公开(公告)号：US20150287604A1

公开(公告)日：2015-10-08

申请号：US14246197

申请日：2014-04-07

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Jason E. STEPHENS ,  Lei YUAN ,  Lixia LEI ,  David PRITCHARD ,  Tuhin Guha NEOGI

IPC: H01L21/28

CPC classification number: H01L21/76895 ,  H01L21/823431 ,  H01L21/823475 ,  H01L27/0207

Abstract: A method is provided for fabricating cross-coupled line segments on a wafer for use, for instance, in fabricating cross-coupled gates of two or more transistors. The fabricating includes: patterning a first line segment with a first side projection using a first mask; and patterning a second line segment with a second side projection using a second mask. The second line segment is offset from the first line segment, and the patterned second side projection overlies the patterned first side projection, and facilitates defining a cross-stitch segment connecting the first and second line segments. The method further includes selectively cutting the first and second line segments in defining the cross-coupled line segments from the first and second line segments and the cross-stitch segment.

Abstract translation: 提供了一种用于在晶片上制造交叉耦合线段以用于例如制造两个或多个晶体管的交叉耦合栅极的方法。 该制造包括：使用第一掩模使具有第一侧面突起的第一线段图案化; 以及使用第二掩模用第二侧面突起构图第二线段。 第二线段与第一线段偏移，并且图案化的第二侧突起覆盖图案化的第一侧突起，并且有助于限定连接第一和第二线段的十字绣线段。 该方法还包括在限定来自第一和第二线段和十字绣段的交叉耦合线段时选择性地切割第一和第二线段。

公开(公告)号：US20150052494A1

公开(公告)日：2015-02-19

申请号：US13968850

申请日：2013-08-16

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Marc TARABBIA ,  Norman CHEN ,  Jian LIU ,  Nader Magdy HINDAWY ,  Tuhin Guha NEOGI ,  Mahbub RASHED ,  Anurag MITTAL

IPC: G06F17/50

CPC classification number: G06F17/5077 ,  G06F2217/06 ,  G06F2217/78

Abstract: A method includes electrically connecting a plurality of cells of a standard cell library to a power rail. A contact area is deposited to connect a first active area and a second active area of a cell of a plurality cells. The first area and the second area are located on opposite sides of the rail and electrically connected to different drains. The contact area is electrically connected to the power rail using a via. The contact area is masked to remove a portion of the contact area to electrically separate the first active are from the second active area.

Abstract translation: 一种方法包括将标准单元库的多个单元电连接到电源轨。 沉积接触区以连接多个单元的单元的第一有源区和第二有源区。 第一区域和第二区域位于轨道的相对侧并且电连接到不同的排水沟。 接触区域使用通孔电连接到电源轨。 接触区域被屏蔽以去除接触区域的一部分以将第一活性物质与第二活性区域电分离。