公开(公告)号：US20240045140A1

公开(公告)日：2024-02-08

申请号：US18378788

申请日：2023-10-11

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Yusheng BIAN ,  Ajey Poovannummoottil JACOB ,  Steven M. SHANK

IPC: G02B6/122 ,  G02B6/125 ,  G02B1/00

CPC classification number: G02B6/1225 ,  G02B6/125 ,  G02B1/002 ,  G02B1/005 ,  G02B2006/12061

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to waveguide structures with metamaterial structures and methods of manufacture. The structure includes: at least one waveguide structure; and metamaterial structures separated from the at least one waveguide structure by an insulator material, the metamaterial structures being structured to decouple the at least one waveguide structure to simultaneously reduce insertion loss and crosstalk of the at least one waveguide structure.

公开(公告)号：US20220406833A1

公开(公告)日：2022-12-22

申请号：US17896401

申请日：2022-08-26

Applicant: GlobalFoundries U.S. Inc.

Inventor： Siva P. ADUSUMILLI ,  Vibhor JAIN ,  Alvin J. JOSEPH ,  Steven M. SHANK

IPC: H01L27/146

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodetectors with buried airgap mirror reflectors. The structure includes a photodetector and at least one airgap in a substrate under the photodetector.

公开(公告)号：US20220352401A1

公开(公告)日：2022-11-03

申请号：US17863922

申请日：2022-07-13

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Rajendran KRISHNASAMY ,  Steven M. SHANK ,  John J. ELLIS-MONAGHAN ,  Ramsey HAZBUN

IPC: H01L31/0352 ,  H01L31/0232 ,  H01L31/18 ,  H01L31/103 ,  H01L31/028

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a photodiode with an integrated, light focusing elements and methods of manufacture. The structure includes: a trench photodiode comprising a domed structure; and a doped material on the domed structure, the doped material having a concave underside surface.

公开(公告)号：US20220208599A1

公开(公告)日：2022-06-30

申请号：US17696348

申请日：2022-03-16

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Uzma RANA ,  Anthony K. STAMPER ,  Steven M. SHANK ,  Brett T. CUCCI

IPC: H01L21/76 ,  H01L27/06 ,  H01L21/762 ,  H01L21/26

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to bulk wafer switch isolation structures and methods of manufacture. The structure includes: a bulk substrate material; an active region on the bulk substrate material; an inactive region adjacent to the active region; and an amorphous material covering the bulk substrate material in the inactive region, which is adjacent to the active region.

公开(公告)号：US20210257454A1

公开(公告)日：2021-08-19

申请号：US16791214

申请日：2020-02-14

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Siva P. ADUSUMILLI ,  Rajendran KRISHNASAMY ,  Steven M. SHANK ,  Vibhor JAIN

IPC: H01L29/08 ,  H01L29/49 ,  H01L29/737 ,  H01L29/66 ,  H01L29/16

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a heterojunction bipolar transistor having one or more sealed airgap and methods of manufacture. The structure includes: a subcollector region in a substrate; a collector region above the substrate; a sealed airgap formed at least partly in the collector region; a base region adjacent to the collector region; and an emitter region adjacent to the base region.

公开(公告)号：US20210217850A1

公开(公告)日：2021-07-15

申请号：US16743584

申请日：2020-01-15

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Anthony K. STAMPER ,  Steven M. SHANK ,  John J. PEKARIK ,  Vibhor JAIN ,  John J. ELLIS-MONAGHAN

IPC: H01L29/16 ,  H01L21/02 ,  H01L27/12 ,  H01L21/762

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a wafer with crystalline silicon and trap rich polysilicon layer and methods of manufacture. The structure includes: semiconductor-on-insulator (SOI) wafer composed of a lower crystalline semiconductor layer, a polysilicon layer over the lower crystalline semiconductor layer, an upper crystalline semiconductor layer over the polysilicon layer, a buried insulator layer over the upper crystalline semiconductor layer, and a top crystalline semiconductor layer over the buried insulator layer.

公开(公告)号：US20230402453A1

公开(公告)日：2023-12-14

申请号：US18231510

申请日：2023-08-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Vibhor JAIN ,  John J. ELLIS-MONAGHAN ,  Anthony K. STAMPER ,  Steven M. SHANK ,  John J. PEKARIK

IPC: H01L27/082 ,  H01L27/06 ,  H01L29/737 ,  H01L29/06

CPC classification number: H01L27/082 ,  H01L27/0647 ,  H01L29/737 ,  H01L29/0646

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich isolation region and methods of manufacture. The structure includes: a first heterojunction bipolar transistor; a second heterojunction bipolar transistor; and a trap rich isolation region embedded within a substrate underneath both the first heterojunction bipolar transistor and the second heterojunction bipolar transistor.

公开(公告)号：US20230299132A1

公开(公告)日：2023-09-21

申请号：US18324637

申请日：2023-05-26

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Vibhor JAIN ,  Anthony K. STAMPER ,  John J. ELLIS-MONAGHAN ,  Steven M. SHANK ,  Rajendran KRISHNASAMY

IPC: H01L29/06 ,  H01L29/08 ,  H01L29/66 ,  H01L29/737 ,  H01L21/763 ,  H01L29/165

CPC classification number: H01L29/0642 ,  H01L29/0826 ,  H01L29/66242 ,  H01L29/7371 ,  H01L21/763 ,  H01L29/165

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich region and methods of manufacture. The structure includes: a trap rich isolation region embedded within the bulk substrate; and a heterojunction bipolar transistor above the trap rich isolation region, with its sub-collector region separated by the trap rich isolation region by a layer of the bulk substrate.

公开(公告)号：US20220399372A1

公开(公告)日：2022-12-15

申请号：US17344391

申请日：2021-06-10

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Anthony K. STAMPER ,  Uzma RANA ,  Siva P. ADUSUMILLI ,  Steven M. SHANK

IPC: H01L27/12 ,  H01L29/45 ,  H01L29/49 ,  H01L21/28 ,  H01L21/285 ,  H01L21/84

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to field effect transistors and methods of manufacture. The structure includes: at least one gate structure comprising source/drain regions; and at least one isolation structure perpendicular to the at least one gate structure and within the source/drain regions.

公开(公告)号：US20220115549A1

公开(公告)日：2022-04-14

申请号：US17065862

申请日：2020-10-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Rajendran KRISHNASAMY ,  Steven M. SHANK ,  John J. ELLIS-MONAGHAN ,  Ramsey HAZBUN

IPC: H01L31/0352 ,  H01L31/0232 ,  H01L31/028 ,  H01L31/103 ,  H01L31/18

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a photodiode with an integrated, light focusing elements and methods of manufacture. The structure includes: a trench photodiode comprising a domed structure; and a doped material on the domed structure, the doped material having a concave underside surface.