公开(公告)号：US09943943B2

公开(公告)日：2018-04-17

申请号：US15051928

申请日：2016-02-24

Applicant: EBARA CORPORATION

Inventor： Hiroyuki Shinozaki ,  Takahiro Shimano ,  Akira Imamura ,  Akira Nakamura

IPC: B24B49/02 ,  B24B49/04 ,  B24B49/18 ,  B24B53/017 ,  B24B37/005 ,  B24B53/08 ,  B24B53/00 ,  B24B37/04

CPC classification number: B24B37/005 ,  B24B37/042 ,  B24B49/02 ,  B24B49/04 ,  B24B49/18 ,  B24B49/186 ,  B24B53/005 ,  B24B53/017 ,  B24B53/08

Abstract: A method is capable of monitoring the polishing surface of the polishing pad without removing the polishing pad from the polishing table. The method includes: conditioning the polishing surface of the polishing pad by causing a rotating dresser to oscillate on the polishing surface; measuring a height of the polishing surface when the conditioning of the polishing surface is performed; calculating a position of a measuring point of the height on a two-dimensional surface defined on the polishing surface; and repeating the measuring of the height of the polishing surface and the calculating of the position of the measuring point to create height distribution in the polishing surface.

公开(公告)号：US20160207162A1

公开(公告)日：2016-07-21

申请号：US15051928

申请日：2016-02-24

Applicant: EBARA CORPORATION

Inventor： Hiroyuki SHINOZAKI ,  Takahiro SHIMANO ,  Akira IMAMURA ,  Akira NAKAMURA

IPC: B24B37/005

CPC classification number: B24B37/005 ,  B24B37/042 ,  B24B49/02 ,  B24B49/04 ,  B24B49/18 ,  B24B49/186 ,  B24B53/005 ,  B24B53/017 ,  B24B53/08

Abstract: A method is capable of monitoring the polishing surface of the polishing pad without removing the polishing pad from the polishing table. The method includes: conditioning the polishing surface of the polishing pad by causing a rotating dresser to oscillate on the polishing surface; measuring a height of the polishing surface when the conditioning of the polishing surface is performed; calculating a position of a measuring point of the height on a two-dimensional surface defined on the polishing surface; and repeating the measuring of the height of the polishing surface and the calculating of the position of the measuring point to create height distribution in the polishing surface.

公开(公告)号：US20120309267A1

公开(公告)日：2012-12-06

申请号：US13479575

申请日：2012-05-24

Applicant: Hiroyuki SHINOZAKI ,  Takahiro SHIMANO ,  Akira IMAMURA ,  Akira NAKAMURA

Inventor： Hiroyuki SHINOZAKI ,  Takahiro SHIMANO ,  Akira IMAMURA ,  Akira NAKAMURA

IPC: B24B1/00 ,  B24B53/02 ,  B24B49/00

CPC classification number: B24B37/005 ,  B24B37/042 ,  B24B49/02 ,  B24B49/04 ,  B24B49/18 ,  B24B49/186 ,  B24B53/005 ,  B24B53/017 ,  B24B53/08

Abstract: The present invention provides a method capable of monitoring the polishing surface of the polishing pad without removing the polishing pad from the polishing table. The method includes: conditioning the polishing surface of the polishing pad by causing a rotating dresser to oscillate on the polishing surface; measuring a height of the polishing surface when the conditioning of the polishing surface is performed; calculating a position of a measuring point of the height on a two-dimensional surface defined on the polishing surface; and repeating the measuring of the height of the polishing surface and the calculating of the position of the measuring point to create height distribution in the polishing surface.

Abstract translation: 本发明提供一种能够在不从研磨台移除抛光垫的情况下监测抛光垫的抛光表面的方法。 该方法包括：通过使旋转的修整器在抛光表面上振荡来调节抛光垫的抛光表面; 当执行抛光表面的调理时，测量抛光表面的高度; 计算在所述抛光表面上限定的二维表面上的所述高度的测量点的位置; 并且重复测量抛光表面的高度和计算测量点的位置以在抛光表面中产生高度分布。

公开(公告)号：US06544106B1

公开(公告)日：2003-04-08

申请号：US09744760

申请日：2001-04-26

Applicant: Donald McHugh ,  Jay Merkle

Inventor： Donald McHugh ,  Jay Merkle

IPC: B24B4900

CPC classification number: B24B53/02 ,  B24B51/00 ,  B24B53/053 ,  B24B53/08

Abstract: A method of dressing a grinding wheel by advancing a dressing tool across the surfaces to be dressed, the method comprising first moving the dressing tool across each side portion to remove material to make the wheel of predetermined width and then across the edge of the wheel to form corner radii, wherein the dressing tool is rotated as it is advanced and the speed of advancement across the side surfaces is different from that across the edge.

