摘要:
A drum type washing machine reducing damage of a shaft system, and a method for assembling the shaft system are disclosed. The shaft system comprises a flange shaft coupled to a rear side of the drum to transmit the rotational force of the motor to the drum. A buffering material is provided between the drum and the flange shaft to distribute or absorb load or vibration transmitted from the drum to the flange shaft. The buffering material comprises a material having a liquid phase initially and changing to a solid phase having elasticity a predetermined period of time after contacting air. The buffering material is applied to a rear side of the drum or to a rear side of the shaft flange when assembling the shaft system.
摘要:
Disclosed herein is a composition that includes a silicon compound, a novolak resin, a catalyst, and an organic solvent, which can be used as a part of hard mask film over an underlying layer during the manufacture of a semiconductor device. The hard mask film is useful in the formation of a uniform pattern on the device.
摘要:
A photoresist coating composition that includes a compound represented by Formula 1 and an aqueous solvent, and a method for forming a fine pattern by coating the composition on a photoresist pattern to effectively reduce a size of a photoresist contact hole and a space, which can be applied to all semiconductor processes.
摘要:
A photoresist coating composition that includes a compound represented by Formula 1 and an aqueous solvent, and a method for forming a fine pattern by coating the composition on a photoresist pattern to effectively reduce a size of a photoresist contact hole and a space, which can be applied to all of the semiconductor processes.
摘要:
A photoresist cleaning solution and method for forming photoresist patterns using the same. More specifically, disclosed are a photoresist cleaning solution comprising H2O and an ionic surfactant represented by Formula 1, and a method for forming a photoresist pattern using the same. By spraying the cleaning solution of the present invention over photoresist film before and/or after exposing step, pattern formation in an undesired region caused by ghost images can be removed.
摘要翻译:光致抗蚀剂清洁溶液和使用其形成光致抗蚀剂图案的方法。 更具体地,公开了包含H 2 O 3的光致抗蚀剂清洁溶液和由式1表示的离子性表面活性剂,以及使用其形成光刻胶图案的方法。 通过在曝光步骤之前和/或之后将本发明的清洁溶液喷涂在光致抗蚀剂膜上,可以除去由重影图像引起的不需要的区域中的图案形成。
摘要:
Disclosed are an organic anti-reflective coating composition which is introduced to top portion of a photoresist and a pattern forming method using the same, in a process for forming ultra-fine patterns of photoresist for photolithography by using 193 nm ArF or 157 nm VUV light source, and more particularly to, an organic anti-reflective coating composition which can protect photoresist from atmospheric amine to minimize a post exposure delay effect, and minimize pattern distortion caused by diffused reflection, i.e., a swing phenomenon, with the improvement of a notching phenomenon and the reduction of reflection rate, and a patterning forming method using the same.
摘要:
The present invention relates to a method of preparation of a drink composition containing powder of ginseng or red ginseng, and more particularly, it relates to a health drink containing powder of ginseng or red ginseng ultrafinely pulverized by a suitable pulverizer and its preparation. Therefore, it is possible to utilize all ingredients of ginseng or red ginseng contained in the drink, but a conventional ginseng drink contains extract of ginseng or red ginseng.
摘要:
Photoresist cleaning solutions are used to clean semiconductor substrates before or after an exposing step when photoresist patterns are formed. The cleaning solutions include H2O and a nonionic surfactant compound represented by Formula 1. By spraying the disclosed cleaning solutions on a surface of the semiconductor substrate before or after exposing step to form a photoresist pattern, the desired pattern only is obtained and unnecessary patterns generated in undesired regions by ghost images are avoided as excess acid generated by the photoacid generator is neutralized and removed and damage to unexposed portions of the photoresist polymer is avoided. wherein R1 and R2 are independently H, C1-C20 alkyl, C5-C25 alkyl aryl or C1-C10 ester; m is 1 or 2; n is an integer ranging from 10 to 300; and o is 0 or 1.
摘要:
A composition for coating a photoresist pattern which comprises water and a compound of Formula 1 is coated on a previously formed photoresist pattern, thereby reducing a size of a space or contact hole of photoresist pattern effectively. The method using the composition is applied to all semiconductor processes for forming a fine photoresist pattern. wherein R1 and R2 are individually selected from the group consisting of H, linear or branched C1-C20 alkyl, linear or branched C2-C20 alkyl containing an ester linkage, linear or branched C2-C20 alkyl containing a ketone linkage, linear or branched C2-C20 alkyl containing a carboxylic acid group, linear or branched C7-C20 alkyl phenyl and linear or branched C3-C20 alkyl containing a acetal linkage; m is an integer ranging from 0 to 3000; and n is an integer ranging from 10 to 3000.
摘要:
Disclosed is a method for detecting a column fail by controlling a sense amplifier of a memory device. The method includes the steps of enabling a word line of a memory cell of the memory device, adjusting a timing of a high-level driving voltage and a low-level driving voltage applied to the sense amplifier, and detecting an amplification result of the sense amplifier.