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公开(公告)号：US5253038A
公开(公告)日：1993-10-12
申请号：US607776
申请日：1990-10-22
CPC分类号： G01B11/26 , G01M11/0221 , G02B27/62 , G02B6/32
摘要： A device for detecting a centering error of a rotationally symmetrical surface (0.sub.1, 0.sub.2) of an object (0) with respect to a rotational axis (AR) about which axis the object is rotated for the purpose of the centering error detection is described. Two beams (b.sub.1, b.sub.2 ; b.sub.3, b.sub.4) at angles of approximately 90.degree. are directed onto the object and the variation in the phase difference caused by the centering error (.epsilon.) between the two beams (b.sub.1, b.sub.2 ; b.sub.3, b.sub.4) reflected by the surface is determined.
摘要翻译： 描述了一种用于检测物体（0）相对于旋转轴线（AR）的旋转对称表面（01,02）的定心误差的装置，该旋转轴线（AR）围绕对象被旋转的轴线用于定心误差检测。 大约90度角的两束（b1，b2; b3，b4）被引导到物体上，并且由两束（b1，b2; b3，b4）之间的对中误差（ε）引起的相位差的变化， 由表面反射确定。
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公开(公告)号：US4446548A
公开(公告)日：1984-05-01
申请号：US313418
申请日：1981-10-21
IPC分类号： H01J37/22 , G01N23/22 , G01N29/06 , G02B21/00 , G02B26/10 , G11B7/13 , G11B9/00 , H01J37/244 , H04N3/16 , H04N7/18 , G11B11/00
CPC分类号： G11B9/00 , G02B21/002 , G11B7/13
摘要： An apparatus is described for point-by-point scanning of an object, which may be a phase object, an amplitude object or a combined amplitude and phase object. The object is scanned with a light, sound, electron or X-ray beam which is converged to a spot on the object. A pair of detectors disposed in the path of the modulated radiation coming from the object convert the variations in the radiation into corresponding electrical signals which are fed to a summing circuit. A variable phase shifter connected between at least one of the detectors and the summing circuit is used to introduce a phase shift in the electrical signal such as to optimize the output signal of the summing circuit for the type of object being scanned.
摘要翻译： 描述了用于物体的逐点扫描的装置，其可以是相位对象，幅度对象或组合的幅度和相位对象。 物体用光，声，电子或X射线束扫描，该光束，会聚到物体上的斑点。 设置在来自物体的调制辐射的路径中的一对检测器将辐射中的变化转换成馈送到求和电路的对应电信号。 连接在至少一个检测器和求和电路之间的可变移相器用于引入电信号中的相移，以便对被扫描对象类型的求和电路的输出信号进行优化。
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3.发明授权Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system 失效用于扫描光刻投影装置的镜投影系统和包括这种系统的光刻设备公开(公告)号：US06199991B1
公开(公告)日：2001-03-13
申请号：US09135862
申请日：1998-08-18
申请人： Josephus J. M. Braat
发明人： Josephus J. M. Braat
IPC分类号： G02B508
CPC分类号： G03F7/70233 , G02B17/0657 , G03F7/70275 , G03F7/70358
摘要： A mask pattern is repetitively scan-imaged on a number of areas of a substrate by means of a beam of EUV radiation having a circular segment-shaped cross-section. This system, which is easier to manufacture at lower cost than a projection system with six or more imaging mirrors, has only five imaging mirrors with a good numerical aperture and an acceptable image-ringfield width. An EUV lithographic projection apparatus provided with the new projection system has a wafer throughput which is approximately 50% higher than that of an apparatus provided with a six-mirror projection system. Moreover, it has a compact construction.
摘要翻译： 掩模图案通过具有圆形扇形截面的EUV辐射束在衬底的多个区域上重复扫描成像。 该系统以比具有六个或更多个成像镜的投影系统更低的成本更容易制造，仅具有五个具有良好数值孔径和可接受的图像环形宽度的成像镜。 设置有新投影系统的EUV光刻投影设备具有比设置有六镜投影系统的设备高约50％的晶片吞吐量。 此外，它具有紧凑的结构。
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公开(公告)号：US6038077A
公开(公告)日：2000-03-14
申请号：US132862
申请日：1998-08-12
申请人： Josephus J. M. Braat
发明人： Josephus J. M. Braat
CPC分类号： G02B13/18
摘要： Imaging conditions for the aperture rays of an axial pencil, for example Abbe's sine condition, determine how an object volume will be imaged in the image space of an optical lens system. The invention provides an optical lens element having an imaging condition which analytically should lead to the largest possible volume in an image space wherein possible aberrations (spherical aberration and coma) remain below a certain prescribed level.
