Composition for hard mask and method for manufacturing semiconductor device
    1.
    发明申请
    Composition for hard mask and method for manufacturing semiconductor device 审中-公开
    用于硬掩模的组合物和用于制造半导体器件的方法

    公开(公告)号:US20070154837A1

    公开(公告)日:2007-07-05

    申请号:US11416271

    申请日:2006-05-02

    申请人: Ki Lee Geun Lee

    发明人: Ki Lee Geun Lee

    IPC分类号: G03C1/00

    摘要: Disclosed herein is a composition that includes a silicon compound, a novolak resin, a catalyst, and an organic solvent, which can be used as a part of hard mask film over an underlying layer during the manufacture of a semiconductor device. The hard mask film is useful in the formation of a uniform pattern on the device.

    摘要翻译: 本文公开了包含硅化合物,酚醛清漆树脂,催化剂和有机溶剂的组合物,其可以在制造半导体器件期间用作下面的硬掩模膜的一部分。 硬掩模膜在器件上形成均匀图案是有用的。

    Capacitor of semiconductor device and method of manufacturing the same
    2.
    发明申请
    Capacitor of semiconductor device and method of manufacturing the same 失效
    半导体器件的电容器及其制造方法

    公开(公告)号:US20080038895A1

    公开(公告)日:2008-02-14

    申请号:US11907031

    申请日:2007-10-09

    申请人: Ki Lee

    发明人: Ki Lee

    IPC分类号: H01L21/02

    CPC分类号: H01G4/33 H01L28/82

    摘要: A MIM capacitor includes a lower electrode disposed on a semiconductor substrate. A dielectric layer is disposed on the lower electrode to completely cover an exposed surface of-the lower electrode. An upper electrode is disposed on the dielectric layer. A method for forming a MIM capacitor includes forming a lower electrode on a semiconductor substrate. A dielectric layer and an upper metal layer are formed on an entire surface of the substrate to cover the lower electrode. The dielectric and upper metal layers are patterned on the lower electrode.

    摘要翻译: MIM电容器包括设置在半导体衬底上的下电极。 电介质层设置在下电极上以完全覆盖下电极的暴露表面。 上电极设置在电介质层上。 一种用于形成MIM电容器的方法包括在半导体衬底上形成下电极。 在基板的整个表面上形成介电层和上金属层以覆盖下电极。 电介质层和上金属层在下电极上图案化。

    Capacitor of semiconductor device and method of manufacturing the same
    3.
    发明申请
    Capacitor of semiconductor device and method of manufacturing the same 有权
    半导体器件的电容器及其制造方法

    公开(公告)号:US20060001063A1

    公开(公告)日:2006-01-05

    申请号:US11024653

    申请日:2004-12-30

    申请人: Ki Lee

    发明人: Ki Lee

    CPC分类号: H01G4/33 H01L28/82

    摘要: A MIM capacitor includes a lower electrode disposed on a semiconductor substrate. A dielectric layer is disposed on the lower electrode to completely cover an exposed surface of the lower electrode. An upper electrode is disposed on the dielectric layer. A method for forming a MIM capacitor includes forming a lower electrode on a semiconductor substrate. A dielectric layer and an upper metal layer are formed on an entire surface of the substrate to cover the lower electrode. The dielectric and upper metal layers are patterned on the lower electrode.

    摘要翻译: MIM电容器包括设置在半导体衬底上的下电极。 电介质层设置在下电极上以完全覆盖下电极的暴露表面。 上电极设置在电介质层上。 一种用于形成MIM电容器的方法包括在半导体衬底上形成下电极。 在基板的整个表面上形成介电层和上金属层以覆盖下电极。 电介质层和上金属层在下电极上图案化。

    Lithography apparatus and pattern forming method using the same
    4.
    发明申请
    Lithography apparatus and pattern forming method using the same 有权
    平版印刷设备和使用其的图案形成方法

    公开(公告)号:US20050264788A1

    公开(公告)日:2005-12-01

    申请号:US11139618

    申请日:2005-05-31

    CPC分类号: G03F7/70291 G03F7/7065

    摘要: A lithography apparatus is provided. The apparatus includes: a stage, a first light source unit, an optical system, an image obtaining means, an image edit means, an LC panel, and a second light source unit. The LC panel is coupled with the optical system and receives a signal of the image edited by the image edit means and displays the received image to perform a photo mask function. The second light source unit provides light used in performing an exposure on the test material using the imaged displayed on the LC panel for a photo mask.

