公开(公告)号：US09352520B2

公开(公告)日：2016-05-31

申请号：US14227342

申请日：2014-03-27

Applicant: FUJIFILM Corporation

Inventor： Mitsuji Yoshibayashi ,  Yasuo Sugishima

IPC: B44C1/22 ,  B29D11/00 ,  G03F7/00 ,  G02B5/20 ,  G02B5/23 ,  G02F1/1335

CPC classification number: B29D11/00634 ,  G02B5/201 ,  G02B5/23 ,  G02F1/133516 ,  G03F7/0007

Abstract: There is provided a pattern forming method, including: forming an organic film layer on a substrate; forming a patterned photoresist mask on the organic film layer; and performing a specific dry etching process to form a pattern on the organic layer.

Abstract translation: 提供了一种图案形成方法，包括：在基板上形成有机膜层; 在有机薄膜层上形成图案化的光致抗蚀剂掩模; 并执行特定的干蚀刻工艺以在有机层上形成图案。

公开(公告)号：US09442373B2

公开(公告)日：2016-09-13

申请号：US14169367

申请日：2014-01-31

Applicant: FUJIFILM CORPORATION

Inventor： Kaoru Aoyagi ,  Naotsugu Muro ,  Mitsuji Yoshibayashi ,  Yushi Kaneko ,  Yasuo Sugishima

IPC: G03F7/00 ,  H01L27/146 ,  G03C7/12 ,  G02B5/20 ,  G02B5/22 ,  C09D7/12

CPC classification number: G03F7/0007 ,  C09D7/63 ,  G02B5/201 ,  G02B5/22 ,  G02B5/223 ,  G03C7/12 ,  H01L27/14621 ,  H01L27/14685

Abstract: The invention is directed to a colored composition containing a coloring agent and a resin, wherein a content of the coloring agent to a total solid content of the colored composition is 50% by weight or more and a solid content acid value of the resin is more than 80 mg KOH/g, and a method of producing a color filter including forming a first colored layer containing a first colored composition and patterning with dry etching so as to from a through-hole group in the first colored layer, wherein the first colored composition is the colored composition as defined herein.

Abstract translation: 本发明涉及含有着色剂和树脂的着色组合物，其中着色剂的总固体含量为着色组合物的含量为50重量％以上，树脂的固体成分酸值越多 超过80mg KOH / g的方法，以及一种生产滤色器的方法，该滤色器包括形成含有第一着色组合物的第一着色层，并且利用干蚀刻从第一着色层中的通孔基团图案化，其中第一着色层 组合物是本文定义的着色组合物。

公开(公告)号：US12187984B2

公开(公告)日：2025-01-07

申请号：US17683241

申请日：2022-02-28

Applicant: FUJIFILM Corporation

Inventor： Yasuo Sugishima

IPC: C11D3/28 ,  B08B3/10 ,  C11D3/00 ,  C11D3/04 ,  C11D3/20 ,  C11D3/30 ,  C11D3/33 ,  C11D3/43 ,  C11D7/08 ,  C11D7/26 ,  C11D7/32 ,  H01L21/302 ,  C23C16/06

Abstract: The present invention provides a treatment liquid that exhibits excellent washing properties and improves the smoothness of an object to be treated in a case where the treatment liquid is used for treating an object to be treated containing a cobalt-containing substance. The present invention also provides a method for treating an object to be treated. The treatment liquid according to an embodiment of the present invention contains water, hydroxylamine, and three kinds of first anions consisting of Cl−, NO2−, and NO3−, in which a total content of the first anions is 0.0001 to 30 parts by mass with respect to 100 parts by mass of the hydroxylamine.

公开(公告)号：US12139693B2

公开(公告)日：2024-11-12

申请号：US17850160

申请日：2020-12-24

Applicant: FUJIFILM Corporation

Inventor： Yasuo Sugishima

IPC: C11D7/06 ,  C11D7/10 ,  C11D7/16 ,  C11D7/26 ,  C11D7/32 ,  C11D7/34 ,  C11D7/36 ,  C11D7/50 ,  H01L21/02 ,  H01L21/3213

Abstract: A treatment liquid contains water, hydroxylamine, and one or more kinds of hydrazines selected from the group consisting of hydrazine, a hydrazine salt, and a hydrazine derivative, in which a total content of the hydrazines is 1 part by mass or less with respect to 100 parts by mass of the hydroxylamine.

公开(公告)号：US09664827B2

公开(公告)日：2017-05-30

申请号：US14172239

申请日：2014-02-04

Applicant: FUJIFILM Corporation

Inventor： Naotsugu Muro ,  Yasuo Sugishima ,  Kaoru Aoyagi ,  Mitsuji Yoshibayashi

IPC: G02B5/22 ,  G02B13/00 ,  G02B5/20 ,  H01L27/146 ,  G02B3/00

CPC classification number: G02B5/22 ,  G02B3/0006 ,  G02B5/201 ,  G02B13/0085 ,  H01L27/14621 ,  H01L27/14645 ,  H01L27/14685

Abstract: The invention is directed to a colored composition for forming a green color filter, containing a color pigment, wherein a content of the color pigment to a total solid content of the colored composition is 60% by weight or more, and a layer having a thickness of 0.6 μm formed from the colored composition has light transmittance of 80% or more at a wavelength of 550 nm and light transmittance of 50% or less at a wavelength of 450 nm, and a method of producing a color filter including (A) forming a first colored layer containing a first colored composition and (B) patterning with dry etching so as to from a through-hole group in the first colored layer, wherein the first colored composition is the colored composition as defined herein.

