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公开(公告)号：US4563240A
公开(公告)日：1986-01-07
申请号：US636997
申请日：1984-08-02
IPC分类号： H01L21/302 , H01J37/32 , H01L21/3065 , H01L21/3213 , B44C1/22 , C03C15/00 , C03C25/06 , C23F1/02
CPC分类号： H01J37/32192 , H01J37/32082 , H01L21/3065 , H01L21/32136 , H01L21/32137 , H01J2237/3348
摘要： The invention relates to a method and apparatus for a plasma process in which identical samples are processed in a plasma-processing apparatus provided with a radio-frequency plasma generation means and a microwave plasma generation means, by the utilization of a radio-frequency plasma in the radio-frequency plasma generation means and a microwave plasma in the microwave plasma generation means. The plasma-processing rate can thus be increased, and also electrical damage due to ions in the plasma can be reduced, thereby ensuring a high throughput and a high quality during the manufacture of semiconductor integrated circuit elements.
摘要翻译： 本发明涉及一种等离子体工艺的方法和装置，其中相同的样品在具有射频等离子体产生装置和微波等离子体产生装置的等离子体处理装置中通过利用射频等离子体 射频等离子体产生装置和微波等离子体产生装置中的微波等离子体。 因此可以提高等离子体处理速率，并且还可以降低由于等离子体中的离子造成的电损伤，从而在半导体集成电路元件的制造期间确保高产量和高质量。
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公开(公告)号：US4631106A
公开(公告)日：1986-12-23
申请号：US777725
申请日：1985-09-19
申请人： Norio Nakazato , Yutaka Kakehi , Takeshi Harada , Ryoji Fukuyama , Makoto Nawata , Hironobu Ueda , Yutaka Omoto , Katsuaki Nagatomo , Fumio Shibata
发明人： Norio Nakazato , Yutaka Kakehi , Takeshi Harada , Ryoji Fukuyama , Makoto Nawata , Hironobu Ueda , Yutaka Omoto , Katsuaki Nagatomo , Fumio Shibata
CPC分类号： H01J37/32623 , H01J37/3266 , H01J37/3402
摘要： The present invention relates to a plasma processor, and the plasma processor comprises a processing chamber, means to reduce a pressure in the processing chamber so as to evacuate the interior thereof, means to introduce a processing gas into the processing chamber, means to generate an electric field within the processing chamber, and means to establish a magnetic field orthogonal to the electric field, this means being rotatable relative to a surface to-be-processed of a sample which is processed in a plasma arising under the action of the electric field and the magnetic field, whereby a space required for the movement of the means to establish the magnetic field orthogonal to the electric field can be reduced to miniaturize the processor, and the uniform processing of the sample can be attained using rotatable plasma.
摘要翻译： 等离子体处理器技术领域本发明涉及等离子体处理器，等离子体处理器包括处理室，用于减小处理室中的压力以便将其内部排出的装置，用于将处理气体引入处理室的装置， 处理室内的电场，以及建立与电场正交的磁场的装置，该装置可相对于在电场作用下产生的等离子体中处理的样品的待处理表面旋转。 和磁场，由此可以减少用于建立与电场正交的磁场的装置移动所需的空间，以使处理器小型化，并且可以使用可旋转等离子体来获得样品的均匀处理。
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公开(公告)号：US4339330A
公开(公告)日：1982-07-13
申请号：US205960
申请日：1980-08-26
CPC分类号： C10G31/08
摘要： The present invention provides a method for the desalting of fuel oil by mixing the fuel oil and clean water, thereby separating and eliminating sodium salts and potassium salts contained in the fuel oil, and the method comprises separating a heavy portion including salt-containing water from the fuel oil which is a light portion, this heavy portion separated from the fuel oil being separated into water and a residue by an evaporator, the water being reused as a washing water and the residue being burnt to use the generated heat as a heat source for the evaporator, whereby the residue is decreased in volume and solidified to be made easy in the handling.
摘要翻译： PCT No.PCT / JP79 / 00317 Sec。 371日期1980年8月26日 102（e）日期1980年8月26日PCT提交1979年12月14日PCT公布。 第WO80 / 01388 PCT公开 日本1980年7月10日。本发明提供一种通过混合燃料油和清水来对燃料油进行脱盐，从而分离和除去燃料油中所含的钠盐和钾盐的方法，该方法包括分离重质 部分包括来自燃料油的轻质部分的含盐水，与燃料油分离的该重质部分被蒸发器分离成水和残余物，水被重新用作洗涤水，残余物被燃烧使用 作为蒸发器的热源产生的热量，由此残留物的体积减少并且固化，从而容易处理。
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公开(公告)号：US4326666A
公开(公告)日：1982-04-27
申请号：US37996
申请日：1979-05-09
申请人： Kiyoshi Fujiwara , Katsuaki Nagatomo , Shoji Yoshinaga , Zensuke Tamura , Fumio Shibata , Hiroshi Kanekiyo
发明人： Kiyoshi Fujiwara , Katsuaki Nagatomo , Shoji Yoshinaga , Zensuke Tamura , Fumio Shibata , Hiroshi Kanekiyo
CPC分类号： B01D11/048 , B04B5/06
摘要： A centrifugal type counterflow contact apparatus having a rotary body or drum intergrally mounted on a rotary shaft, and a plurality of ring members disposed within the rotary body such that circumferential slits are defined between the adjacent ring members in the axial direction of the rotary drum. The ring members have a cross sectional configuration inclined with respect to the axis of the rotary body. A light liquid is introduced into the periphery of the rotary body while a heavy liquid is introduced in the center portion of the rotary body. The heavy and light liquids flow countercurrently through the slits between the ring members under the centrifugal force produced by the rotation of the rotary body, whereby extractability can be improved and accumulation of solids entrained in the feed can be avoided.