Abstract translation: 一种通过使修整工具穿过要修整的表面进行修整工具来修整砂轮的方法，所述方法包括首先将修整工具移动穿过每个侧部，以移除材料以使得轮具有预定宽度，然后穿过轮的边缘到 形成角半径，其中修整工具在其前进时旋转，并且穿过侧表面的前进速度与穿过边缘的速度不同。

公开(公告)号：US5497759A

公开(公告)日：1996-03-12

申请号：US166825

申请日：1993-12-15

Applicant: Maurice Guenin

Inventor： Maurice Guenin

IPC: B24B53/06 ,  B24B53/08 ,  B24B53/065

CPC classification number: B24B53/08

Abstract: The single-motored apparatus includes a motor which rotatingly drives a main shaft and a correction shaft, the main shaft in turn rotatingly driving the diamond toolholder, a clutch for coupling and uncoupling the shafts, and a cam/feeler assembly for transforming the rotary movement of the correction shaft into longitudinal movement of the diamond toolholder. When the correction shaft and the main shaft connected by the clutch rotate simultaneously, the diamond toolholder executes solely an angular movement; when the two shafts are uncoupled and only one of the two shafts rotates, the diamond toolholder executes either solely a longitudinal movement or a longitudinal and angular movement at the same time.

Abstract translation: 单机装置包括旋转地驱动主轴和校正轴的马达，主轴又旋转地驱动金刚石刀架，用于联接和解耦的轴的离合器，以及用于转换旋转运动的凸轮/触发器组件 的校正轴进入金刚石刀架的纵向运动。 当通过离合器连接的校正轴和主轴同时旋转时，金刚石刀架仅执行角运动; 当两个轴不连接并且两个轴中只有一个轴旋转时，金刚石刀架同时执行纵向运动或纵向和角运动。

公开(公告)号：US4897967A

公开(公告)日：1990-02-06

申请号：US006162

申请日：1987-01-23

Applicant: Toshio Maruyama ,  Yukio Oda ,  Syoji Yamaguchi

Inventor： Toshio Maruyama ,  Yukio Oda ,  Syoji Yamaguchi

IPC: B24B53/00 ,  B23Q15/16 ,  B24B53/053 ,  B24B53/08 ,  G05B19/401 ,  G05B19/416

CPC classification number: G05B19/4166 ,  B23Q15/16 ,  B24B49/00 ,  B24B53/08 ,  G05B19/4015

Abstract: An apparatus for truing the cylindrical outer peripheral grinding surface of a grinding wheel includes a truing head which is movable toward or away from the grinding wheel in a first direction which is parallel to the grinding surface and in a second direction which is perpendicular to the first direction. A truing wheel is rotatably supported on the truing head, has a truing surface and is movable with the truing head for truing the grinding surface. A contacting detection member is secured to the truing head, projects therefrom toward the grinding surface and has an end surface which can be brought into contact with the grinding surface. A device is provided for detecting the contact of the end surface of the detection member with the grinding surface and producing an output signal upon detecting their contact. Three feed control devices are provided to move the truing head in various directions. Detecting devices and memories are provided for detecting the position of the truing head and for controlling movement of the head.

Abstract translation: 用于修整砂轮的圆柱形外周磨削表面的设备包括修整头，该修整头可沿着平行于研磨表面的第一方向并且在垂直于第一方向的第二方向上朝向或远离砂轮移动 方向。 修整轮可旋转地支撑在修整头上，具有修整表面，并且可与修整头一起移动以修整研磨表面。 接触检测构件被固定到修整头，从其向研磨表面突出，并且具有能够与研磨表面接触的端面。 提供一种用于检测检测构件的端面与研磨表面的接触并且在检测到它们的接触时产生输出信号的装置。 提供三个进给控制装置以沿着各个方向移动修整头。 提供检测装置和存储器用于检测修整头的位置并用于控制头的移动。

