公开(公告)号：US20170190018A1

公开(公告)日：2017-07-06

申请号：US15394274

申请日：2016-12-29

Applicant: Fujikoshi Machinery Corp. ,  Kanazawa Institute of Technology

Inventor： Kazutaka SHIBUYA ,  Jun YANAGISAWA ,  Yoshio NAKAMURA ,  Michio UNEDA ,  Kenichi ISHIKAWA

IPC: B24B37/20 ,  B24B53/06 ,  B24B53/08 ,  B24B37/005

CPC classification number: B24B37/20 ,  B24B37/005 ,  B24B37/042 ,  B24B49/18 ,  B24B53/007 ,  B24B53/017 ,  B24B53/06 ,  B24B53/08

Abstract: The method of the present invention comprises the steps of: previously obtaining correlation data between surface properties of the polishing pad dressed under a plurality of stages of dressing conditions and polishing effects of the work polished by the polishing pad dressed under the dressing conditions; determining an assumed dressing condition capable of achieving an object polishing effect from the correlation data; dressing the polishing pad under the assumed dressing condition determined; polishing the work; cleaning the polishing pad which has been used for polishing the work; and measuring a surface property of the cleaned polishing pad.

公开(公告)号：US20180207768A1

公开(公告)日：2018-07-26

申请号：US15860794

申请日：2018-01-03

Applicant: Fujikoshi Machinery Corp. ,  Kanazawa Institute of Technology

Inventor： Kazutaka SHIBUYA ,  Yoshio NAKAMURA ,  Michio UNEDA ,  Kenichi ISHIKAWA

IPC: B24B53/017 ,  B24B49/12 ,  B24B37/10

CPC classification number: B24B53/017 ,  B24B37/107 ,  B24B49/12

Abstract: The polishing apparatus comprises: a dressing section for dressing a polishing pad; a measuring section for measuring a surface property of the polishing pad; a polishing result measuring section for measuring a polishing result of a work; a storing section for storing correlation data between dressing condition data for dressing the polishing pad, surface property of the polishing pad and polishing results, which are learned by an artificial intelligence; and an input section for inputting an object polishing result. The artificial intelligence performs a first arithmetic process, in which the surface property of the polishing pad corresponding to the object polishing result is inversely estimated on the basis of the correlation data, and a second arithmetic process, in which the corresponding dressing condition is derived on the basis of the surface property of the polishing pad inversely estimated.