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公开(公告)号：US20070028629A1
公开(公告)日：2007-02-08
申请号：US11449397
申请日：2006-06-08
申请人： Gunter Klemm , Marcus Bender , Ulrich Englert , Andreas Kloppel , Uwe Hoffmann , Hans-Georg Lotz , Stefan Hein , Stefan Keller
发明人： Gunter Klemm , Marcus Bender , Ulrich Englert , Andreas Kloppel , Uwe Hoffmann , Hans-Georg Lotz , Stefan Hein , Stefan Keller
IPC分类号： F25C1/00
CPC分类号： H05B3/60 , C23C14/246
摘要： The invention relates to an evaporator arrangement with a crucible, wherein the crucible is divided into at least two zones, each of which is heated to different temperatures. The first zone is a melt-down zone and the second zone the evaporation zone proper. The evaporator arrangement is preferably for the evaporation of metals. If metals are evaporated, a metal wire is preferably guided into the melt-down zone. However, metal alloys can also be evaporated thereby that one or several metal wires comprised of different materials are guided into the melt-down zone. Between the melt-down zone and the evaporator zone a heating zone may be provided.
摘要翻译： 本发明涉及一种具有坩埚的蒸发器装置，其中坩埚被分成至少两个区域，每个区域被加热到不同的温度。 第一区是熔化区，第二区是蒸发区。 蒸发器装置优选用于金属的蒸发。 如果金属蒸发，金属丝优选被引导到熔化区。 然而，也可以蒸发金属合金，从而将由不同材料组成的一根或多根金属丝导入熔化区。 在熔化区和蒸发区之间，可以设置加热区。
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公开(公告)号：US20070022955A1
公开(公告)日：2007-02-01
申请号：US11384016
申请日：2006-03-17
申请人： Marcus Bender , Uwe Hoffmann , Gunter Klemm , Dieter Haas , Ulrich Englert
发明人： Marcus Bender , Uwe Hoffmann , Gunter Klemm , Dieter Haas , Ulrich Englert
IPC分类号： C23C16/00
CPC分类号： C23C14/26 , C23C14/243
摘要： A vapor deposition device for the vapor deposition of a substrate, and specifically particular of a substrate comprising heat-sensitive substances, for example OLEDs. To keep heat away from these substances, the vapor deposition device includes an evaporator tube with a special nozzle bar. This nozzle bar, which comprises several linearly arranged openings, projects with respect to the evaporator tube in the direction toward the substrate to be coated.
摘要翻译： 一种用于气相沉积基底的气相沉积装置，特别是包括热敏物质的基底，例如OLED。 为了将热量远离这些物质，气相沉积装置包括具有特殊喷嘴杆的蒸发器管。 该喷嘴杆包括几个线性排列的开口，相对于蒸发器管沿着待涂覆的基板的方向突出。
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公开(公告)号：US20070022956A1
公开(公告)日：2007-02-01
申请号：US11384174
申请日：2006-03-17
申请人： Marcus Bender , Uwe Hoffmann , Gunter Klemm , Dieter Haas , Ulrich Englert
发明人： Marcus Bender , Uwe Hoffmann , Gunter Klemm , Dieter Haas , Ulrich Englert
IPC分类号： C23C16/00
CPC分类号： C23C14/26 , C23C14/243
摘要： An evaporator device for coating substrates, in particular for applying an aluminum layer of OLEDs. To attain high evaporator tube temperatures, such as are required for example for the vaporization of materials with low vapor pressure, the heating system is placed into the interior of the evaporator tube. The thermal losses are thereby minimized and higher tube temperatures are possible at comparably coupled-in heating power.
摘要翻译： 一种用于涂覆基材的蒸发器装置，特别是用于涂覆OLED层的铝层。 为了获得高蒸发器管温度，例如用于蒸发低蒸汽压的材料所需的温度，加热系统被放置在蒸发器管的内部。 因此，在相当的耦合加热功率下，热损失最小化并且可以实现更高的管温度。
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公开(公告)号：US20070009652A1
公开(公告)日：2007-01-11
申请号：US11406806
申请日：2006-04-19
申请人： Dieter Manz , Marcus Bender , Uwe Hoffmann , Dieter Haas , Ulrich Englert , Heino Lehr , Achim Gurke
发明人： Dieter Manz , Marcus Bender , Uwe Hoffmann , Dieter Haas , Ulrich Englert , Heino Lehr , Achim Gurke
CPC分类号： C23C14/042 , C23C14/20 , C23C14/568
摘要： Aspects of the present invention concern a device and a process for continuous production of substrates provided with organic electroluminescent materials (OLED), especially OLED displays, screens, panels or other lighting elements, in which the device has a vacuum space and a transport device for transporting the substrates to be coated, which is at least partially arranged along the vacuum space and comprises carriers for the substrates, with the transport device comprising at least one endless loop for transport of the carriers and with the vacuum space being divided at least into two with a first part, in which is provided a first section of the transport device for transporting the carriers in a first direction (substrate-transport direction), and with a second part, in which is provided a second section of the transport device for transport of the carriers in a second direction (carrier-return-transport direction). Correspondingly, the masks necessary for structuring the OLED coatings are cleaned advantageously directly during return transport and no mask stockpiling is required.
