公开(公告)号：US5358909A

公开(公告)日：1994-10-25

申请号：US840896

申请日：1992-02-26

Applicant: Gen Hashiguchi ,  Satoshi Kanazawa ,  Kazuhiko Kawamura ,  Hikaru Sakamoto

Inventor： Gen Hashiguchi ,  Satoshi Kanazawa ,  Kazuhiko Kawamura ,  Hikaru Sakamoto

IPC: H01J9/02 ,  H01L21/465

CPC classification number: H01J9/025

Abstract: A field-emitter having stable electrical properties, a long service life and a very small electron emission voltage is provided. The cathode of the element has a strongly sharpened projection at the tip end, and a smooth connection between the projection and the body portion. In the method of manufacturing the elements, cathodes are produced with a high reproducibility by using a mold produced by forming concave portions in the silicon and oxidizing the layer thereon, whereby the spacing between the cathode and the gate electrode is determined by the thickness of the silicon oxide layer, and the position of the cathode is determined by the silicon oxide layer embedded in the silicon substrate, by using an etching stop method based on an electrochemical etching process.

Abstract translation: 提供具有稳定的电性能，使用寿命长和电子发射电压非常小的场致发射体。 元件的阴极在尖端处具有强烈锐化的突起，并且突起和主体部分之间的平滑连接。 在制造元件的方法中，通过使用通过在硅中形成凹部并在其上氧化层而产生的模具，以高重现性制造阴极，由此阴极和栅电极之间的间隔由 氧化硅层，并且通过使用基于电化学蚀刻工艺的蚀刻停止方法，通过嵌入在硅衬底中的氧化硅层来确定阴极的位置。

公开(公告)号：US09224415B2

公开(公告)日：2015-12-29

申请号：US13071555

申请日：2011-03-25

Applicant: Yongfang Li ,  Yasushi Tomizawa ,  Akihiro Koga ,  Gen Hashiguchi ,  Masakazu Sugiyama

Inventor： Yongfang Li ,  Yasushi Tomizawa ,  Akihiro Koga ,  Gen Hashiguchi ,  Masakazu Sugiyama

IPC: G01R1/06 ,  G11B9/14 ,  G01R11/04 ,  G01R1/067 ,  G01R19/155

CPC classification number: G11B9/1418 ,  G01R1/06788 ,  G01R11/04 ,  G01R19/155 ,  Y10T29/49155

Abstract: According to one embodiment, a microprobe includes a supporting base, an insulating layer, and an electrode layer arrayed in a first direction in this order. A principal surface of the microprobe is formed in a second direction different from the first direction. A step is formed on at least the electrode layer on the principal surface, and the electrode layer is partitioned into a first area and a second area by the step.

Abstract translation: 根据一个实施例，微探针包括依次排列在第一方向上的支撑基底，绝缘层和电极层。 微探针的主表面形成在与第一方向不同的第二方向上。 至少在主表面上的电极层上形成台阶，电极层通过台阶分割成第一区域和第二区域。

公开(公告)号：US20110194398A1

公开(公告)日：2011-08-11

申请号：US13016464

申请日：2011-01-28

Applicant: Yongfang Li ,  Yasushi Tomizawa ,  Gen Hashiguchi ,  Masakazu Sugiyama

Inventor： Yongfang Li ,  Yasushi Tomizawa ,  Gen Hashiguchi ,  Masakazu Sugiyama

IPC: G11B9/08

CPC classification number: G11B9/1436 ,  G11B9/1409

Abstract: According to one embodiment, a MEMS memory microprobe includes a probe tip, a lever, and a base. The probe tip is arranged to oppose a recording medium and is brought into contact with the recording medium to perform recording or reproduction of information when a current or voltage is applied between them. In the probe tip, a plurality of electrodes used in the recording or reproduction and a plurality of support portions which form the probe tip together with the electrodes are alternately arranged, and the electrodes and the support portions form a single plane which opposes the recording medium.

