ORGANIC/INORGANIC THIN FILM DEPOSITION DEVICE AND DEPOSITION METHOD

    公开(公告)号:US20080138517A1

    公开(公告)日:2008-06-12

    申请号:US11950606

    申请日:2007-12-05

    IPC分类号: C23C16/455

    摘要: Provided are a device for depositing an organic/inorganic thin film and a deposition method thereof. The method includes: i) heating a source vessel containing an organic material and an inorganic material to generate at least one deposition gas phase of the organic and inorganic materials; ii) transferring one of the deposition gas phases of the organic and inorganic materials to a process chamber through a transfer path maintaining a constant temperature so as to prevent the generated deposition gas phases of the organic/inorganic materials from being condensed; iii) distributing one of the deposition gas phases of the organic and inorganic materials transferred to the process chamber onto a substrate disposed in the process chamber to adsorb one of the organic and inorganic materials on the substrate; iv) purging the process chamber using a diluted gas and a transfer gas after one of the organic and inorganic materials is adsorbed on the substrate; v) heating an activating agent source vessel containing an activation heat initiator capable of activating a monomer of one of the deposition gas phases of the organic and inorganic materials to generate a heat initiator gas phase; vi) transferring the heat initiator gas phase to the process chamber through a transfer path maintaining a constant temperature so as to prevent the heat initiator gas phase from being condensed; vii) distributing the heat initiator gas phase transferred to the process chamber onto the organic or inorganic material monomer deposited on the substrate through the process chamber maintaining a constant temperature so as to prevent the heat initiator gas phase from being condensed in a shower head, and forming an organic/inorganic thin film; and viii) exhausting the heat initiator gas phase remaining after the organic/inorganic thin film is deposited on the substrate from the process chamber, and purging the process chamber using the diluted gas and the transfer gas. Therefore, according to the method of depositing the organic/inorganic thin film in a time-division manner, the thickness of the thin film can be accurately adjusted and the deposition can be uniformly performed when the thin film is deposited on a large-scale substrate.

    ORGANIC/INORGANIC THIN FILM DEPOSITION DEVICE AND DEPOSITION METHOD
    3.
    发明申请
    ORGANIC/INORGANIC THIN FILM DEPOSITION DEVICE AND DEPOSITION METHOD 审中-公开
    有机/无机薄膜沉积装置和沉积方法

    公开(公告)号:US20100300360A1

    公开(公告)日:2010-12-02

    申请号:US12856004

    申请日:2010-08-13

    IPC分类号: C23C16/46

    摘要: Provided is a method for depositing an organic/inorganic thin film. The method includes: i) heating a source vessel containing an organic material and an inorganic material; ii) transferring a deposition gas to a process chamber; iii) distributing the deposition gas onto a substrate disposed in the process chamber; iv) purging the process chamber; v) heating an activating agent source vessel; vi) transferring a heat initiator gas phase to the process chamber; vii) distributing the heat initiator gas phase onto the organic or inorganic material monomer deposited on the substrate through the process chamber, and forming an organic/inorganic thin film; and viii) exhausting the heat initiator gas phase and purging the process chamber. Depositing the organic/inorganic thin film in a time-division manner, the thickness of the thin film can be accurately adjusted and the deposition can be uniformly performed when the thin film is deposited on a large-scale substrate.

    摘要翻译: 提供一种沉积有机/无机薄膜的方法。 该方法包括:i)加热含有机材料和无机材料的源容器; ii)将沉积气体转移到处理室; iii)将沉积气体分配到设置在处理室中的基板上; iv)清洗处理室; v)加热活化剂源容器; vi)将热引发剂气相转移到所述处理室; vii)通过处理室将热引发剂气相分配到沉积在基材上的有机或无机材料单体上,形成有机/无机薄膜; 和viii)排出热引发剂气相并清洗处理室。 以时分方式沉积有机/无机薄膜,可以精确地调节薄膜的厚度,并且当薄膜沉积在大型基底上时能够均匀地进行沉积。

    METHOD OF FABRICATING ELECTROPHORETIC INK, ELECTROPHORETIC INK FORMED USING THE METHOD, AND ELECTROPHORETIC DISPLAY HAVING THE SAME
    6.
    发明申请
    METHOD OF FABRICATING ELECTROPHORETIC INK, ELECTROPHORETIC INK FORMED USING THE METHOD, AND ELECTROPHORETIC DISPLAY HAVING THE SAME 有权
    制造电子墨水的方法,使用该方法形成的电子墨水以及具有该方法的电泳显示器

    公开(公告)号:US20110122480A1

    公开(公告)日:2011-05-26

    申请号:US12765425

    申请日:2010-04-22

    IPC分类号: G02F1/167 C09D11/00 H01B3/20

    摘要: Provided are a method of fabricating an electrophoretic ink, the electrophoretic ink formed using the method, and an electrophoretic display having the same. The method of fabricating the electrophoretic ink includes dispersing a pigment particle into a dielectric fluid for the electrophoretic ink and adding at least monomer and initiator to the dielectric fluid to form a polymeric membrane surrounding the pigment particle. Since the pigment particle surrounded by the polymeric membrane and the dielectric fluid in which the pigment particle is dispersed can be utilized as the electrophoretic ink as they are, the method of fabricating the electrophoretic ink is simplified.