摘要翻译： 用于轴向笔的孔径光线的成像条件，例如阿贝正弦条件，确定对象体积如何在光学透镜系统的图像空间中成像。 本发明提供一种具有成像条件的光学透镜元件，该成像条件在分析上应导致图像空间中最大可能的体积，其中可能的像差（球面像差和昏迷）保持低于某一规定水平。
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5.发明授权Beam-shaping optical element and device for converting a beam having a first cross-section into a beam having a second cross-section 失效光束整形光学元件和用于将具有第一横截面的光束转换成具有第二横截面的光束的装置
公开(公告)号：US5467335A
公开(公告)日：1995-11-14
申请号：US175075
申请日：1993-12-29
申请人： Josephus J. M. Braat
发明人： Josephus J. M. Braat
IPC分类号： B41J2/44 , G02B3/00 , G02B26/10 , G02B27/09 , G03B27/54 , G11B7/135 , H01S3/00 , H01S5/00 , H01S5/022 , G11B7/00
CPC分类号： G02B3/00 , G02B19/0014 , G02B19/0052 , G02B27/09 , G02B27/0966 , G02B27/0972 , G11B7/1381 , G11B7/1398 , H01S5/02212 , H01S5/02248 , H01S5/02288
摘要： A beam-shaping element for converting a beam having an elliptical cross-section into a beam having a circular cross-section. This element has a cylindrical entrance surface and a toriodal exit surface and can be arranged close to a diode laser so that the risk of wavefront deviations due to defocusing is reduced. The element has a high coupling efficiency.
摘要翻译： 一种用于将具有椭圆截面的光束转换成具有圆形横截面的光束的光束成形元件。 该元件具有圆柱形入口表面和波浪形出射表面，并且可以靠近二极管激光器布置，从而降低由于散焦引起的波前偏差的风险。 该元件具有高耦合效率。
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公开(公告)号：US4668056A
公开(公告)日：1987-05-26
申请号：US589909
申请日：1984-03-14
申请人： Josephus J. M. Braat , Albert Smid
发明人： Josephus J. M. Braat , Albert Smid
CPC分类号： G02B3/04 , G11B7/1374
摘要： A single lens is described for forming of a scanning spot on an information surface of a transparent record-carrier substrate. The lens has one aspherical surface and one spherical or plane surface. The curvatures of the lens surfaces and the thickness of the lens are selected to compensate for aberrations caused by the substrate.
摘要翻译： 描述了用于在透明记录载体基板的信息表面上形成扫描点的单个透镜。 透镜具有一个非球面和一个球面或平面。 选择透镜表面的曲率和透镜的厚度以补偿由衬底引起的像差。
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7.发明授权Record carrier having an optically readable information structure comprised of information areas of two different phase depths 失效具有由两个不同相位深度的信息区组成的光学可读信息结构的记录载体
公开(公告)号：US4556967A
公开(公告)日：1985-12-03
申请号：US565994
申请日：1983-12-27
申请人： Josephus J. M. Braat
发明人： Josephus J. M. Braat
CPC分类号： G11B7/0938 , G11B3/60 , G11B7/24085
摘要： A record carrier is described which has an optically readable information structure in which information areas of adjacent information track portions have different phase depths, and an apparatus for reading said record carrier. By a suitable choice of the phase depths and by an electronic phase shift of the signals supplied by the read detectors, cross-talk between adjacent tracks can substantially be eliminated.
