formed from a thin layer of oxidizing metal such as titanium and/or a titanium oxide. The metal cap may be formed within a bridge portion of the microbolometer. The bridge portion may include other layers such as first and second absorber layers disposed on opposing sides of a layer of temperature sensitive resistive material. The layer of temperature sensitive resistive material may be located between the metal cap and a reflecting metal layer formed on a readout integrated circuit for the microbolometer.
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公开(公告)号：US20170191868A1
公开(公告)日：2017-07-06
申请号：US15465505
申请日：2017-03-21
申请人： FLIR SYSTEMS, INC.
发明人： Eric A. Kurth , Chris Chan , Kevin Peters , Patrick Franklin , Robert F. Cannata , James L. Dale , Tommy Marx , David Howard , Jefferson Rose , Michael DeBar
IPC分类号： G01J1/02 , H01L25/04 , H01L27/146 , G01J1/42 , G01J1/16
CPC分类号： G01J5/0245 , G01J5/20 , G01J2005/0077 , G01J2005/065 , G01J2005/202 , G01L21/12 , G01M3/002 , G01M3/34 , G01M3/38 , H01L25/042 , H01L27/14618 , H01L27/14623 , H01L27/14669
摘要： A device is disclosed including a substrate and a floating blinded infrared detector and/or a shunted blinded infrared detector. The floating blinded infrared detector may include an infrared detector coupled to and thermally isolated from the substrate; and a blocking structure disposed above the infrared detector to block external thermal radiation from being received by the infrared detector; and wherein the blocking structure comprises a plurality of openings. The shunted blinded infrared detector may include an additional infrared detector coupled to the substrate; an additional blocking structure disposed above the infrared detector to block external thermal radiation from being received by the additional infrared detector; and a material that thermally couples the additional infrared detector to the substrate and the additional blocking structure. Methods for using and forming the device are also disclosed.
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