    摘要翻译: 提供了一种光刻设备。 该装置包括:舞台,第一光源单元,光学系统,图像获取装置,图像编辑装置,LC面板和第二光源单元。 LC面板与光学系统耦合并接收由图像编辑装置编辑的图像的信号,并显示接收的图像以执行光掩模功能。 第二光源单元使用在用于光掩模的LC面板上显示的成像来提供用于对测试材料进行曝光的光。

    Method for variably controlling data read speed in optical disc drive
    6.
    发明申请
    Method for variably controlling data read speed in optical disc drive 失效
    用于可变地控制光盘驱动器中的数据读取速度的方法

    公开(公告)号:US20050105885A1

    公开(公告)日:2005-05-19

    申请号:US10963733

    申请日:2004-10-14

    申请人: Ki Lee

    发明人: Ki Lee

    摘要: A method is provided for variably controlling a data read speed in an optical disc drive. The method includes determining whether or not a read command has been issued; if the determining step determines that the read command has been issued, examining additional information associated with the read command; and variably controlling a data read speed for an optical disc according to the additional information.

    摘要翻译: 提供了一种用于可变地控制光盘驱动器中的数据读取速度的方法。 该方法包括确定读命令是否已被发出; 如果确定步骤确定已经发出读取命令,则检查与读取命令相关联的附加信息; 并且根据附加信息可变地控制光盘的数据读取速度。

    Drum washing machine and method of controlling the same
    7.
    发明申请
    Drum washing machine and method of controlling the same 有权
    滚筒洗衣机及其控制方法

    公开(公告)号:US20050028297A1

    公开(公告)日:2005-02-10

    申请号:US10811852

    申请日:2004-03-30

    IPC分类号: D06F39/02 D06F39/08

    CPC分类号: D06F39/086 Y10T137/4891

    摘要: A drum washing machine including a water tub, a rotary tub rotatably provided in the water tub, a detergent feed pipe having a first end connected to the water tub and a second end disposed at an inlet of the rotary tub, and a detergent feed unit to feed a detergent contained in the water tub into the rotary tub through the detergent feed pipe, wherein the detergent feed unit dissolves the detergent before feeding the detergent into the rotary tub in response to the detergent being a powdered detergent.

    摘要翻译: 一种滚筒洗衣机,包括水桶,可旋转地设置在水桶中的旋转桶,具有连接到水桶的第一端和设置在旋转桶入口的第二端的洗涤剂进料管,以及洗涤剂进料单元 通过洗涤剂进料管将包含在水桶中的洗涤剂进料到旋转桶中,其中洗涤剂进料单元在洗涤剂作为粉末状洗涤剂之前将洗涤剂送入旋转桶之前溶解洗涤剂。

    Speech restoration system and method for concealing packet losses
    8.
    发明申请
    Speech restoration system and method for concealing packet losses 失效
    用于隐藏分组丢失的语音恢复系统和方法

    公开(公告)号:US20050010401A1

    公开(公告)日:2005-01-13

    申请号:US10615268

    申请日:2003-07-07

    IPC分类号: G10L11/06 G10L19/00 G10L19/04

    摘要: Provided are a speech restoration system and method for concealing packet losses. The system includes a demultiplexer that demultiplexes an input bit stream and divides the input bit stream into several packets; a packet loss concealing unit that produces and outputs a linear spectrum pair (LSP) coefficient representing the vocal tract of voice and an excitation signal corresponding to a lost frame, when a packet loss occurs; and a speech restoring unit that synthesizes voice using the packets input from the demultiplexer, outputs the result as restored voice, and synthesizes voice corresponding to a lost packet using the LSP coefficient and the excitation signal input from the packet loss concealing unit and outputs the result as restored voice when the lost packet is detected, wherein the packet loss concealing unit repeats linear prediction coefficients (LPCs) of a last-received valid frame, produces a first excitation signal for the lost frame using a time scale modification (TSM) method, when the lost frame is voiceless, and produces a second excitation signal by re-estimating a gain parameter based on the first excitation signal, when the lost frame is voiced.

