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公开(公告)号：US07582360B2
公开(公告)日：2009-09-01
申请号：US11633987
申请日：2006-12-05
CPC分类号： C09D167/00 , G03F7/091 , Y10T428/31786
摘要： In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.
摘要翻译： 在第一方面，提供了含有聚酯树脂组分的有机涂料组合物，特别是旋涂抗反射涂料组合物。 在另一方面，提供含有通过聚合多羟基化合物获得的树脂组分的涂料组合物。 本发明的涂料组合物特别可用于与外涂光致抗蚀剂层组合以制造集成电路。
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公开(公告)号：US07163751B2
公开(公告)日：2007-01-16
申请号：US10844125
申请日：2004-05-12
CPC分类号： C09D167/00 , G03F7/091 , Y10T428/31786
摘要： In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.
摘要翻译： 在第一方面，提供了含有聚酯树脂组分的有机涂料组合物，特别是旋涂抗反射涂料组合物。 在另一方面，提供含有通过聚合多羟基化合物获得的树脂组分的涂料组合物。 本发明的涂料组合物特别可用于与外涂光致抗蚀剂层组合以制造集成电路。
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公开(公告)号：US08927681B2
公开(公告)日：2015-01-06
申请号：US12551481
申请日：2009-08-31
IPC分类号： C08G63/68 , C08G63/685 , C08L67/00 , C08K13/00 , G03C1/825 , G03C1/835 , C09D5/00 , C09D5/32 , C09D167/00 , B32B27/36 , G03F7/09
CPC分类号： C09D167/00 , G03F7/091 , Y10T428/31786
摘要： In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.
摘要翻译： 在第一方面，提供了含有聚酯树脂组分的有机涂料组合物，特别是旋涂抗反射涂料组合物。 在另一方面，提供含有通过聚合多羟基化合物获得的树脂组分的涂料组合物。 本发明的涂料组合物特别可用于与外涂光致抗蚀剂层组合以制造集成电路。
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公开(公告)号：US20120034562A1
公开(公告)日：2012-02-09
申请号：US12551481
申请日：2009-08-31
IPC分类号： G03F7/20 , G03F7/004 , C09D167/00
CPC分类号： C09D167/00 , G03F7/091 , Y10T428/31786
摘要： In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.
摘要翻译： 在第一方面，提供了含有聚酯树脂组分的有机涂料组合物，特别是旋涂抗反射涂料组合物。 在另一方面，提供含有通过聚合多羟基化合物获得的树脂组分的涂料组合物。 本发明的涂料组合物特别可用于与外涂光致抗蚀剂层组合以制造集成电路。
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公开(公告)号：US06852421B2
公开(公告)日：2005-02-08
申请号：US10256225
申请日：2002-09-26
IPC分类号： G03F7/11 , B32B27/06 , B32B27/08 , B32B27/36 , C08G63/40 , G03C1/76 , G03C1/825 , G03C1/835 , G03F7/004 , G03F7/039 , G03F7/09 , H01L21/027
CPC分类号： C09D167/00 , G03F7/091 , Y10T428/31786
摘要： In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.
摘要翻译： 在第一方面，提供了含有聚酯树脂组分的有机涂料组合物，特别是旋涂抗反射涂料组合物。 在另一方面，提供含有通过聚合多羟基化合物获得的树脂组分的涂料组合物。 本发明的涂料组合物特别可用于与外涂光致抗蚀剂层组合以制造集成电路。
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公开(公告)号：US20070092746A1
公开(公告)日：2007-04-26
申请号：US11633987
申请日：2006-12-05
申请人： Gerald Wayton , Peter Trefonas , Suzzanne Coley , Tomoki Kurihara
发明人： Gerald Wayton , Peter Trefonas , Suzzanne Coley , Tomoki Kurihara
CPC分类号： C09D167/00 , G03F7/091 , Y10T428/31786
摘要： In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.
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