SWITCHES IN BULK SUBSTRATE
    6.
    发明申请

    公开(公告)号:US20220352210A1

    公开(公告)日:2022-11-03

    申请号:US17306078

    申请日:2021-05-03

    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to switches in a bulk substrate and methods of manufacture. The structure includes: at least one active device having a channel region of a first semiconductor material; a single air gap under the channel region of the at least one active device; and a second semiconductor material being coplanar with and laterally bounding at least one side of the single air gap, the second semiconductor material being different material than the first semiconductor material.

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