Abstract translation: 根据一个实施例，MEMS存储器微探针包括探针尖端，杠杆和基部。 探针尖端被布置为与记录介质相对，并且当在其之间施加电流或电压时与记录介质接触以执行信息的记录或再现。 在探针尖端中，用于记录或再现的多个电极和与电极一起形成探针尖端的多个支撑部分交替布置，并且电极和支撑部分形成与记录介质相对的单个平面 。

公开(公告)号：US20110138931A1

公开(公告)日：2011-06-16

申请号：US12996270

申请日：2009-06-05

Applicant: Gen Hashiguchi

Inventor： Gen Hashiguchi

IPC: G01L1/10

CPC classification number: G01L1/10 ,  G01P15/097 ,  H01L29/84

Abstract: An object of this invention is to detect an external force or acceleration with good sensitivity using a simple configuration. An external force detection sensor comprises a comb electrode including a fixed electrode having a plurality of fixed combtooth portions and a movable electrode having a plurality of movable combtooth portions inserted between the fixed combtooth portions; a power supply connected to the fixed electrode and the movable electrode in order to cause vibration of the movable electrode at a prescribed resonance frequency through an electrostatic force on the fixed electrode; and detection means for detecting an external force based on a change in electrical characteristics between the fixed electrode and the movable electrode when the movable electrode is caused to vibrate. With respect to the fixed combtooth portions that are adjacent to each other and the movable combtooth portion inserted therebetween, the spacing between one of the fixed combtooth portions and the movable combtooth portion is different from the spacing between another of the fixed combtooth portions and the movable combtooth portion.

Abstract translation: 本发明的目的是使用简单的结构来检测具有良好灵敏度的外力或加速度。 外力检测传感器包括梳状电极，其包括具有多个固定梳齿部分的固定电极和可移动​​电极，所述可移动电极具有插入在固定梳状部分之间的多个可移动梳状部分; 连接到固定电极和可动电极的电源，以通过固定电极上的静电力使可动电极以规定的共振频率发生振动; 以及检测装置，用于当可动电极振动时，基于固定电极和可动电极之间的电特性变化来检测外力。 对于彼此相邻的固定梳齿部分和插入其间的可移动梳齿部分，固定梳齿部分和可移动梳齿部分之间的间隔与另一个固定梳齿部分之间的间距不同， 组合部分。

公开(公告)号：US20090000362A1

公开(公告)日：2009-01-01

申请号：US11791262

申请日：2005-11-22

Applicant: Gen Hashiguchi ,  Maho Hosogi ,  Takashi Konno

Inventor： Gen Hashiguchi ,  Maho Hosogi ,  Takashi Konno

IPC: G01B5/28 ,  B66C1/42

CPC classification number: B81C99/002 ,  G01Q60/38 ,  G01Q80/00 ,  Y10S977/902 ,  Y10S977/962

Abstract: A nanotweezer (1) according to the present invention includes: a supporting member (25); an observation probe (10) that projects out from the supporting member (25), and is used when observing a surface of a specimen; a movable arm (20) that is arranged next to the observation probe (10) projecting out from the supporting member (25), and makes closed or opened between the observation probe (10) and the movable arm (20) to hold or release the specimen held between the observation probe (10) and the movable arm (20); and a drive mechanism that drives the movable arm (20) so as to make closed or opened between the observation probe (10) and the movable arm (20), and the supporting member (25), the observation probe (10) and the movable arm (20) are each formed by processing a semiconductor wafer (30) through a photolithography process.

Abstract translation: 根据本发明的纳米锥体（1）包括：支撑构件（25）; 观察探针（10），其从所述支撑构件（25）伸出，并且在观察所述试样的表面时使用; 设置在从所述支撑部件（25）突出的所述观察用探针（10）的旁边的可动臂（20），并且在所述观察探针（10）与所述可动臂（20）之间封闭或打开以保持或释放 所述试样保持在所述观察探针（10）和所述可动臂（20）之间; 以及驱动机构，其驱动所述可动臂（20）以在所述观察探针（10）和所述可动臂（20）之间关闭或打开，所述支撑部件（25），所述观察探针（10）和 可移动臂（20）各自通过通过光刻工艺处理半导体晶片（30）而形成。