    摘要翻译: 提供一种制造电泳墨水的方法,使用该方法形成的电泳墨水和具有该电泳墨水的电泳显示器。 制造电泳墨水的方法包括将颜料颗粒分散到用于电泳墨水的介电流体中,并将​​至少单体和引发剂添加到介电流体中以形成围绕颜料颗粒的聚合物膜。 由于聚合物膜所包围的颜料颗粒和其中分散有颜料颗粒的介电流体可以直接用作电泳油墨,所以制造电泳油墨的方法简单。

    FLEXIBLE SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
    7.
    发明申请
    FLEXIBLE SUBSTRATE AND METHOD OF MANUFACTURING THE SAME 审中-公开
    柔性基板及其制造方法

    公开(公告)号:US20100151274A1

    公开(公告)日:2010-06-17

    申请号:US12633937

    申请日:2009-12-09

    摘要: A method of manufacturing a flexible substrate is provided. The method includes coating a precursor including an inorganic polymer on the flexible substrate, curing the precursor including the inorganic polymer, and oxidizing a surface of the cured precursor including the inorganic polymer to form an oxide layer. Accordingly, an organic/inorganic barrier layer may be formed by only one coating process of a thin film. In this case, oxygen plasma or infrared ray/ozone processing may be performed at atmospheric pressure, thereby reducing process costs and equipment costs by not using vacuum equipment.

    摘要翻译: 提供一种制造柔性基板的方法。 该方法包括在柔性基板上涂覆包含无机聚合物的前体,固化包含无机聚合物的前体,以及氧化包含无机聚合物的固化前体的表面以形成氧化物层。 因此,有机/无机阻挡层可以仅通过薄膜的一个涂覆工艺形成。 在这种情况下,可以在大气压下进行氧等离子体或红外线/臭氧处理,从而通过不使用真空设备来降低工艺成本和设备成本。

    COLOR ELECTRONIC PAPER DISPLAYS USING BLACK MATRICES AND METHODS OF FABRICATING THE SAME
    9.
    发明申请
    COLOR ELECTRONIC PAPER DISPLAYS USING BLACK MATRICES AND METHODS OF FABRICATING THE SAME 审中-公开
    彩色电子纸显示器使用黑色矩阵及其制作方法

    公开(公告)号:US20130163067A1

    公开(公告)日:2013-06-27

    申请号:US13606167

    申请日:2012-09-07

    IPC分类号: G02B26/00 B05D5/06

    摘要: Color electronic paper displays are provided. The color electronic paper display includes a substrate, a plurality of black matrices arrayed with a certain distance therebetween on the substrate, and electronic ink microcapsules between the black matrices. The black matrices cover interconnection lines disposed on the substrate. The electronic ink microcapsules include at least one first microcapsule containing white particles and yellow particles, at least one second microcapsule containing white particles and magenta particles, and at least one third microcapsule containing white particles and cyan particles. Related methods are also provided.

    摘要翻译: 提供彩色电子纸显示屏。 彩色电子纸显示器包括基板,在基板上以一定距离排列的多个黑色矩阵,以及黑色矩阵之间的电子墨水微胶囊。 黑矩阵覆盖布置在基板上的互连线。 电子墨水微胶囊包括含有白色颗粒和黄色颗粒的至少一种第一微胶囊,含有白色颗粒和品红色颗粒的至少一种第二微胶囊,以及含有白色颗粒和青色颗粒的至少一种第三微胶囊。 还提供了相关方法。

    DISPLAY DEVICES
    10.
    发明申请
    DISPLAY DEVICES 审中-公开
    显示设备

    公开(公告)号:US20120154900A1

    公开(公告)日:2012-06-21

    申请号:US13333028

    申请日:2011-12-21

    申请人: Chul Am KIM

    发明人: Chul Am KIM

    IPC分类号: G02F1/167

    摘要: Provided is a display device, which includes a plurality of charged pigment particles, a dielectric medium dispersing the charged pigment particles, and a micro capsules surrounding the charged pigment particles and the dielectric medium. The dielectric medium includes an ester-based fluid having high permittivity.

    摘要翻译: 提供了一种显示装置,其包括多个带电颜料颗粒,分散带电颜料颗粒的电介质和围绕带电颜料颗粒和电介质的微胶囊。 电介质包括具有高介电常数的酯基流体。