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公开(公告)号：US07985294B2
公开(公告)日：2011-07-26
申请号：US11367261
申请日：2006-03-03
申请人： Futoshi Yamamoto , Katsutoshi Kondou , Junichiro Ichikawa , Masaru Nakamura , Sunao Kurimura , Shunji Takekawa , Kenji Kitamura
发明人： Futoshi Yamamoto , Katsutoshi Kondou , Junichiro Ichikawa , Masaru Nakamura , Sunao Kurimura , Shunji Takekawa , Kenji Kitamura
IPC分类号： C30B29/30
CPC分类号： G02B6/1342
摘要： An optical device and a method of manufacturing the optical device, with the method including the steps of forming a dopant layer on a stoichiometric lithium niobate single crystal substrate with Li to Nb mole composition ratio of 49.5% to 50.5%, and diffusing a dopant in the dopant layer into at least a portion of the stoichiometric lithium niobate single crystal substrate. The stoichiometric lithium niobate single crystal substrate includes 0.5 to 5 mol % of Mg. In the diffusing step, a heat treatment is performed at a diffusion temperature of 1000° C. to 1200° C. for a diffusion time of 3 hours to 24 hours in a dry atmosphere of at least one of O2, N2, Ar and He gas having a dew-point temperature of −35° C. or less.
摘要翻译： 一种光学器件和光学器件的制造方法，其特征在于包括以下步骤：在化学计量比的铌酸锂单晶衬底上形成掺杂剂层，其中Li与Nb的摩尔组成比为49.5％至50.5％，并将掺杂剂扩散到 该掺杂剂层至少部分化学计量的铌酸锂单晶衬底。 化学计量的铌酸锂单晶衬底包含0.5-5mol％的Mg。 在扩散步骤中，在O2，N2，Ar和He中的至少一种的干燥气氛中，在1000℃至1200℃的扩散温度下进行3小时至24小时的扩散时间的热处理 露点温度为-35℃以下的气体。
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公开(公告)号：US20070014014A1
公开(公告)日：2007-01-18
申请号：US11367261
申请日：2006-03-03
申请人： Futoshi Yamamoto , Katsutoshi Kondou , Junichiro Ichikawa , Masaru Nakamura , Sunao Kurimura , Shunji Takekawa , Kenji Kitamura
发明人： Futoshi Yamamoto , Katsutoshi Kondou , Junichiro Ichikawa , Masaru Nakamura , Sunao Kurimura , Shunji Takekawa , Kenji Kitamura
CPC分类号： G02B6/1342
摘要： An object of the present invention is to provide an optical device having high quality, excellent productivity and optical characteristics, and capable of suppressing a refractive index of a substrate surface from increasing when a dopant is thermally diffused into, or a heat treatment is performed in order to compensate of process distortion in stoichiometric lithium niobate crystal or a crystal substrate in which Mg is doped into the crystal, and a method of manufacturing the same. According to the present invention, there is provided a method of manufacturing an optical device including the steps of: forming a dopant layer on a substantial stoichiometric lithium niobate single crystal substrate; and diffusing a dopant in the dopant layer into at least a portion of the substantial stoichiometric lithium niobate single crystal substrate, wherein, in the diffusing step, a heat treatment is performed at a diffusion temperature of 1000° C. to 1200° C. in an atmosphere in which a gas having a dew-point temperature of 0° C. or less is introduced, preferably for a diffusion time of 3 hours or more, and more preferably 3 hours to 24 hours.
摘要翻译： 本发明的目的是提供一种具有高质量，优异的生产率和光学特性的光学器件，并且能够抑制当掺杂剂热扩散时衬底表面的折射率增加，或者在 为了补偿化学计量比的铌酸锂晶体或其中Mg掺杂到晶体中的晶体衬底的工艺失真及其制造方法。 根据本发明，提供了一种制造光学器件的方法，包括以下步骤：在基本上化学计量的铌酸锂单晶衬底上形成掺杂剂层; 并且将掺杂剂层中的掺杂剂扩散到至少一部分实质上的化学计量的铌酸锂单晶衬底中，其中在扩散步骤中，在1000℃至1200℃的扩散温度下进行热处理 引入露点温度为0℃以下的气体的气氛，优选扩散时间为3小时以上，更优选为3小时〜24小时。
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公开(公告)号：US08669121B2
公开(公告)日：2014-03-11
申请号：US13066737
申请日：2011-04-22
IPC分类号： H01L21/00
CPC分类号： G02F1/3558 , Y10T29/4902
摘要： A method for forming a ferroelectric spontaneous polarization reversal in a desired region of a ferroelectric substrate includes the steps of forming, for the desired region of the surface of the ferroelectric substrate, an electrode pattern or a mask pattern composed of aggregates of micropatterns, and then applying a given voltage into the desired region. The configuration of the micropatterns can be a stripe-shaped pattern, an ellipse-shaped pattern, a hexagon-shaped pattern, a network pattern, or a double cross shaped pattern. The method can further include the steps of generating many nucleuses by using the electrode pattern or the mask pattern composed of the aggregates of micropatterns, forming another electrode pattern or another mask pattern corresponding to the desired region, and then applying a given voltage into the desired region to generate a ferroelectric spontaneous polarization reversal around the nucleuses.
