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    Method of manufacturing a hermetic chamber with electrical feedthroughs
    5.
    发明申请
    Method of manufacturing a hermetic chamber with electrical feedthroughs 有权
    制造具有电馈通的密封室的方法

    公开(公告)号：US20060177956A1

    公开(公告)日：2006-08-10

    申请号：US11314696

    申请日：2005-12-20

    申请人： David O'Brien ,  Florent Cros ,  Jin Park ,  Michael Fonseca ,  Liang You ,  Mark Allen

    发明人： David O'Brien ,  Florent Cros ,  Jin Park ,  Michael Fonseca ,  Liang You ,  Mark Allen

    IPC分类号： H01L21/00

    CPC分类号： G01L9/0075 ,  A61B5/03 ,  A61B2562/0247 ,  B81B7/007 ,  B81B2201/0264 ,  B81B2201/06 ,  B81B2207/096 ,  B81C1/00301 ,  G01L9/0073

    摘要： A method of manufacturing a hermetically-sealed chamber with an electrical feedthrough includes the step of hermetically fixing an electrode to a substrate in a predetermined location on the substrate. A passage is formed through the substrate through the predetermined location such that at least a portion of the electrode is exposed to the passage. The passage is then at least partially filled with an electrically conductive material. A housing is then formed including the substrate such that the housing defines a chamber, with the electrode being disposed within the housing and the chamber being hermetically sealed. The electrode within the chamber can be placed in electrical communication with an exterior electrical component by way of the electrically conductive material in the passage.

    摘要翻译： 制造具有电馈通的气密密封室的方法包括将电极气密固定在基板上的预定位置上的步骤。 通过基板穿过预定位置形成通道，使得电极的至少一部分暴露于通道。 然后通道至少部分地填充有导电材料。 然后形成包括基板的壳体，使得壳体限定室，其中电极设置在壳体内，并且室被气密地密封。 室内的电极可以通过通道中的导电材料与外部电气部件电连接。

    Hermetic chamber with electrical feedthroughs
    6.
    发明申请
    Hermetic chamber with electrical feedthroughs 审中-公开
    具有电馈通的气密室

    公开(公告)号：US20060174712A1

    公开(公告)日：2006-08-10

    申请号：US11314046

    申请日：2005-12-20

    申请人： David O'Brien ,  Florent Cros ,  Jin Park ,  Michael Fonseca ,  Liang You ,  Mark Allen

    发明人： David O'Brien ,  Florent Cros ,  Jin Park ,  Michael Fonseca ,  Liang You ,  Mark Allen

    IPC分类号： G01L7/00

    CPC分类号： G01L9/0075 ,  A61B5/03 ,  A61B2562/0247 ,  B81B7/007 ,  B81B2201/0264 ,  B81B2201/06 ,  B81B2207/096 ,  B81C1/00301 ,  G01L9/0073

    摘要： A pressure cavity is durable, stable, and biocompatible and configured in such a way that it constitutes pico to nanoliter-scale volume. The pressure cavity is hermetically sealed from the exterior environment while maintaining the ability to communicate with other devices. Micromachined, hermetically-sealed sensors are configured to receive power and return information through direct electrical contact with external electronics. The pressure cavity and sensor components disposed therein are hermetically sealed from the ambient in order to reduce drift and instability within the sensor. The sensor is designed for harsh and biological environments, e.g. intracorporeal implantation and in vivo use. Additionally, novel manufacturing methods are employed to construct the sensors.

    摘要翻译： 压力腔是耐用的，稳定的和生物相容的并且被配置成使得其构成微微至纳升级体积的量。 压力腔与外部环境密封，同时保持与其他设备通信的能力。 微加工的密封传感器配置为通过与外部电子设备的直接电气接触来接收电力并返回信息。 设置在其中的压力腔和传感器部件与环境密封，以便减少传感器内的漂移和不稳定性。 传感器设计用于苛刻和生物环境，例如 体内植入和体内使用。 另外，采用新的制造方法构造传感器。

    Hermetic chamber with electrical feedthroughs
    7.
    发明授权
    Hermetic chamber with electrical feedthroughs 有权
    具有电馈通的气密室

    公开(公告)号：US07647836B2

    公开(公告)日：2010-01-19

    申请号：US11748803

    申请日：2007-05-15

    申请人： David O'Brien ,  Christophe Courcimault ,  Liang You ,  Mark Allen ,  Michael Fonseca ,  Florent Cros

    发明人： David O'Brien ,  Christophe Courcimault ,  Liang You ,  Mark Allen ,  Michael Fonseca ,  Florent Cros

    IPC分类号： G01L7/00

    CPC分类号： G01L9/0075 ,  G01L9/0042 ,  G01L9/0055 ,  Y10T29/49002

    摘要： A pressure cavity is durable, stable, and biocompatible and configured in such a way that it constitutes pico to nanoliter-scale volume. The pressure cavity is hermetically sealed from the exterior environment while maintaining the ability to communicate with other devices. Micromachined, hermetically-sealed sensors are configured to receive power and return information through direct electrical contact with external electronics. The pressure cavity and sensor components disposed therein are hermetically sealed from the ambient in order to reduce drift and instability within the sensor. The sensor is designed for harsh and biological environments, e.g. intracorporeal implantation and in vivo use. Additionally, novel manufacturing methods are employed to construct the sensors.

