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公开(公告)号:US11804440B2
公开(公告)日:2023-10-31
申请号:US17160447
申请日:2021-01-28
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Saquib B. Halim , Frank G. Kuechenmeister , Kashi V Machani , Christian Goetze
IPC: H01L23/538 , H01L23/00
CPC classification number: H01L23/5384 , H01L23/5383 , H01L23/5386 , H01L24/14
Abstract: Disclosed are chip module structures, each having a robust in-package interconnect for reliable performance. Some of the chip module structures achieve interconnect robustness through the use of vias in a spiral step pattern within the interconnect itself. Some chip module structures achieve interconnect robustness through the use of an interconnect stabilizer (referred to herein as a stabilization structure, fence or cage)), which includes vias in a repeating step pattern encircling the in-package interconnect, which is electrically isolated from back side solder balls, front side collapse chip connections (referred to herein as C4 connections), and the interconnect itself, and which is optionally connected to ground. Some chip module structures achieve interconnect robustness through the use of a combination of both vias in a spiral step pattern within the interconnect itself and an interconnect stabilizer.
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公开(公告)号:US20220308297A1
公开(公告)日:2022-09-29
申请号:US17209416
申请日:2021-03-23
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Nicholas A. Polomoff , John J. Ellis-Monaghan , Frank G. Kuechenmeister , Jae Kyu Cho , Michal Rakowski
Abstract: Embodiments of the disclosure provide a photonic integrated circuit (PIC) structure with a passage for a waveguide through a barrier structure. The PIC structure includes a barrier structure on a substrate, having a first sidewall and a second sidewall opposite the first sidewall. A passage is within the barrier structure, and extends from a first end at the first sidewall of the barrier structure to a second end at the second sidewall of the barrier structure. A shape of the passage includes a reversal segment between the first end and the second end. A waveguide within the passage and extends from the first end to the second end of the barrier structure.
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公开(公告)号:US11855005B2
公开(公告)日:2023-12-26
申请号:US17352414
申请日:2021-06-21
Applicant: GLOBALFOUNDRIES U.S. Inc.
IPC: G06F30/392 , H01L23/66 , H03H1/00 , H01L23/58 , H01L23/00
CPC classification number: H01L23/562 , G06F30/392 , H01L23/564 , H01L23/585 , H01L23/66 , H03H1/0007
Abstract: Disclosed is a radio frequency integrated circuit (RFIC) chip that includes an integrated circuit (IC) area and a crackstop laterally surrounding the IC area. The crackstop includes a metallic barrier (or, alternatively, concentric metallic barriers) electrically isolated from the IC area. One or more noise suppressors and, particularly, one or more passive filters (e.g., low pass filter(s), high pass filter(s), band pass filter(s), and/or band stop filter(s)) are integrated into the structure of the metallic barrier(s) to inhibit propagation, through the crackstop, of noise signals within a specific RF range. The specific RF range can be a customer-specified operating parameter. By embedding customized noise suppressor(s) into the crackstop, local signal interference unique to the customer-specified operating parameters can be minimized while also avoiding or at least minimizing the risk of moisture ingress to the IC area. Also disclosed is a method of forming the chip.
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公开(公告)号:US20220406732A1
公开(公告)日:2022-12-22
申请号:US17352414
申请日:2021-06-21
Applicant: GLOBALFOUNDRIES U.S. Inc.
IPC: H01L23/00 , H01L23/58 , H01L23/66 , H03H1/00 , G06F30/392
Abstract: Disclosed is a radio frequency integrated circuit (RFIC) chip that includes an integrated circuit (IC) area and a crackstop laterally surrounding the IC area. The crackstop includes a metallic barrier (or, alternatively, concentric metallic barriers) electrically isolated from the IC area. One or more noise suppressors and, particularly, one or more passive filters (e.g., low pass filter(s), high pass filter(s), band pass filter(s), and/or band stop filter(s)) are integrated into the structure of the metallic barrier(s) to inhibit propagation, through the crackstop, of noise signals within a specific RF range. The specific RF range can be a customer-specified operating parameter. By embedding customized noise suppressor(s) into the crackstop, local signal interference unique to the customer-specified operating parameters can be minimized while also avoiding or at least minimizing the risk of moisture ingress to the IC area. Also disclosed is a method of forming the chip.
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公开(公告)号:US20240030160A1
公开(公告)日:2024-01-25
申请号:US18479230
申请日:2023-10-02
Applicant: GlobalFoundries U.S. Inc.
IPC: H01L23/00 , G06F30/392 , H01L23/66 , H03H1/00 , H01L23/58
CPC classification number: H01L23/562 , H01L23/564 , G06F30/392 , H01L23/66 , H03H1/0007 , H01L23/585
Abstract: Disclosed is a radio frequency integrated circuit (RFIC) chip that includes an integrated circuit (IC) area and a crackstop laterally surrounding the IC area. The crackstop includes a metallic barrier (or, alternatively, concentric metallic barriers) electrically isolated from the IC area. One or more noise suppressors and, particularly, one or more passive filters (e.g., low pass filter(s), high pass filter(s), band pass filter(s), and/or band stop filter(s)) are integrated into the structure of the metallic barrier(s) to inhibit propagation, through the crackstop, of noise signals within a specific RF range. The specific RF range can be a customer-specified operating parameter. By embedding customized noise suppressor(s) into the crackstop, local signal interference unique to the customer-specified operating parameters can be minimized while also avoiding or at least minimizing the risk of moisture ingress to the IC area. Also disclosed is a method of forming the chip.
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公开(公告)号:US11740418B2
公开(公告)日:2023-08-29
申请号:US17209416
申请日:2021-03-23
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Nicholas A. Polomoff , John J. Ellis-Monaghan , Frank G. Kuechenmeister , Jae Kyu Cho , Michal Rakowski
CPC classification number: G02B6/4248 , G02B6/30 , H01L23/562 , G02B2006/12119
Abstract: Embodiments of the disclosure provide a photonic integrated circuit (PIC) structure with a passage for a waveguide through a barrier structure. The PIC structure includes a barrier structure on a substrate, having a first sidewall and a second sidewall opposite the first sidewall. A passage is within the barrier structure, and extends from a first end at the first sidewall of the barrier structure to a second end at the second sidewall of the barrier structure. A shape of the passage includes a reversal segment between the first end and the second end. A waveguide within the passage and extends from the first end to the second end of the barrier structure.
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公开(公告)号:US20220238448A1
公开(公告)日:2022-07-28
申请号:US17160447
申请日:2021-01-28
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Saquib B. Halim , Frank G. Kuechenmeister , Kashi V. Machani , Christian Goetze
IPC: H01L23/538 , H01L23/00
Abstract: Disclosed are chip module structures, each having a robust in-package interconnect for reliable performance. Some of the chip module structures achieve interconnect robustness through the use of vias in a spiral step pattern within the interconnect itself. Some chip module structures achieve interconnect robustness through the use of an interconnect stabilizer (referred to herein as a stabilization structure, fence or cage)), which includes vias in a repeating step pattern encircling the in-package interconnect, which is electrically isolated from back side solder balls, front side collapse chip connections (referred to herein as C4 connections), and the interconnect itself, and which is optionally connected to ground. Some chip module structures achieve interconnect robustness through the use of a combination of both vias in a spiral step pattern within the interconnect itself and an interconnect stabilizer.
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