摘要翻译： 在铁电基板的所需区域中形成铁电自发极化反转的方法包括以下步骤：对于铁电体基板的表面的期望区域，形成由微图案的聚集体构成的电极图案或掩模图案，然后 将给定电压施加到所需区域。 微图案的构造可以是条形图案，椭圆形图案，六边形图案，网状图案或双十字形图案。 该方法还可以包括通过使用由微图案的聚集体形成的电极图案或掩模图案，形成另一电极图案或对应于期望区域的另一掩模图案，然后将给定电压施加到期望的 区域以产生围绕核的铁电自发极化反转。
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公开(公告)号：US08193004B2
公开(公告)日：2012-06-05
申请号：US11083735
申请日：2005-03-18
IPC分类号： H01L21/00
CPC分类号： G02F1/3558 , Y10T29/4902
摘要： A method for forming a ferroelectric spontaneous polarization reversal in a desired region of a ferroelectric substrate, wherein thickness of the ferroelectric substrate in the desired region A of the ferroelectric substrate is thinner than in a region B outside the desired region of the substrate, comprising the step of applying a given voltage into the ferroelectric substrate by a liquid electrode method to thereby form a ferroelectric spontaneous polarization reversal in the desired region of the ferroelectric substrate.
摘要翻译： 一种用于在铁电体基板的期望区域形成铁电自发极化反转的方法，其中，强电介质基板的期望区域A中的铁电体基板的厚度比在基板的所需区域外侧的区域B薄， 通过液体电极法将给定电压施加到铁电体衬底中，从而在铁电衬底的所需区域形成铁电自发极化反转的步骤。
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公开(公告)号：US08524509B2
公开(公告)日：2013-09-03
申请号：US13066730
申请日：2011-04-22
IPC分类号： H01L21/00
CPC分类号： G02F1/3558 , Y10T29/4902
摘要： A method for forming a ferroelectric spontaneous polarization reversal, including the steps of forming a concave portion on a top face of a ferroelectric substrate or a bottom face of a ferroelectric substrate, and applying an electric field into the substrate, wherein a ferroelectric spontaneous polarization reversal is formed at least in one portion of a region of the substrate with the concave portion, and wherein the shape of the concave portion is configured such that the width of the concave portion gets narrower gradually toward the inside of the substrate. The method may further include the steps of, after the reversal, making into almost a flat-plane the top or bottom face having the concave portion, and then, forming a new concave portion in another region and applying an electric field to form another reversal in one portion of the region of the substrate having the new concave portion.
摘要翻译： 一种形成铁电自发极化反转的方法，包括以下步骤：在强电介质基板的顶面或铁电基板的底面上形成凹部，并向基板施加电场，其中，铁电自发极化反转 至少在具有凹部的基板的区域的一部分中形成，并且其中凹部的形状被构造成使得凹部的宽度朝向基板的内部逐渐变窄。 该方法还可以包括以下步骤：在反转之后，使具有凹部的顶面或底面几乎成为平面，然后在另一区域形成新的凹部，并施加电场以形成另一反转 在具有新的凹部的基板的区域的一部分中。
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公开(公告)号：US20050271313A1
公开(公告)日：2005-12-08
申请号：US11089895
申请日：2005-03-25
申请人： Satoshi Oikawa , Masayuki Ichioka , Junichiro Ichikawa , Futoshi Yamamoto , Sunao Kurimura , Kenji Kitamura
发明人： Satoshi Oikawa , Masayuki Ichioka , Junichiro Ichikawa , Futoshi Yamamoto , Sunao Kurimura , Kenji Kitamura
CPC分类号： G02F1/035 , G02F1/0356 , G02F1/055 , G02F1/21 , G02F1/225 , G02F2201/34
摘要： The present invention provides a highly-integrated and compact optical element and further provides an optical element having various functions such as lower driving voltage, chirping suppression and polarization-independency. The optical element comprising a substrate 1 consisting of a material having an electrooptic effect, top optical waveguides 2-1 an 2-2 formed on the top face of said substrate, bottom optical waveguides formed on the bottom face of said substrate, a top modulating electrode for controlling the phase of a light wave being propagated through said top optical waveguide, and a bottom modulating electrode for controlling the phase of a light wave being propagated through said bottom optical waveguide, is characterized in that at least one side edge of said substrate comprises output and input of said optical waveguides formed on said top and bottom faces, and a turnback element is located adjacent to said one side edge to guide the light wave from said output to said input.