    摘要翻译： 压力腔是耐用的，稳定的和生物相容的并且被配置成使得其构成微微至纳升级体积的量。 压力腔与外部环境密封，同时保持与其他设备通信的能力。 微加工的密封传感器配置为通过与外部电子设备的直接电气接触来接收电力并返回信息。 设置在其中的压力腔和传感器部件与环境密封，以便减少传感器内的漂移和不稳定性。 传感器设计用于苛刻和生物环境，例如 体内植入和体内使用。 另外，采用新的制造方法构造传感器。

    Method of manufacturing a hermetic chamber with electrical feedthroughs
    8.
    发明授权
    Method of manufacturing a hermetic chamber with electrical feedthroughs 有权
    制造具有电馈通的密封室的方法

    公开(公告)号：US07662653B2

    公开(公告)日：2010-02-16

    申请号：US11314696

    申请日：2005-12-20

    申请人： David O'Brien ,  Florent Cros ,  Jin Woo Park ,  Michael Fonseca ,  Liang You ,  Mark Allen

    发明人： David O'Brien ,  Florent Cros ,  Jin Woo Park ,  Michael Fonseca ,  Liang You ,  Mark Allen

    IPC分类号： H01L21/00

    CPC分类号： G01L9/0075 ,  A61B5/03 ,  A61B2562/0247 ,  B81B7/007 ,  B81B2201/0264 ,  B81B2201/06 ,  B81B2207/096 ,  B81C1/00301 ,  G01L9/0073

    摘要： A method of manufacturing a hermetically-sealed chamber with an electrical feedthrough includes the step of hermetically fixing an electrode to a substrate in a predetermined location on the substrate. A passage is formed through the substrate through the predetermined location such that at least a portion of the electrode is exposed to the passage. The passage is then at least partially filled with an electrically conductive material. A housing is then formed including the substrate such that the housing defines a chamber, with the electrode being disposed within the housing and the chamber being hermetically sealed. The electrode within the chamber can be placed in electrical communication with an exterior electrical component by way of the electrically conductive material in the passage.

    摘要翻译： 制造具有电馈通的气密密封室的方法包括将电极气密固定在基板上的预定位置上的步骤。 通过基板穿过预定位置形成通道，使得电极的至少一部分暴露于通道。 然后通道至少部分地填充有导电材料。 然后形成包括基板的壳体，使得壳体限定室，其中电极设置在壳体内，并且室被气密地密封。 室内的电极可以通过通道中的导电材料与外部电气部件电连接。

    Hermetic Chamber with Electrical Feedthroughs
    10.
    发明申请
    Hermetic Chamber with Electrical Feedthroughs 有权
    具有电馈通气密室

    公开(公告)号：US20090145623A1

    公开(公告)日：2009-06-11

    申请号：US12372274

    申请日：2009-02-17

    申请人： David O'Brien ,  Florent Cros ,  Jin Woo Park ,  Michael Fonseca ,  Liang You ,  Mark Allen

    发明人： David O'Brien ,  Florent Cros ,  Jin Woo Park ,  Michael Fonseca ,  Liang You ,  Mark Allen

    IPC分类号： H05K5/06

    CPC分类号： G01L9/0075 ,  A61B5/03 ,  A61B2562/0247 ,  B81B7/007 ,  B81B2201/0264 ,  B81B2201/06 ,  B81B2207/096 ,  B81C1/00301 ,  G01L9/0073

    摘要： A pressure cavity is durable, stable, and biocompatible and configured in such a way that it constitutes pico to nanoliter-scale volume. The pressure cavity is hermetically sealed from the exterior environment while maintaining the ability to communicate with other devices. Micromachined, hermetically-sealed sensors are configured to receive power and return information through direct electrical contact with external electronics. The pressure cavity and sensor components disposed therein are hermetically sealed from the ambient in order to reduce drift and instability within the sensor. The sensor is designed for harsh and biological environments, e.g. intracorporeal implantation and in vivo use. Additionally, novel manufacturing methods are employed to construct the sensors.

    摘要翻译： 压力腔是耐用的，稳定的和生物相容的并且被配置成使得其构成微微至纳升级体积的量。 压力腔与外部环境密封，同时保持与其他设备通信的能力。 微加工的密封传感器配置为通过与外部电子设备的直接电气接触来接收电力并返回信息。 设置在其中的压力腔和传感器部件与环境密封，以便减少传感器内的漂移和不稳定性。 传感器设计用于苛刻和生物环境，例如 体内植入和体内使用。 另外，采用新的制造方法构造传感器。