Interferometric device for detecting a centering error
    4.
    发明授权
    Interferometric device for detecting a centering error 失效
    用于检测定心误差的干涉仪

    公开(公告)号:US5253038A

    公开(公告)日:1993-10-12

    申请号:US607776

    申请日:1990-10-22

    摘要: A device for detecting a centering error of a rotationally symmetrical surface (0.sub.1, 0.sub.2) of an object (0) with respect to a rotational axis (AR) about which axis the object is rotated for the purpose of the centering error detection is described. Two beams (b.sub.1, b.sub.2 ; b.sub.3, b.sub.4) at angles of approximately 90.degree. are directed onto the object and the variation in the phase difference caused by the centering error (.epsilon.) between the two beams (b.sub.1, b.sub.2 ; b.sub.3, b.sub.4) reflected by the surface is determined.

    摘要翻译: 描述了一种用于检测物体(0)相对于旋转轴线(AR)的旋转对称表面(01,02)的定心误差的装置,该旋转轴线(AR)围绕对象被旋转的轴线用于定心误差检测。 大约90度角的两束(b1,b2; b3,b4)被引导到物体上,并且由两束(b1,b2; b3,b4)之间的对中误差(ε)引起的相位差的变化, 由表面反射确定。

    Method and arrangement for aligning a mask pattern relative to a
semiconductor substrate
    6.
    发明授权
    Method and arrangement for aligning a mask pattern relative to a semiconductor substrate 失效
    用于使掩模图案相对于半导体衬底对准的方法和装置

    公开(公告)号:US4251160A

    公开(公告)日:1981-02-17

    申请号:US924351

    申请日:1978-07-13

    摘要: A method and arrangement for aligning a mask comprising a mask-pattern relative to a substrate when the mask-pattern is repeatedly and directly imaged on the substrate, gratings in the mask and gratings on the substrate (phase gratings) being employed as alignment references. The gratings in the mask are located outside the mask pattern and the phase gratings are located on the substrate outside the area where the mask-pattern is imaged. The substrate (phase) gratings are imaged on one of the mask gratings with a projection system which is also used for projecting the mask-pattern on the substrate. The image of the gratings on the grating in the mask is adjusted. Thus, a very accurate alignment can be achieved.

    摘要翻译: 当掩模图案被重复地直接成像在基板上时,掩模中的光栅和基板上的光栅(相位光栅)被用作对准基准,用于对准包括掩模图案的掩模的方法和装置。 掩模中的光栅位于掩模图案之外,并且相位光栅位于掩模图案被成像的区域之外的基板上。 衬底(相位)光栅通过投影系统在掩模光栅中的一个上成像,该投影系统也用于将掩模图案投影到衬底上。 调整掩模上光栅上的光栅的图像。 因此,可以实现非常精确的对准。

    Apparatus for the pointwise scanning of an information surface
    7.
    发明授权
    Apparatus for the pointwise scanning of an information surface 失效
    用于信息表面的点扫描的装置

    公开(公告)号:US4242579A

    公开(公告)日:1980-12-30

    申请号:US925230

    申请日:1978-07-17

    摘要: An apparatus is described for the pointwise scanning of an information surface. By arranging an observation objective system asymmetrically relative to a zero-order subbeam of the radiation coming from the information surface, and by utilizing a detector whose dimension in the scanning direction is small, the resolution can be increased.

    摘要翻译: 描述了用于信息表面的逐点扫描的装置。 通过相对于来自信息表面的辐射的零级子束不对称地布置观察目标系统,并且通过利用扫描方向尺寸小的检测器,可以提高分辨率。

    Apparatus for positional control of a reading head in a device for
reproducing optically coded video disk recordings
    8.
    发明授权
    Apparatus for positional control of a reading head in a device for reproducing optically coded video disk recordings 失效
    用于在用于再现光学编码的视频盘记录的装置中的读取头的位置控制的装置

    公开(公告)号:US4034403A

    公开(公告)日:1977-07-05

    申请号:US501676

    申请日:1974-08-29

    CPC分类号: G11B7/09 G11B7/12

    摘要: An apparatus is described for reading, by means of a beam of radiation, a disk-shaped information carrier which contains spirally arranged video and/or audio signals coded in optical form, which apparatus comprises a source of radiation and a radiation-sensitive signal detector cell, the information carrier being disposed in the radiation path between this source and this detector. By providing at least one grating, consisting of radiation-transmitting and radiation-absorbing stripes and on which an image of part of the grating-shaped structure of the information track in the vicinity of the portion of this track to be read may be formed, and a radiation-sensitive detection system, an accurate indication of axial and radial displacements of the optical imaging system relative to the information carrier can be obtained.

    摘要翻译: 描述了一种用于通过辐射束读取包含以光学形式编码的螺旋排列的视频和/或音频信号的盘形信息载体的装置,该装置包括辐射源和辐射敏感信号检测器 信息载体被布置在该源和该检测器之间的辐射路径中。 通过提供由辐射透射和辐射吸收条构成的至少一个光栅,并且可以在其上形成要读取的该轨道的部分附近的信息轨道的格栅结构的一部分的图像, 和辐射敏感检测系统,可以获得光学成像系统相对于信息载体的轴向和径向位移的精确指示。

    Device for displaying three-dimensional images
    10.
    发明授权
    Device for displaying three-dimensional images 失效
    显示三维图像的设备

    公开(公告)号:US4571616A

    公开(公告)日:1986-02-18

    申请号:US508221

    申请日:1983-06-27

    IPC分类号: H04N13/04 H04N13/00 H04N9/60

    CPC分类号: H04N13/0409 H04N13/0404

    摘要: In a device for displaying three-dimensional pictures, N (with N=2, 3, 4 . . . ) recorded images corresponding to different spatial observation positions are displayed on one or more intermediate display screens (3, 4, 5, 82, 83, 84). The device comprises a viewing screen (6) having lens elements (20, 30) via which corresponding picture segments of the recorded images are displayed. An optical coupling (8, 44) having a plurality of light conductors (8) exists between the viewing screen and the intermediate display screen(s). The light conductors unambiguously associate groups of N corresponding picture segments with lens elements of the viewing screen. By means of the device, three-dimensional pictures can be observed without further auxiliary means for the viewer.

    摘要翻译: 在用于显示三维图像的装置中,在一个或多个中间显示屏幕(3,4,5,52,84)上显示与不同的空间观察位置对应的N(N = 2,3,4 ...)记录图像, 83,84)。 该装置包括具有透镜元件(20,30)的观察屏(6),通过该观察屏显示所记录图像的对应图像段。 在观看屏幕和中间显示屏幕之间存在具有多个光导体(8)的光耦合器(8,44)。 光导体明确地将N个相应图片段的组与观看屏幕的透镜元件相关联。 通过该装置,可以观察三维图像,而无需为观看者提供进一步的辅助装置。