摘要:
Disclosed herein is a composition that includes a silicon compound, a novolak resin, a catalyst, and an organic solvent, which can be used as a part of hard mask film over an underlying layer during the manufacture of a semiconductor device. The hard mask film is useful in the formation of a uniform pattern on the device.
摘要:
A MIM capacitor includes a lower electrode disposed on a semiconductor substrate. A dielectric layer is disposed on the lower electrode to completely cover an exposed surface of-the lower electrode. An upper electrode is disposed on the dielectric layer. A method for forming a MIM capacitor includes forming a lower electrode on a semiconductor substrate. A dielectric layer and an upper metal layer are formed on an entire surface of the substrate to cover the lower electrode. The dielectric and upper metal layers are patterned on the lower electrode.
摘要:
A MIM capacitor includes a lower electrode disposed on a semiconductor substrate. A dielectric layer is disposed on the lower electrode to completely cover an exposed surface of the lower electrode. An upper electrode is disposed on the dielectric layer. A method for forming a MIM capacitor includes forming a lower electrode on a semiconductor substrate. A dielectric layer and an upper metal layer are formed on an entire surface of the substrate to cover the lower electrode. The dielectric and upper metal layers are patterned on the lower electrode.
摘要:
A lithography apparatus is provided. The apparatus includes: a stage, a first light source unit, an optical system, an image obtaining means, an image edit means, an LC panel, and a second light source unit. The LC panel is coupled with the optical system and receives a signal of the image edited by the image edit means and displays the received image to perform a photo mask function. The second light source unit provides light used in performing an exposure on the test material using the imaged displayed on the LC panel for a photo mask.
摘要:
A composite gasket for fuel cell stack comprises two rows of beads and a support which can improve mountability and sealing property and reduce the assembly pressure by using materials having low hardness with reduced volume. This invention also relates to a structure for the assembly of the composite gasket.
摘要:
A method is provided for variably controlling a data read speed in an optical disc drive. The method includes determining whether or not a read command has been issued; if the determining step determines that the read command has been issued, examining additional information associated with the read command; and variably controlling a data read speed for an optical disc according to the additional information.
摘要:
A drum washing machine including a water tub, a rotary tub rotatably provided in the water tub, a detergent feed pipe having a first end connected to the water tub and a second end disposed at an inlet of the rotary tub, and a detergent feed unit to feed a detergent contained in the water tub into the rotary tub through the detergent feed pipe, wherein the detergent feed unit dissolves the detergent before feeding the detergent into the rotary tub in response to the detergent being a powdered detergent.
摘要:
Provided are a speech restoration system and method for concealing packet losses. The system includes a demultiplexer that demultiplexes an input bit stream and divides the input bit stream into several packets; a packet loss concealing unit that produces and outputs a linear spectrum pair (LSP) coefficient representing the vocal tract of voice and an excitation signal corresponding to a lost frame, when a packet loss occurs; and a speech restoring unit that synthesizes voice using the packets input from the demultiplexer, outputs the result as restored voice, and synthesizes voice corresponding to a lost packet using the LSP coefficient and the excitation signal input from the packet loss concealing unit and outputs the result as restored voice when the lost packet is detected, wherein the packet loss concealing unit repeats linear prediction coefficients (LPCs) of a last-received valid frame, produces a first excitation signal for the lost frame using a time scale modification (TSM) method, when the lost frame is voiceless, and produces a second excitation signal by re-estimating a gain parameter based on the first excitation signal, when the lost frame is voiced.
摘要:
An apparatus for measuring fruit properties, in order to classify fruit according to internal qualities, measures the sweetness of a fruit sample using near-infrared spectroscopy. The apparatus includes a pair of waveguides (12), a pair of optic emitter/sensor assemblies (14), a light-interrupting unit (20), and a light detector (40). The light detector calculates the intensity of light, transmitted from a light source and received by the optical emitter/sensor assemblies, thus allowing spectral analysis and interpretation for the determination of sweetness and acidity of a variety of fruits. The light detector controls the light-interrupting unit to interrupt the optical path when the light intensity is reduced. The apparatus is suitable for use in an automated line, for effective and reliable measurement of internal fruit properties, to improve operational efficiency and precision in fruit selection.
摘要:
Disclosed is a method of depositing thin films, in which the thin films are continuously deposited into one chamber and 1-6 wafers are loaded into the chamber. In the method, a process gap between a shower head or a gas injection unit and a substrate is capable of being controlled. The method comprises (a) loading at least one substrate into the chamber, (b) depositing the Ti thin film onto the substrate, adjusted so that a first process gap is maintained, (c) moving a wafer block so that the first process gap is changed into a second process gap in order to control the process gap of the substrate upon which the Ti thin film is deposited, (d) depositing the TiN thin film onto the substrate, moved to set the second process gap, and (e) unloading the substrate upon which the Ti/TiN thin films are deposited. If it is possible to continuously deposit Ti/TiN thin films on 1-6 substrates in one chamber, it is possible to set only one chamber among 4 chambers in a PM period, thereby an operating ratio of a cluster tool can be significantly improved. When Ti/TiN is continuously deposited in one chamber, the time needed to move a substrate from a Ti chamber to a TiN chamber is reduced, thus treatment efficiency of the substrate per unit time is significantly increased.