METHOD OF MANUFACTURING A 3 COLOR LED INTEGRATED SI CMOS DRIVER WAFER USING DIE TO WAFER BONDING APPROACH

    公开(公告)号:US20190019915A1

    公开(公告)日:2019-01-17

    申请号:US15650427

    申请日:2017-07-14

    Abstract: Methods of forming an integrated RGB LED and Si CMOS driver wafer and the resulting devices are provided. Embodiments include providing a plurality of first color die over a CMOS wafer, each first color die being laterally separated with a first oxide and electrically connected to the CMOS wafer; providing a second color die above each first color die, each second color die being separated from each other with a second oxide, bonded to a first color die, and electrically connected to the CMOS wafer through the bonded first color die; removing a portion of each second color die to expose a portion of each bonded first color die; forming a conformal TCO layer over each first and second color die and on a side surface of each second color die and oxide; forming a PECVD oxide layer over the CMOS wafer; and planarizing the PECVD oxide layer.

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