摘要翻译： 本发明提供高度集成且紧凑的光学元件，并且还提供具有各种功能的光学元件，例如较低的驱动电压，啁啾抑制和极化独立性。 该光学元件包括由具有电光效应的材料构成的衬底1，形成在所述衬底的顶面上的顶部光波导2-1和2 - 2，形成在所述衬底的底面上的底部光波导，顶部调制 用于控制通过所述顶部光波导传播的光波的相位的电极和用于控制通过所述底部光波导传播的光波的相位的底部调制电极，其特征在于，所述基板的至少一个侧边缘 包括形成在所述顶面和底面上的所述光波导的输出和输入，并且转向元件位于所述一个侧边缘附近，以将光波从所述输出引导到所述输入。
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公开(公告)号：US20080212915A1
公开(公告)日：2008-09-04
申请号：US11983071
申请日：2007-11-07
申请人： Junichiro Ichikawa , Kaoru Higuma , Futoshi Yamamoto , Satoshi Oikawa , Shingo Mori , Sunao Kurimura , Kenji Kitamura , Tetsuya Kawanishi , Masahiro Tsuchiya , Masayuki Izutsu
发明人： Junichiro Ichikawa , Kaoru Higuma , Futoshi Yamamoto , Satoshi Oikawa , Shingo Mori , Sunao Kurimura , Kenji Kitamura , Tetsuya Kawanishi , Masahiro Tsuchiya , Masayuki Izutsu
IPC分类号： G02F1/035
CPC分类号： G02F1/035 , G02F2001/212 , G02F2201/18 , G02F2202/20
摘要： A nested modulator is provided where the circuit arrangement of modifying electrodes including signal electrodes is simplified, and at the same time, the drive voltage can be lowered.A nested modulator, including: a substrate 20 made of a material having electro-optic effects; an optical waveguide formed on the substrate; and a modulating electrode for modulating light waves which are guided through the optical waveguide, wherein the optical waveguide has a main Mach-Zehnder waveguide 1 and sub-Mach-Zehnder waveguides 2 and 3 provided on two branching waveguides of the main Mach-Zehnder waveguide, and the modulating electrode is provided in a sub-branching waveguide of the sub-Mach-Zehnder waveguides, is characterized in that a polarization reversal region 46 or 47 is formed in a portion of a sub-branching waveguide of each of the sub-Mach-Zehnder waveguides, the modulating electrode is formed of signal electrodes including introduced signal electrodes 40 or 43, branching single electrodes 41 or 44 and lead signal electrodes 42 or 45 as well as ground electrodes for each of sub-Mach-Zehnder waveguides, and the branching signal electrodes which branch from the introduced signal electrode are placed so as to work on two sub-branching waveguides for each of the sub-Mach-Zehnder waveguides.