公开(公告)号：US20050175670A1

公开(公告)日：2005-08-11

申请号：US10508926

申请日：2004-09-24

Applicant: Seiji Aoyagi ,  Yoshitada Isono ,  Gen Hashiguchi

Inventor： Seiji Aoyagi ,  Yoshitada Isono ,  Gen Hashiguchi

IPC: A61K9/52 ,  A61K9/00 ,  A61K9/20 ,  A61L31/00 ,  A61M31/00 ,  A61M37/00 ,  A61F2/00

CPC classification number: A61F2/00 ,  A61K9/0024 ,  A61K9/0097 ,  A61K9/204 ,  A61M31/002

Abstract: The present invention has a purpose to provide a non-invasive drug delivery system made of biodegradable material slowly releasing a medicament for a prolonged period in a stable manner while embedded within a portion of a body where a flow of blood and/or lymph is rapid, and a manufacturing process thereof. The drug delivery system according to the present invention includes a tank member of biodegradable material having a chamber capable of holding a medicament. Also, it has at least one anchor member of biodegradable material extending from the tank member. The anchor member is tapered toward a tip thereof, and has at least one protruding portion extending therefrom.

Abstract translation: 本发明的目的是提供一种由可生物降解的材料制成的非侵入性药物递送系统，其在嵌入在体内的一部分血液和/或淋巴迅速的部分内以稳定的方式缓慢释放药物 ，及其制造方法。 根据本发明的药物递送系统包括具有能够容纳药物的室的可生物降解材料的罐构件。 此外，其具有至少一个从罐构件延伸的可生物降解材料的锚定构件。 锚定构件朝向其尖端逐渐变细，并且具有从其延伸的至少一个突出部分。

公开(公告)号：US08770043B2

公开(公告)日：2014-07-08

申请号：US12996270

申请日：2009-06-05

Applicant: Gen Hashiguchi

Inventor： Gen Hashiguchi

IPC: G01L1/10 ,  G01P15/00

CPC classification number: G01L1/10 ,  G01P15/097 ,  H01L29/84

Abstract: An object of this invention is to detect an external force or acceleration with good sensitivity using a simple configuration. An external force detection sensor comprises a comb electrode including a fixed electrode having a plurality of fixed combtooth portions and a movable electrode having a plurality of movable combtooth portions inserted between the fixed combtooth portions; a power supply connected to the fixed electrode and the movable electrode in order to cause vibration of the movable electrode at a prescribed resonance frequency through an electrostatic force on the fixed electrode; and detection means for detecting an external force based on a change in electrical characteristics between the fixed electrode and the movable electrode when the movable electrode is caused to vibrate. With respect to the fixed combtooth portions that are adjacent to each other and the movable combtooth portion inserted therebetween, the spacing between one of the fixed combtooth portions and the movable combtooth portion is different from the spacing between another of the fixed combtooth portions and the movable combtooth portion.

Abstract translation: 本发明的目的是使用简单的结构来检测具有良好灵敏度的外力或加速度。 外力检测传感器包括梳状电极，其包括具有多个固定梳齿部分的固定电极和可移动​​电极，所述可移动电极具有插入在固定梳状部分之间的多个可移动梳状部分; 连接到固定电极和可动电极的电源，以通过固定电极上的静电力使可动电极以规定的共振频率发生振动; 以及检测装置，用于当可动电极振动时，基于固定电极和可动电极之间的电特性变化来检测外力。 对于彼此相邻的固定梳齿部分和插入其间的可移动梳齿部分，固定梳齿部分和可移动梳齿部分之间的间隔与另一固定梳齿部分之间的间距不同， 组合部分。

公开(公告)号：US20120062213A1

公开(公告)日：2012-03-15

申请号：US13071555

申请日：2011-03-25

Applicant: Yongfang Li ,  Yasushi Tomizawa ,  Akihiro Koga ,  Gen Hashiguchi ,  Masakazu Sugiyama

Inventor： Yongfang Li ,  Yasushi Tomizawa ,  Akihiro Koga ,  Gen Hashiguchi ,  Masakazu Sugiyama

IPC: G01R1/06 ,  H05K3/10

CPC classification number: G11B9/1418 ,  G01R1/06788 ,  G01R11/04 ,  G01R19/155 ,  Y10T29/49155

Abstract: According to one embodiment, a microprobe includes a supporting base, an insulating layer, and an electrode layer arrayed in a first direction in this order. A principal surface of the microprobe is formed in a second direction different from the first direction. A step is formed on at least the electrode layer on the principal surface, and the electrode layer is partitioned into a first area and a second area by the step.

