公开(公告)号：US20180052059A1

公开(公告)日：2018-02-22

申请号：US15800329

申请日：2017-11-01

Applicant: Gigaphoton Inc.

Inventor： Masato MORIYA ,  Osamu WAKABAYASHI ,  Yoshinobu WATABE

IPC: G01J11/00 ,  G02B27/14 ,  G02B5/30 ,  G01J4/04 ,  H01S3/00 ,  H01S3/134 ,  G01J1/04

CPC classification number: G01J11/00 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/0477 ,  G01J1/4257 ,  G01J4/04 ,  G01J2001/4261 ,  G02B5/3066 ,  G02B27/148 ,  H01S3/0014 ,  H01S3/134 ,  H01S3/2366

Abstract: A light beam measurement device includes: a polarization measurement unit including a first measurement beam splitter provided on an optical path of a laser beam and configured to measure a polarization state of the laser beam having been partially reflected by the first measurement beam splitter; a beam profile measurement unit including a second measurement beam splitter provided on the optical path of the laser beam and configured to measure a beam profile of the laser beam having been partially reflected by the second measurement beam splitter; and a laser beam-directional stability measurement unit configured to measure a stability in a traveling direction of the laser beam, while the first measurement beam splitter and the second measurement beam splitter are made of a material containing CaF2.

公开(公告)号：US20170205631A1

公开(公告)日：2017-07-20

申请号：US15478683

申请日：2017-04-04

Applicant: Gigaphoton Inc.

Inventor： Yoshinobu WATABE ,  Miwa IGARASHI ,  Koji ASHIKAWA

IPC: G02B27/10 ,  H01S3/101 ,  H01S3/00 ,  G02B27/09 ,  H01S3/03 ,  H01S3/225

CPC classification number: G02B27/1086 ,  G02B27/0972 ,  H01S3/005 ,  H01S3/03 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/101 ,  H01S3/105 ,  H01S3/225

Abstract: A narrow band laser apparatus may include: a laser chamber; a line narrow module configured to narrow a band width of a laser beam outputted from the laser chamber and return the laser beam to the laser chamber, the line narrow module including a grating; a housing accommodating the line narrow module; three mounts fixed to the housing; and a housing moving device configured to support the housing and the line narrow module by supporting each of the three mounts and move the line narrow module by moving the housing with respect to the laser chamber in a direction substantially perpendicular to a dispersion plane of the grating.

公开(公告)号：US20160076944A1

公开(公告)日：2016-03-17

申请号：US14947335

申请日：2015-11-20

Applicant: Gigaphoton Inc.

Inventor： Masato MORIYA ,  Osamu WAKABAYASHI ,  Yoshinobu WATABE

IPC: G01J11/00 ,  H01S3/134 ,  G02B5/30 ,  H01S3/00 ,  G01J4/04 ,  G02B27/14

CPC classification number: G01J11/00 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/0477 ,  G01J1/4257 ,  G01J4/04 ,  G01J2001/4261 ,  G02B5/3066 ,  G02B27/148 ,  H01S3/0014 ,  H01S3/134 ,  H01S3/2366

Abstract: A light beam measurement device includes: a polarization measurement unit including a first measurement beam splitter provided on an optical path of a laser beam and configured to measure a polarization state of the laser beam having been partially reflected by the first measurement beam splitter; a beam profile measurement unit including a second measurement beam splitter provided on the optical path of the laser beam and configured to measure a beam profile of the laser beam having been partially reflected by the second measurement beam splitter; and a laser beam-directional stability measurement unit configured to measure a stability in a traveling direction of the laser beam, while the first measurement beam splitter and the second measurement beam splitter are made of a material containing CaF2.

Abstract translation: 光束测量装置包括：偏振测量单元，包括设置在激光束的光路上的第一测量光束分离器，其被配置为测量被第一测量分束器部分反射的激光束的偏振状态; 光束轮廓测量单元，包括设置在激光束的光路上并被配置为测量被第二测量分束器部分反射的激光束的光束轮廓的第二测量分束器; 以及激光束方向稳定性测量单元，被配置为测量激光束的行进方向上的稳定性，而第一测量分束器和第二测量分束器由含有CaF 2的材料制成。

公开(公告)号：US20200280161A1

公开(公告)日：2020-09-03

申请号：US16865537

申请日：2020-05-04

Applicant: Gigaphoton Inc.

Inventor： Yoshinobu WATABE ,  Masahide KATO ,  Hiroshi FURUSATO

IPC: H01S3/106 ,  H01S3/038 ,  G02B7/02 ,  G02B27/09 ,  G03F7/20

Abstract: An optical element moving apparatus includes a first holder configured to hold a first optical element, a second holder configured to hold a second optical element and having an inclination that inclines with respect to a first direction in which the second holder approaches the first holder, a guide section configured to be capable of moving the second holder in a direction parallel to the first direction, and an elastic member disposed in a position which is located between the first holder and the second holder and through which a first plane passes, the first plane intersecting the inclination at right angles and being parallel to the first direction.