公开(公告)号：US4559919A

公开(公告)日：1985-12-24

申请号：US568211

申请日：1983-12-15

Applicant: Anthony Kushigian

Inventor： Anthony Kushigian

IPC: B24B53/08 ,  B24B53/06

CPC classification number: B24B53/08

Abstract: A profiler for moving a dresser into and across a rotating grinding wheel to form or dress a predetermined configuration in the grinding wheel for use in grinding workpieces. The dresser is moved along two axes at a right angle to each other by lead screws connected to slides and driven by servomotors. The servomotors are actuated and controlled to move the dresser along a desired path by a computer control unit with appropriate software and programming to produce or dress a predetermined configuration in the rotating grinding wheel. To prevent contaminants from destroying the drive mechanism and the ways for the slides, they are completely enclosed while still permitting easy assembly and disassembly of the computer parts of the profiler.

Abstract translation: 用于将修整器移动到旋转砂轮中并穿过旋转砂轮的分析器，以在磨轮中形成或穿着用于研磨工件的预定构造。 修整器通过连接到滑块并由伺服电机驱动的导螺杆以两个轴线彼此成直角的方式移动。 驱动和控制伺服电动机通过计算机控制单元沿着期望的路径移动修整器，该计算机控制单元具有适当的软件和程序，以产生或着装在旋转砂轮中的预定构型。 为了防止污染物破坏驱动机构和滑块的方式，它们被完全封闭，同时仍允许容易地组装和拆卸轮廓仪的计算机部件。

公开(公告)号：US4551950A

公开(公告)日：1985-11-12

申请号：US634430

申请日：1984-07-26

Applicant: Kunihiko Unno ,  Toshio Tsujiuchi ,  Yukio Oda

Inventor： Kunihiko Unno ,  Toshio Tsujiuchi ,  Yukio Oda

IPC: G01B21/00 ,  B24B53/00 ,  B24B53/08 ,  G05B19/18 ,  B24B53/14

CPC classification number: G05B19/182 ,  B24B53/08 ,  G05B2219/45159

Abstract: A truing apparatus includes a truing tool supported on a tool support movable radially and axially of a grinding wheel having a rounded corner and drivable by a feed drive unit coupled to the tool support to move along a predetermined path for truing the rounded corner of the grinding wheel. At least one contact member for contacting outer peripheral and end surfaces of the grinding wheel is mounted on the tool support, and a sensor is also mounted on the tool support for detecting a contact between the contact member and the grinding wheel. A feed control system controls the feed drive unit for moving the truing tool along the predetermined path. The feed control system controls the feed drive unit so that the contact member will move radially and axially of the grinding wheel until the sensor is actuated immediately after one truing process and immediately before a next truing process. A grinding wheel position detector detects radial and axial positions of the grinding wheel when the sensor is actuated immediately after the one truing process and immediately before the next truing process. A correcting unit corrects the predetermined path along which the truing tool is to move in the next truing process based on the positions of the grinding wheel detected by the grinding wheel position detector immediately after the one truing process and immediately before the next truing process.

Abstract translation: 修整装置包括修整工具，该工具支撑件可在具有圆角的砂轮的径向和轴向上移动并且可通过联接到工具支撑件的进给驱动单元驱动的工具支撑件沿着预定的路径移动，以便研磨研磨的圆角 轮。 用于接触砂轮的外周和端表面的至少一个接触构件安装在工具支架上，传感器也安装在工具支架上，用于检测接触构件和砂轮之间的接触。 进给控制系统控制进给驱动单元，用于沿着预定路径移动修整工具。 进给控制系统控制进给驱动单元，使得接触构件将沿砂轮的径向和轴向移动，直到在一个修整过程之后立即致动传感器并且在下一个修整过程之前。 砂轮位置检测器在传感器在一个修整过程之后立即致动并且紧接在下一个修整过程之前，检测砂轮的径向和轴向位置。 校正单元基于在一次修整处理之后和紧接在下一个修整处理之前由砂轮位置检测器检测到的砂轮的位置来校正修整工具在下一个修整过程中要移动的预定路径。