摘要翻译： 提供了一种嵌入式调制器，其中包括信号电极的修改电极的电路布置被简化，并且同时可以降低驱动电压。 嵌套调制器，包括：由具有电光效应的材料制成的衬底20; 形成在基板上的光波导; 以及用于调制通过光波导引导的光波的调制电极，其中光波导具有设置在主马赫 - 曾德尔波导的两个分支波导上的主马赫 - 曾德尔波导1和副马赫 - 曾德尔波导2 并且所述调制电极设置在所述子马赫 - 曾德尔波导的子分支波导中，其特征在于，在每个所述子马赫 - 曾德尔波导的子分支波导的一部分中形成偏振反转区域46或47， 马赫曾德尔波导，调制电极由包括引入信号电极40或43，分支单电极41或44和引导信号电极42或45以及每个子马赫 - 曾德尔波导的接地电极的信号电极形成，以及 从引入的信号电极分支的分支信号电极被放置成对每个子马赫 - 曾德尔波导的两个子分支波导进行工作。
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公开(公告)号：US20110206860A1
公开(公告)日：2011-08-25
申请号：US13066744
申请日：2011-04-22
IPC分类号： B29C71/04
CPC分类号： G02F1/3558 , Y10T29/4902
摘要： A method for forming a ferroelectric spontaneous polarization reversal includes the steps of forming a convexo-concave structure on a top face of a ferroelectric substrate firstly, and then forming a ferroelectric spontaneous polarization region on the substrate including one portion of a convex portion, with a concave portion being formed on the bottom face of the substrate within a region where a ferroelectric spontaneous polarization reversal is to be formed and the convex portion is formed, and then applying an electric field into the substrate. The depth of the concave portion on the bottom face of the substrate may be greater than the height of the convex portion on the top face of the substrate. The width of the concave portion on the bottom face of the substrate may be wider than width of said convex portion on the top face of the substrate.
摘要翻译： 形成铁电自发极化反转的方法包括以下步骤：首先在铁电体的顶面上形成凸凹结构，然后在包括凸部的一部分的基板上形成铁电自发极化区域， 在要形成铁电自发极化反转的区域和形成凸部的区域中，在基板的底面上形成凹部，然后向基板施加电场。 基板的底面上的凹部的深度可以大于基板的顶面上的凸部的高度。 基板的底面上的凹部的宽度可以比基板的顶面上的凸部的宽度宽。
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公开(公告)号：US20110197432A1
公开(公告)日：2011-08-18
申请号：US13066737
申请日：2011-04-22
IPC分类号： H01F7/06
CPC分类号： G02F1/3558 , Y10T29/4902
摘要： A method for forming a ferroelectric spontaneous polarization reversal in a desired region of a ferroelectric substrate includes the steps of forming, for the desired region of the surface of the ferroelectric substrate, an electrode pattern or a mask pattern composed of aggregates of micropatterns, and then applying a given voltage into the desired region. The configuration of the micropatterns can be a stripe-shaped pattern, an ellipse-shaped pattern, a hexagon-shaped pattern, a network pattern, or a double cross shaped pattern. The method can further include the steps of generating many nucleuses by using the electrode pattern or the mask pattern composed of the aggregates of micropatterns, forming another electrode pattern or another mask pattern corresponding to the desired region, and then applying a given voltage into the desired region to generate a ferroelectric spontaneous polarization reversal around the nucleuses.
摘要翻译： 在铁电基板的所需区域中形成铁电自发极化反转的方法包括以下步骤：对于铁电体基板的表面的期望区域，形成由微图案的聚集体构成的电极图案或掩模图案，然后 将给定电压施加到所需区域。 微图案的构造可以是条形图案，椭圆形图案，六边形图案，网状图案或双十字形图案。 该方法还可以包括通过使用由微图案的聚集体形成的电极图案或掩模图案，形成另一电极图案或对应于期望区域的另一掩模图案，然后将给定电压施加到期望的 区域以产生围绕核的铁电自发极化反转。
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公开(公告)号：US08293543B2
公开(公告)日：2012-10-23
申请号：US13066744
申请日：2011-04-22
IPC分类号： H01L21/00
CPC分类号： G02F1/3558 , Y10T29/4902
摘要： A method for forming a ferroelectric spontaneous polarization reversal includes the steps of forming a convexo-concave structure on a top face of a ferroelectric substrate firstly, and then forming a ferroelectric spontaneous polarization region on the substrate including one portion of a convex portion, with a concave portion being formed on the bottom face of the substrate within a region where a ferroelectric spontaneous polarization reversal is to be formed and the convex portion is formed, and then applying an electric field into the substrate. The depth of the concave portion on the bottom face of the substrate may be greater than the height of the convex portion on the top face of the substrate. The width of the concave portion on the bottom face of the substrate may be wider than width of said convex portion on the top face of the substrate.
摘要翻译： 形成铁电自发极化反转的方法包括以下步骤：首先在铁电体的顶面上形成凸凹结构，然后在包括凸部的一部分的基板上形成铁电自发极化区域， 在要形成铁电自发极化反转的区域和形成凸部的区域中，在基板的底面上形成凹部，然后向基板施加电场。 基板的底面上的凹部的深度可以大于基板的顶面上的凸部的高度。 基板的底面上的凹部的宽度可以比基板的顶面上的凸部的宽度宽。
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