摘要翻译： 一种离心式逆流接触装置，其具有一体地安装在旋转轴上的旋转体或滚筒，以及设置在旋转体内的多个环形构件，使得在相邻的环构件之间沿旋转滚筒的轴向限定周向狭缝。 环构件具有相对于旋转体的轴线倾斜的横截面构造。 将轻质液体引入旋转体的周边，同时将重质液体引入旋转体的中心部分。 重物质和轻质液体通过旋转体旋转产生的离心力下的环形构件之间的狭缝逆流流动，由此提高了萃取性能，并且可以避免夹带在进料中的固体积聚。
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公开(公告)号：US4664767A
公开(公告)日：1987-05-12
申请号：US741526
申请日：1985-06-05
CPC分类号： H01J37/32935 , B01J19/088 , B29C59/14 , B29C2037/90
摘要： Herein disclosed are a plasma treating method and an apparatus therefor. The plasma treating method comprises: the step of monitoring the energies of plasmas corresponding to the faces of a plurality of samples to be treated; the step of adjusting to equalize the energies of said plasmas on the basis of the monitored values; and the step simultaneously treating said samples with the plasmas having said equalized energies. The plasma treating apparatus comprises: a plurality of sample electrodes disposed independently of one another in positions opposed to an opposed electrode in a treating chamber evacuated to be supplied with a treating gas; power supply means for applying and adjusting electric power to said sample electrodes; and monitor means for monitoring the energies of plasmas to be generated between said opposed electrode and said sample electrodes. The electric power to be applied independently of one another from a power supply to the independently formed plural sample electrodes are adjusted such that the energies of the plasmas to be generated between the opposed electrode and the sample electrodes are equalized, whereby the energy of the plasma corresponding to the respective treated faces of the plural samples are equalized so that the uniformity of the treatment of the respective faces of the plural samples to be simultaneously treated can be improved.
摘要翻译： 这里公开了一种等离子体处理方法及其装置。 等离子体处理方法包括：监测与待处理的多个样品的面对应的等离子体的能量的步骤; 基于所监测的值调整所述等离子体的能量的步骤; 以及用具有所述均衡能的等离子体同时处理所述样品的步骤。 等离子体处理装置包括：多个样品电极，彼此独立地设置在处理室中的与相对电极相对的位置，所述处理室被排出以供应处理气体; 用于对所述样品电极施加和调整电力的电源装置; 以及用于监测在所述相对电极和所述样品电极之间产生的等离子体能量的监视装置。 调节从电源向独立形成的多个样品电极彼此独立施加的电力，使得在相对电极和样品电极之间产生的等离子体的能量相等，由此等离子体的能量 对应于多个样品的各个处理面相对应，可以提高要同时处理的多个样品的各个面的处理的均匀性。
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公开(公告)号：US4272011A
公开(公告)日：1981-06-09
申请号：US932657
申请日：1978-08-10
申请人： Katsuaki Nagatomo , Shigenobu Hisatomi , Kiyoshi Fujiwara , Hiromasa Fukumori , Shoji Yoshinaga , Kyozo Yoshioka
发明人： Katsuaki Nagatomo , Shigenobu Hisatomi , Kiyoshi Fujiwara , Hiromasa Fukumori , Shoji Yoshinaga , Kyozo Yoshioka
摘要： A centrifugal counterflow type contactor wherein the interior space of a drum carried by a rotating shaft has a predetermined axial width or the interior space of the drum is divided by at least one baffle plate mounted on the rotating shaft into at least two chambers each having a predetermined width; and a light liquid is introduced into said interior space or each chamber at positions adjacent to the radially outward end thereof while a heavy liquid is introduced into said interior space or each chamber at positions adjacent to the radially inward end thereof so that rapid rotation of the drum causes the radial counterflow contact between the light and heavy liquids. The extraction efficiency is equal to or higher than that of a corresponding prior art centrifugal contactor, and the solids in the liquids may be prevented from being accumulated in the counterflow region.
摘要翻译： 一种离心逆流式接触器，其中由旋转轴承载的滚筒的内部空间具有预定的轴向宽度或滚筒的内部空间被安装在旋转轴上的至少一个挡板分隔成至少两个室，每个隔室具有 预定宽度 并且轻液体在与其径向向外端相邻的位置处被引入所述内部空间或每个室中，同时在与其径向内侧端相邻的位置处将重质液体引入所述内部空间或每个室中，使得快速旋转 鼓导致轻质液体和重液体之间的径向逆流接触。 提取效率等于或高于相应的现有技术的离心接触器，并且可以防止液体中的固体积聚在逆流区域中。
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