公开(公告)号：US4502458A

公开(公告)日：1985-03-05

申请号：US459217

申请日：1983-01-19

Applicant: Kunihiko Unno ,  Toshio Tsujiuchi ,  Yukio Oda

Inventor： Kunihiko Unno ,  Toshio Tsujiuchi ,  Yukio Oda

IPC: B24B53/08 ,  B24B53/06

CPC classification number: B24B53/08

Abstract: An apparatus for truing a grinding wheel includes a stylus movable in response to movement of a truer in synchronism therewith, and a template disposed in confronting relation to the stylus with a gap left therebetween. The truer is controlled in its motion by servomotors driven in response to a command issued from a numerical control unit. When the truer is caused by the numerical control unit to move out of control for some reasons, the stylus is brought into engagement with the template, thereby protecting the truer and a grinding wheel being trued thereby against damage which would otherwise result from such uncontrolled movement of the truer. When the truer is to be advanced for truing infeed against the grinding wheel, the stylus is disconnected by a clutch device from the truer, and only the truer is moved in the forward direction while maintaining a proper gap between the stylus and the template.

Abstract translation: 用于修整砂轮的设备包括可响应于其同步的整修器的移动而移动的触针，以及与触针相对地设置的模板，其间留有间隙。 伺服电机响应于从数控单元发出的命令而驱动运行时，更精准的控制。 当由于某些原因造成数字控制单元移动失控时，触针与模板接合，从而保护修整器和砂轮，从而防止由于这种不受控制的运动而导致的损坏 的更真实 当矫正器要用于修整砂轮进给时，触针通过离合器装置与真实器断开，并且只有整流器在向前方向上移动，同时保持触针和模板之间的适当间隙。

公开(公告)号：US3963017A

公开(公告)日：1976-06-15

申请号：US538801

申请日：1975-01-06

Applicant: James M. Pfotenhauer

Inventor： James M. Pfotenhauer

IPC: B24B53/08 ,  F41B3/00 ,  F41B7/00

CPC classification number: F41B3/005 ,  B24B53/08

Abstract: A projectile launcher includes a housing formed of releasably secured longitudinal sections. The housing defines a bore extending fore-to-aft and including a spring-carrying compartment and a projectile discharge channel. A spring tube is anchored adjacent the forward end of the bore and extends rearwardly within the bore over a reaction guide pulley. A plunger is slidably disposed within the bore and includes a projectile impact portion slidably disposed within the projectile discharge channel. A cord is fastened at one end to the spring tube and at its other end to the plunger. A cocking aperture is provided in the plunger and is operable to receive a removable cocking bar. Rearward movement of the cocking bar when disposed within the cocking aperture causes the plunger to expand the spring in an energy-storing manner. A trigger mechanism is provided at the rear of the housing to retain the plunger and the spring tube in a cocked position. Activation of the trigger enables the spring tube to propel the plunger forwardly within the bore to advance and discharge a projectile located in the projectile discharge channel ahead of the plunger. The reaction pulley is disposed intermediate the ends of the spring tube and is arranged to contract when the trigger mechanism releases the plunger from a cocked position to propel the plunger forwardly, together with a projectile located ahead of the plunger and is also arranged to bend around the reaction guide pulley during forward travel of the plunger to exert rearward forces on the plunger to gradually brake the speed of the plunger.

Abstract translation: 射弹发射器包括由可释放地固定的纵向部分形成的壳体。 壳体限定了前后延伸的孔，并且包括弹簧承载室和射弹排放通道。 弹簧管邻近孔的前端锚定并且在孔内向后延伸穿过反作用导轮。 柱塞可滑动地设置在孔内，并且包括可滑动地设置在射弹放电通道内的射弹冲击部分。 绳索的一端固定在弹簧管上，另一端固定在柱塞上。 在柱塞中设置一个起泡孔，并可操作以接收一个可拆卸的起吊杆。 当置于推压孔内时，推杆的向后运动导致柱塞以储能方式膨胀弹簧。 在壳体的后部设置有触发机构，以将柱塞和弹簧管保持在翘起位置。 触发器的激活使得弹簧管能够在孔内向前推动柱塞，以将位于柱塞前方的抛射体排出通道中的射弹推进和排出。 反作用轮设置在弹簧管的端部之间，并且当触发器机构从起始位置释放柱塞以将其向前推动时，被布置成收缩，以及位于柱塞前方的抛射体，并且还布置成围绕 反作用导向滑轮在柱塞的向前行进期间在柱塞上施加向后的力以逐渐制动柱塞的速度。