摘要翻译： 描述了一种具有光学可读信息结构的记录载体，其中相邻信息轨道部分的信息区域具有不同的相位深度，以及用于读取所述记录载体的装置。 通过相位深度的适当选择和由读取检测器提供的信号的电子相移，可以基本上消除相邻轨道之间的串扰。
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8.发明授权Devuce and method for forming a focus error signal based on ohase difference between corresponding parts of detector signals 失效基于检测器信号的相应部分之间的差值形成聚焦误差信号的方法和方法公开(公告)号：US06788644B1
公开(公告)日：2004-09-07
申请号：US09332239
申请日：1999-06-14
申请人： Josephus J. M. Braat
发明人： Josephus J. M. Braat
IPC分类号： G11B724
CPC分类号： G11B7/24085 , G11B7/00745 , G11B7/0908 , G11B7/0917 , G11B7/0938
摘要： A device scans an optical record carrier having optically detectable marks along a track. The device includes a radiation source for emitting a radiation beam, an objective system for guiding the radiation beam to the record carrier, and a radiation-sensitive detection system for receiving radiation from the record carrier. The detection system includes at least two detectors on both sides of a dividing line. Each detector has an output for providing a detector signal. An electronic circuit forms a focus error signal from the detector signals. The electronic circuit determines a time or phase difference between corresponding parts of the detector signals relating to passage of the radiation beam over patterns of the marks having a spatial frequency in a first range and in a different, second range, and forms a focus error signal in dependence on the time or phase difference.
摘要翻译： 设备沿着轨道扫描具有光学可检测标记的光学记录载体。 该装置包括用于发射辐射束的辐射源，用于将辐射束引导到记录载体的物镜系统，以及用于接收来自记录载体的辐射的辐射敏感检测系统。 检测系统在分界线的两侧包括至少两个检测器。 每个检测器具有用于提供检测器信号的输出。 电子电路从检测器信号形成聚焦误差信号。 电子电路确定检测器信号的相关部分之间的时间或相位差，该信号与辐射束通过具有在第一范围和不同第二范围内的空间频率的标记的图案相关，并且形成聚焦误差信号 依赖于时间或相位差。
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公开(公告)号：US06317276B1
公开(公告)日：2001-11-13
申请号：US09622601
申请日：2000-08-16
申请人： Josephus J. M. Braat
发明人： Josephus J. M. Braat
IPC分类号： G02B914
CPC分类号： G11B7/13927 , G02B21/002 , G11B7/1378 , G11B2007/13727
摘要： In a lens system for focusing a divergent beam in a small spot and comprising a collimator lens and an objective lens, the collimator lens is composed of a positive plastics lens element and a negative glass lens element. This collimator corrects the temperature-dependent spherical aberration of the objective lens. This lens system is very suitable for a scanning device and an apparatus for reading/writing high-density optical discs.
摘要翻译： 在用于将发散光束聚焦在小光点并且包括准直透镜和物镜的透镜系统中，准直透镜由正塑料透镜元件和负玻璃透镜元件组成。 该准直器校正物镜的温度依赖性球面像差。 该透镜系统非常适用于扫描装置和用于读/写高密度光盘的装置。
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公开(公告)号：US6052237A
公开(公告)日：2000-04-18
申请号：US812191
申请日：1997-03-06
IPC分类号： G02B3/02 , G02B13/18 , G02B27/00 , G11B7/00 , G11B7/1372 , G11B7/1374 , G11B7/1392 , G02B3/10
CPC分类号： G11B7/1374 , G02B27/0025 , G02B3/02 , G11B7/1372 , G11B7/13922 , G11B2007/0006 , G11B2007/0013
摘要： A scanning device for optical record carriers is provided with an objective lens (7) suitable for scanning record carriers (1, 21) having a transparent substrate (2, 23) of different thicknesses. The lens comprises an outer annular part (25) and an inner central part (26) within the annular part. Only the central part of the lens is used for forming a focus through a first substrate (2) having a first thickness. The central part is corrected for the spherical aberration of the first substrate. The annular and central part of the lens are used for forming a focus through a second substrate (23) having a different, second thickness. The annular part is corrected for the spherical aberration of the second substrate.
摘要翻译： 用于光学记录载体的扫描装置设置有适于扫描具有不同厚度的透明基板（2,33）的记录载体（1,21）的物镜（7）。 透镜包括环形部分内的外环形部分（25）和内中心部分（26）。 只有透镜的中心部分用于通过具有第一厚度的第一基底（2）形成焦点。 对于第一基板的球面像差校正中心部分。 透镜的环形和中心部分用于通过具有不同的第二厚度的第二衬底（23）形成焦点。 针对第二基板的球面像差校正环形部分。
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