公开(公告)号：US10684530B1

公开(公告)日：2020-06-16

申请号：US16288634

申请日：2019-02-28

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Abu Thomas

IPC: G02F1/29

Abstract: Structures for an electro-optic modulator and methods of fabricating a structure for an electro-optic modulator. An electro-optic modulator is arranged over a portion of a waveguide core. The electro-optic modulator includes an electrode, an active layer arranged adjacent to the electrode, and a dielectric layer including a portion that has a lateral arrangement between the electrode and the active layer. The active layer is composed of a material having a refractive index that is a function of a bias voltage applied to the electrode and the active layer.

公开(公告)号：US10649140B1

公开(公告)日：2020-05-12

申请号：US16291671

申请日：2019-03-04

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Abu Thomas

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/13 ,  H01L23/528 ,  H01L23/532 ,  H01L23/522 ,  H01L21/768 ,  H01L21/311 ,  H01L21/3105 ,  H01L21/02

Abstract: Structures including a waveguide core and methods of fabricating a structure including a waveguide core. A back-end-of-line interconnect structure includes a cap layer, an interlayer dielectric layer, and one or more metal features embedded in the interlayer dielectric layer. The interlayer dielectric layer is stacked in a vertical direction with the cap layer. The one or more metal features have an overlapping arrangement in a lateral direction with the waveguide core, which is arranged under the back-end-of-line interconnect structure.

公开(公告)号：US10429581B1

公开(公告)日：2019-10-01

申请号：US16189125

申请日：2018-11-13

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Abu Thomas ,  Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B6/12 ,  G02B6/126 ,  G02B6/13 ,  G02B6/293

Abstract: Structures for a polarization splitter and methods of forming a polarization splitter. A multi-mode interference region includes a first waveguide and a second waveguide arranged in a stack over the first waveguide. First and second input ports are connected with the multi-mode interference region. First and second output ports are connected with the multi-mode interference region.

公开(公告)号：US10818807B2

公开(公告)日：2020-10-27

申请号：US16253191

申请日：2019-01-21

Applicant: GLOBALFOUNDRIES INC.

Inventor： Ajey Poovannummoottil Jacob ,  Theodore J. Letavic ,  Abu Thomas ,  Yusheng Bian

IPC: H01L31/02 ,  H01L31/18 ,  G02B1/11 ,  G02B5/08 ,  H01L31/0232 ,  H01L31/0216 ,  G02B1/113

Abstract: The present disclosure generally relates to semiconductor detectors for use in optoelectronic devices and integrated circuit (IC) chips, and methods for forming same. More particularly, the present disclosure relates to integration of semiconductor detectors with Bragg reflectors. The photodetector of the present disclosure includes a substrate, a Bragg reflector disposed on the substrate, and a semiconductor detector disposed on the Bragg reflector. The Bragg reflector includes alternating layers of a semiconductor material and a dielectric material.

公开(公告)号：US10690845B1

公开(公告)日：2020-06-23

申请号：US16298354

申请日：2019-03-11

Applicant: GLOBALFOUNDRIES INC.

Inventor： Ajey Poovannummoottil Jacob ,  Abu Thomas ,  Yusheng Bian

IPC: G02B6/12 ,  G02B6/124 ,  G02B6/136 ,  H01L27/12 ,  G02B6/30

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to three dimensional (3D) optical interconnect structures and methods of manufacture. The structure includes: a first structure having a grating coupler and a first optical waveguide structure; and a second structure having a second optical waveguide structure in alignment with the first optical waveguide structure and which has a modal effective index that matches to the first optical waveguide structure.

公开(公告)号：US20200088942A1

公开(公告)日：2020-03-19

申请号：US16134295

申请日：2018-09-18

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Abu Thomas

IPC: G02B6/122 ,  G02B6/125

Abstract: Structures with waveguides in multiple levels and methods of fabricating a structure that includes waveguides in multiple levels. A waveguide crossing has a first waveguide and a second waveguide arranged to intersect the first waveguide. A third waveguide is displaced vertically from the waveguide crossing, The third waveguide includes a portion having an overlapping arrangement with a portion of the first waveguide. The overlapping portions of the first and third waveguides are configured to transfer optical signals between the first waveguide and the third waveguide.

公开(公告)号：US10585245B1

公开(公告)日：2020-03-10

申请号：US16199727

申请日：2018-11-26

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Abu Thomas ,  Ajey Poovannummoottil Jacob

IPC: G02B6/293 ,  G02F1/225 ,  H01Q3/26 ,  G02F1/065

Abstract: Structures that include an optical component, such as a grating coupler, and methods of fabricating a structure that includes an optical component, such as a grating coupler. First and second layers are arranged over the optical component with the first layer arranged between the second layer and the optical component. The first and second layers are each composed of a tunable material having a refractive index that is a function of a bias voltage applied to the first layer and the second layer.

公开(公告)号：US10816725B2

公开(公告)日：2020-10-27

申请号：US16134295

申请日：2018-09-18

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Abu Thomas

IPC: G02B6/122 ,  G02B6/125 ,  G02B6/12

Abstract: Structures with waveguides in multiple levels and methods of fabricating a structure that includes waveguides in multiple levels. A waveguide crossing has a first waveguide and a second waveguide arranged to intersect the first waveguide. A third waveguide is displaced vertically from the waveguide crossing, The third waveguide includes a portion having an overlapping arrangement with a portion of the first waveguide. The overlapping portions of the first and third waveguides are configured to transfer optical signals between the first waveguide and the third waveguide.

公开(公告)号：US10670804B1

公开(公告)日：2020-06-02

申请号：US16234906

申请日：2018-12-28

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Abu Thomas ,  Ajey Poovannummoottil Jacob

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/136

Abstract: Waveguiding structures and methods of fabricating a waveguiding structure. The waveguiding structure includes a waveguide and an array of semiconductor fins that are arranged at least in part inside the waveguide.

公开(公告)号：US10649245B1

公开(公告)日：2020-05-12

申请号：US16298446

申请日：2019-03-11

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Abu Thomas

IPC: G02F1/035 ,  G02F1/025 ,  G02F1/015

Abstract: Structures for an electro-optic modulator and methods of fabricating a structure for an electro-optic modulator. The electro-optic modulator is arranged over a portion of a first waveguide core. The electro-optic modulator may include an electrode, an active layer, a second waveguide core, and a dielectric layer that is arranged between the active layer and the second waveguide core. The active layer is composed of a material having a refractive index that is a function of a bias voltage applied between the electrode and the first waveguide core.