公开(公告)号：US11859119B2

公开(公告)日：2024-01-02

申请号：US17477554

申请日：2021-09-17

Applicant: FUJIFILM Corporation

Inventor： Tomonori Takahashi ,  Yasuo Sugishima

IPC: C09K13/00 ,  B08B3/08 ,  C23F1/34 ,  C23F1/36 ,  C23F1/38 ,  C23F1/40 ,  H01L21/02 ,  H01L21/3213

CPC classification number: C09K13/00 ,  B08B3/08 ,  C23F1/34 ,  C23F1/36 ,  C23F1/38 ,  C23F1/40 ,  H01L21/02071 ,  H01L21/32134

Abstract: The present invention provides a chemical liquid that causes a small variation in a dissolving amount of a first metal-containing substance in a case where the chemical liquid is applied to an object to be treated containing the first metal-containing substance. The present invention also provides a method for treating an object to be treated. The chemical liquid according to an embodiment of the present invention contains water, a hydroxylamine compound selected from the group consisting of hydroxylamine and a hydroxylamine salt, and a specific compound represented by Formula (1).

公开(公告)号：US09632222B2

公开(公告)日：2017-04-25

申请号：US14190841

申请日：2014-02-26

Applicant: FUJIFILM Corporation

Inventor： Yasuo Sugishima ,  Mitsuji Yoshibayashi ,  Kaoru Aoyagi ,  Yushi Kaneko ,  Naotsugu Muro

IPC: G03F7/00 ,  H01L27/146 ,  G02B5/20 ,  G02B5/22 ,  G02B5/28 ,  G02B13/00 ,  G02B3/00

CPC classification number: G02B5/201 ,  G02B3/0006 ,  G02B5/20 ,  G02B5/223 ,  G02B5/286 ,  G02B13/0085 ,  G03F7/0007 ,  H01L27/14621 ,  H01L27/14685

Abstract: This disclosure relates to a method for manufacturing a color filter being capable of suppressing a surface of a colored pattern from being rough in a planarization treatment, a color filter and a solid-state imaging device.

公开(公告)号：US09507257B2

公开(公告)日：2016-11-29

申请号：US14188955

申请日：2014-02-25

Applicant: FUJIFILM Corporation

Inventor： Yasuo Sugishima ,  Mitsuji Yoshibayashi ,  Kaoru Aoyagi ,  Yushi Kaneko

IPC: G03F7/00 ,  H01L27/146 ,  G02B3/00 ,  G02B5/28 ,  G02B5/20 ,  G02B5/22

CPC classification number: G03F7/0007 ,  G02B3/0006 ,  G02B5/20 ,  G02B5/201 ,  G02B5/223 ,  G02B5/286 ,  H01L27/14621 ,  H01L27/14685

Abstract: The present disclosure relates to a method for manufacturing a color filter being capable of suppressing residue from being generated on a colored layer planarized by a planarization treatment, a color filter, and a solid-state imaging device.

Abstract translation: 本公开涉及一种制造滤色器的方法，该滤色器能够抑制通过平坦化处理，滤色器和固态成像装置平坦化的着色层上产生的残留物。

公开(公告)号：US09442374B2

公开(公告)日：2016-09-13

申请号：US14189454

申请日：2014-02-25

Applicant: FUJIFILM CORPORATION

Inventor： Yasuo Sugishima ,  Mitsuji Yoshibayashi ,  Kaoru Aoyagi ,  Yushi Kaneko

IPC: B29D11/00 ,  G03F7/00 ,  H01L27/146 ,  G02B5/20 ,  G02B5/22 ,  G02B3/00

CPC classification number: G03F7/0007 ,  G02B3/0006 ,  G02B5/201 ,  G02B5/223 ,  H01L27/14621 ,  H01L27/14685 ,  Y10T428/24331

Abstract: There is provided a coloring composition including: a colorant; and a resin, wherein a content of the colorant is 50% by mass or more based on total solids of the coloring composition, and a solid acid number of a resin having a highest solid acid number among all kinds of resins contained in the coloring composition, is 80 mg KOH/g or less.

Abstract translation: 提供着色组合物，其包括：着色剂; 以及树脂，其中着色剂的含量基于着色组合物的总固体为50质量％以上，并且着色组合物中包含的所有种类的树脂中固体酸数最高的树脂的固体酸数 为80mg KOH / g以下。

公开(公告)号：US12275921B2

公开(公告)日：2025-04-15

申请号：US18170195

申请日：2023-02-16

Applicant: FUJIFILM Corporation

Inventor： Tomonori Takahashi ,  Yasuo Sugishima ,  Atsushi Mizutani

IPC: C11D3/34 ,  C11D1/04 ,  C11D1/14 ,  C11D1/34 ,  C11D3/00 ,  C11D3/30 ,  H01L21/02 ,  H01L21/3213

Abstract: A treatment liquid for a semiconductor device contains water, a removing agent, and a copolymer. The copolymer has a first repeating unit having at least one group selected from a primary amino group, a secondary amino group, a tertiary amino group, and a quaternary ammonium cation, and a second repeating unit different from the first repeating unit. A substrate treatment method using the treatment liquid is also provided.