Abstract translation: 根据一个实施例，微探针包括依次排列在第一方向上的支撑基底，绝缘层和电极层。 微探针的主表面形成在与第一方向不同的第二方向上。 至少在主表面上的电极层上形成台阶，电极层通过台阶分割成第一区域和第二区域。

公开(公告)号：US07849515B2

公开(公告)日：2010-12-07

申请号：US11791262

申请日：2005-11-22

Applicant: Gen Hashiguchi ,  Maho Hosogi ,  Takashi Konno

Inventor： Gen Hashiguchi ,  Maho Hosogi ,  Takashi Konno

IPC: G01Q30/20

CPC classification number: B81C99/002 ,  G01Q60/38 ,  G01Q80/00 ,  Y10S977/902 ,  Y10S977/962

Abstract: A nanotweezer (1) according to the present invention includes: a supporting member (25); an observation probe (10) that projects out from the supporting member (25), and is used when observing a surface of a specimen; a movable arm (20) that is arranged next to the observation probe (10) projecting out from the supporting member (25), and makes closed or opened between the observation probe (10) and the movable arm (20) to hold or release the specimen held between the observation probe (10) and the movable arm (20); and a drive mechanism that drives the movable arm (20) so as to make closed or opened between the observation probe (10) and the movable arm (20), and the supporting member (25), the observation probe (10) and the movable arm (20) are each formed by processing a semiconductor wafer (30) through a photolithography process.

Abstract translation: 根据本发明的纳米锥体（1）包括：支撑构件（25）; 观察探针（10），其从所述支撑构件（25）伸出，并且在观察所述试样的表面时使用; 设置在从所述支撑部件（25）突出的所述观察用探针（10）的旁边的可动臂（20），并且在所述观察探针（10）与所述可动臂（20）之间封闭或打开以保持或释放 所述试样保持在所述观察探针（10）和所述可动臂（20）之间; 以及驱动机构，其驱动所述可动臂（20）以在所述观察探针（10）和所述可动臂（20）之间关闭或打开，所述支撑部件（25），所述观察探针（10）和 可移动臂（20）各自通过通过光刻工艺处理半导体晶片（30）而形成。

公开(公告)号：US20100129610A1

公开(公告)日：2010-05-27

申请号：US12530063

申请日：2007-05-14

Applicant: Fumikazu Oohira ,  Gen Hashiguchi ,  Shinya Nagao

Inventor： Fumikazu Oohira ,  Gen Hashiguchi ,  Shinya Nagao

IPC: B32B3/30 ,  C23F1/00

CPC classification number: H01L21/30608 ,  C30B29/06 ,  C30B33/08 ,  Y10T428/2457

Abstract: Silicon in prismatic shape is produced by using a silicon wafer with (110) surface and sequentially carrying out an alignment configuration forming step for forming alignment configurations having surfaces that are along two (111) surfaces perpendicular to a substrate surface inside the silicon wafer, a primary anisotropic etching step for forming perpendicular walls having wall surfaces aligned to one of these (111) surfaces, and a secondary anisotropic etching step for forming silicon in the prismatic shape having wall surfaces aligned to the other of these (111) surfaces with respect to the perpendicular walls.

Abstract translation: 通过使用具有（110）表面的硅晶片并且顺序地进行用于形成具有与硅晶片内的衬底表面垂直的两个（111）表面的表面的对准配置的对准配置来制造棱柱形状的硅， 用于形成具有与这些（111）表面之一对准的壁表面的垂直壁的主要各向异性蚀刻步骤，以及用于形成具有与这些（111）表面中的另一个对准的壁表面的棱形形状的硅的次级各向异性蚀刻步骤相对于 垂直的墙壁。