    摘要翻译: 提供了一种用于隐藏分组丢失的语音恢复系统和方法。 该系统包括解复用器,其对输入比特流进行解复用并将输入比特流分成若干分组; 分组丢失隐藏单元,当发生分组丢失时,产生并输出表示语音的声道的线性频谱对(LSP)系数和对应于丢失帧的激励信号; 以及语音恢复单元,其使用从解复用器输入的分组合成语音,将结果输出为恢复的语音,并且使用从分组丢失隐藏单元输入的LSP系数和激励信号来合成与丢失分组对应的语音,并输出结果 作为在检测到丢失分组时的恢复语音,其中分组丢失隐藏单元重复最后接收的有效帧的线性预测系数(LPC),使用时间缩放修改(TSM)方法产生丢失帧的第一激励信号, 当丢失的帧是无声的,并且当丢失的帧被发音时,通过基于第一激励信号重新估计增益参数来产生第二激励信号。

    Apparatus for measuring fruit properties including a function for automatically controlling the intensity of light from a light source
    9.
    发明申请
    Apparatus for measuring fruit properties including a function for automatically controlling the intensity of light from a light source 失效
    用于测量水果特性的装置,包括用于自动控制来自光源的光的强度的功能

    公开(公告)号:US20050004771A1

    公开(公告)日:2005-01-06

    申请号:US10484692

    申请日:2001-10-26

    IPC分类号: G01N33/02 G01N21/35 G01N31/00

    摘要: An apparatus for measuring fruit properties, in order to classify fruit according to internal qualities, measures the sweetness of a fruit sample using near-infrared spectroscopy. The apparatus includes a pair of waveguides (12), a pair of optic emitter/sensor assemblies (14), a light-interrupting unit (20), and a light detector (40). The light detector calculates the intensity of light, transmitted from a light source and received by the optical emitter/sensor assemblies, thus allowing spectral analysis and interpretation for the determination of sweetness and acidity of a variety of fruits. The light detector controls the light-interrupting unit to interrupt the optical path when the light intensity is reduced. The apparatus is suitable for use in an automated line, for effective and reliable measurement of internal fruit properties, to improve operational efficiency and precision in fruit selection.

    摘要翻译: 用于测量水果性质的装置,以便根据内部品质对水果进行分类,使用近红外光谱测量水果样品的甜度。 该装置包括一对波导(12),一对光发射器/传感器组件(14),光中断单元(20)和光检测器(40)。 光检测器计算从光源传输并由光发射器/传感器组件接收的光的强度,从而允许光谱分析和解释以确定各种水果的甜度和酸度。 当光强度降低时,光检测器控制光中断单元中断光路。 该设备适用于自动化生产线,有效和可靠地测量内部果实的性质,以提高果实选择的操作效率和精度。

    Method of Depositing Thin Film
    10.
    发明申请
    Method of Depositing Thin Film 失效
    沉积薄膜的方法

    公开(公告)号:US20080044567A1

    公开(公告)日:2008-02-21

    申请号:US11571547

    申请日:2005-12-14

    IPC分类号: C23C16/00

    摘要: Disclosed is a method of depositing thin films, in which the thin films are continuously deposited into one chamber and 1-6 wafers are loaded into the chamber. In the method, a process gap between a shower head or a gas injection unit and a substrate is capable of being controlled. The method comprises (a) loading at least one substrate into the chamber, (b) depositing the Ti thin film onto the substrate, adjusted so that a first process gap is maintained, (c) moving a wafer block so that the first process gap is changed into a second process gap in order to control the process gap of the substrate upon which the Ti thin film is deposited, (d) depositing the TiN thin film onto the substrate, moved to set the second process gap, and (e) unloading the substrate upon which the Ti/TiN thin films are deposited. If it is possible to continuously deposit Ti/TiN thin films on 1-6 substrates in one chamber, it is possible to set only one chamber among 4 chambers in a PM period, thereby an operating ratio of a cluster tool can be significantly improved. When Ti/TiN is continuously deposited in one chamber, the time needed to move a substrate from a Ti chamber to a TiN chamber is reduced, thus treatment efficiency of the substrate per unit time is significantly increased.

    摘要翻译: 公开了一种沉积薄膜的方法,其中薄膜连续地沉积到一个室中,并且将1-6个晶片装入室中。 在该方法中,能够控制淋浴喷头或气体喷射单元与基板之间的处理间隙。 该方法包括:(a)将至少一个衬底装载到腔室中,(b)将Ti薄膜沉积到衬底上,进行调整,使得保持第一工艺间隙;(c)移动晶片块使得第一工艺间隙 改变为第二工艺间隙,以便控制沉积Ti薄膜的衬底的工艺间隙,(d)将TiN薄膜沉积到衬底上,移动以设定第二工艺间隙,(e) 卸载沉积有Ti / TiN薄膜的基板。 如果可以在一个室中的1-6个基板上连续沉积Ti / TiN薄膜,则可以在PM周期内在4个室中仅设置一个室,从而可以显着提高簇工具的运行比。 当在一个室中连续沉积Ti / TiN时,将衬底从Ti室移动到TiN室所需的时间减少,因此每单位时间衬底的处理效率显着提高。