摘要:
A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要:
The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in contact with the condensing or adsorbing panels of the pump. The gauge sensor, for example, can be connected to a tube or duct leading to the central core of the pump where the adsorbing charcoal is located. At this location in the pump, the gauge is exposed to low-boiling-point gases, such as hydrogen, neon and helium, while being substantially shielded from other gases such as nitrogen, argon, oxygen, or water vapor. By connecting a gauge to this location of the pump, the gauge can be used to monitor the absorption capacity of the pump.
摘要:
A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a pressurized gas source to the cryopump through the inner duct. A rough valve port can connect the outer duct of the assembly to a rough vacuum pump; and a relief valve port can connect the outer duct of the assembly to an exhaust stack.
摘要:
A cryopump control system with single or multiple cryopumps is controlled by a parallel system operating modules connected by two low voltage wires. A separate cable is also connected to the operating module to provide power to various cryopump components. Communication is via a bus that communicates directly with IC devices in the operating modules that also contain small capacitors to enable the control system to be run by a single computer processor in which all of the logic for controlling one or more cryopumps and communicating with additional optional components resides.
摘要:
Apparatus and method for controlling the speed for a GM type expander includes relays that interrupt power when the current in the line is zero. The speed controller apparatus limits the maximum speed providing the expander with sufficient gas to meet its cooling requirements.
摘要:
A direct current voltage to heat the sensor wire for powering and extracting a signal voltage from a thermocouple-type vacuum sensor. The direct current used produces a DC offset in the sensor output where the heating current flow is stopped for a short interval and the unbiased sensor voltage is then sampled and stored.
摘要:
A new aerator transport system for transporting aerators in the fluid held in a lagoon to maximize the uniformity of oxygen distribution and mixing within the lagoon while minimizing the number of aerators required to attain that uniformity. The inventive device includes at least one aerator, a guide cable defining a linear movement path for at least one aerator, a travel cable system for moving each aerator along a movement path, a cable loop drive for moving the travel cable system, and an aerator bracket assembly for operatively linking the aerators to the guide cables and to the travel cable system.
摘要:
FIG. 1 is a perspective view of a gate upright showing my new design; FIG. 2 is a front view thereof; FIG. 3 is a back view thereof; FIG. 4 is a left-side view thereof; FIG. 5 is a right-side view thereof; FIG. 6 is a top view thereof; and, FIG. 7 is a bottom view thereof. The gate upright is shown with a symbolic break in its length. The appearance of any portion of the article between the break lines forms no part of the claimed design.
摘要:
A direct current voltage to heat the sensor wire for powering and extracting a signal voltage from a thermocouple-type vacuum sensor. The direct current used produces a DC offset in the sensor output where the heating current flow is stopped for a short interval and the unbiased sensor voltage is then sampled and stored.