Abstract:
Methods for a low voltage antifuse device and the resulting devices are disclosed. Embodiments may include forming a plurality of fins above a substrate, removing a portion of a fin, forming a fin tip, forming a first area of a gate oxide layer above at least the fin tip, forming a second area of the gate oxide layer above a remaining portion of the plurality of fins, wherein the first area is thinner than the second area, and forming a gate over at least the fin tip to form an antifuse one-time programmable device.
Abstract:
A method includes electrically connecting a plurality of cells of a standard cell library to a power rail. A contact area is deposited to connect a first active area and a second active area of a cell of a plurality cells. The first area and the second area are located on opposite sides of the rail and electrically connected to different drains. The contact area is electrically connected to the power rail using a via. The contact area is masked to remove a portion of the contact area to electrically separate the first active are from the second active area.
Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to devices with slotted active regions and methods of manufacture. The method includes: forming a mandrel on top of a diffusion region comprising a diffusion material; forming a first material over the mandrel and the diffusion region; removing the mandrel to form multiple spacers each having a thickness; depositing a second material over the spacers and the diffusion material; and forming slots in the diffusion region by removing a portion of the second material over the diffusion region and the underlying diffusion material.
Abstract:
An electrical connection is provided between a source/drain of a planar transistor and a local interconnect or first metallization layer power rail, includes a first contact area electrically coupled to the source/drain, a second contact area electrically coupled to the first contact area and a gate of the transistor, and a V0 electrically coupled to the local interconnect or first metallization layer power rail. Trench silicide is absent from the transistor. A contact area-based power rail spine is also provided including a first contact area, a second contact area and adjacent V0 bi-directional staple both over and electrically coupled to the first contact area, and a V0 over and electrically coupled to the second contact area and the V0 bi-directional staple. The power rail spine may be included in a semiconductor structure including planar transistors, in which the first contact area and second contact area are electrically coupled to a source/drain of a transistor, a via-type gate contact is also electrically coupled to the second contact area under the V0. The first metallization layer and/or the contact areas may be made of a non-copper heavy metal with a minimum area less than that of copper.
Abstract:
Methods for forming a variable fin FinFET cell that can withstand a larger voltage without gate oxide breakdown at a fin tip and the resulting devices are disclosed. A plurality of fins is formed above a substrate, a portion of a fin is removed, forming a fin tip, a first area of a gate oxide layer is formed above the fin tip, and a second area of the gate oxide layer is formed above at least a remaining portion of the plurality of fins, wherein the first area is thicker than the second area.
Abstract:
An OTP anti-fuse memory array without additional selectors and a manufacturing method are provided. Embodiments include forming wells of a first polarity in a substrate, forming a bitline of the first polarity in each well, and forming plural metal gates across each bitline, wherein no source/drain regions are formed between the metal gates.