摘要翻译： 本发明的方面涉及一种用于连续生产具有有机电致发光材料（OLED），特别是OLED显示器，屏幕，面板或其它照明元件的衬底的器件和方法，其中该器件具有真空空间和用于 运送待被涂覆的基底，其至少部分地沿着真空空间布置并且包括用于基底的载体，所述输送装置包括至少一个用于输送载体的无端环，并且真空空间至少分成两部分 具有第一部分，其中设置有用于沿第一方向（基板输送方向）传送载体的输送装置的第一部分，以及第二部分，其中设置有运输装置的第二部分 的载体在第二方向（载体返回传输方向）上。 相应地，用于构造OLED涂层所需的掩模有利地直接在返回传送期间被清洁，并且不需要掩模储存。
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公开(公告)号：US20060130765A1
公开(公告)日：2006-06-22
申请号：US11254425
申请日：2005-10-20
IPC分类号： C23C16/00
摘要： The invention relates to an arrangement for the coating of substrates, which comprises an evaporation source and a vapor barrier between the evaporation source and the substrate. The vapor barrier is maintained at a temperature which is at least equal to or above the vaporization temperature of the material to be vaporized. The vapor barrier is implemented as a quartz valve, which includes a spherical closure part connected with a movable rod. In a first position this spherical closure part closes a vapor conducting tube, which is connected with the evaporation source, and, in a second position, the spherical closure part abuts a spherical calotte which seals off a quartz tube.
摘要翻译： 本发明涉及一种用于涂覆基底的布置，其包括蒸发源和蒸发源与基底之间的蒸汽屏障。 蒸汽屏障保持在至少等于或高于要蒸发的材料的蒸发温度的温度。 蒸汽屏障被实施为石英阀，其包括与可动杆连接的球形封闭部件。 在第一位置，该球形封闭部分封闭与蒸发源连接的蒸气导管，并且在第二位置，球形封闭部分邻接密封石英管的球形电缆。
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公开(公告)号：US08192548B2
公开(公告)日：2012-06-05
申请号：US11254425
申请日：2005-10-20
摘要： The invention relates to an arrangement for the coating of substrates, which comprises an evaporation source and a vapor barrier between the evaporation source and the substrate. The vapor barrier is maintained at a temperature which is at least equal to or above the vaporization temperature of the material to be vaporized. The vapor barrier is implemented as a quartz valve, which includes a spherical closure part connected with a movable rod. In a first position this spherical closure part closes a vapor conducting tube, which is connected with the evaporation source, and, in a second position, the spherical closure part abuts a spherical calotte which seals off a quartz tube.
摘要翻译： 本发明涉及一种用于涂覆基底的布置，其包括蒸发源和蒸发源与基底之间的蒸汽屏障。 蒸汽屏障保持在至少等于或高于要蒸发的材料的蒸发温度的温度。 蒸汽屏障被实施为石英阀，其包括与可动杆连接的球形封闭部件。 在第一位置，该球形封闭部分封闭与蒸发源连接的蒸气导管，并且在第二位置，球形封闭部分邻接密封石英管的球形电缆。
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公开(公告)号：US10818475B2
公开(公告)日：2020-10-27
申请号：US15105894
申请日：2013-12-18
摘要： An AC power connector for connecting an AC power supply with a device is provided. The AC power connector includes at least one first element connectable with the AC power supply and at least one second element connectable with the device, the first element and the second elements being arranged at a first distance with respect to each other for defining a capacitance, wherein the at least one first element and the at least one second element are rotatable with respect to each other, wherein the first element and the second element are configured for a transfer of an AC power between the at least one first element and the at least one second element.
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公开(公告)号：US20110100799A1
公开(公告)日：2011-05-05
申请号：US12612651
申请日：2009-11-04
申请人： Andreas Lopp , Marcus Bender
发明人： Andreas Lopp , Marcus Bender
IPC分类号： C23C14/35
CPC分类号： H01J37/3405 , C23C14/351 , H01J37/347
摘要： A sputter deposition system adapted for depositing a thin film onto a substrate surface is provided. The system includes a cathode assembly having at least two cathode targets opposing the substrate surface and adapted for providing cathode material for forming the thin film. A plasma source is adapted for generating a plasma for sputtering cathode material off the at least two cathode targets. A magnetic field generator is adapted for providing a magnetic field which is controllable independently of the plasma source such that such that a difference between high deposition rate portions and low deposition rate portions is compensated by the action of the magnetic field on charged particle movements.
摘要翻译： 提供了一种适用于将薄膜沉积到衬底表面上的溅射沉积系统。 该系统包括阴极组件，其具有与衬底表面相对的至少两个阴极靶，并适于提供用于形成薄膜的阴极材料。 等离子体源适于产生用于将阴极材料溅射出至少两个阴极靶的等离子体。 磁场发生器适于提供可独立于等离子体源控制的磁场，使得通过磁场对带电粒子运动的作用来补偿高沉积速率部分和低沉积速率部分之间的差异。
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公开(公告)号：US20070298159A1
公开(公告)日：2007-12-27
申请号：US11757061
申请日：2007-06-01
申请人： Marcus Bender , Guido Hattendorf
发明人： Marcus Bender , Guido Hattendorf
IPC分类号： C23C16/52
CPC分类号： C23C14/544 , C23C14/12 , C23C14/243
摘要： An organic evaporator for applying organic vapor to a substrate at a coating rate, the organic evaporator comprising a distribution pipe with at least one nozzle outlet; and a measurement device for acquiring measurement data about at least one characteristic property of the organic vapor.
摘要翻译： 一种有机蒸发器，用于以涂覆速率将有机蒸气施加到基底上，所述有机蒸发器包括具有至少一个喷嘴出口的分配管; 以及用于获取关于有机蒸气的至少一种特性的测量数据的测量装置。
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公开(公告)号：US06905776B1
公开(公告)日：2005-06-14
申请号：US09686417
申请日：2000-10-11
CPC分类号： C03C17/3618 , C03C17/36 , C03C17/3671 , Y10T428/31678
摘要： On a glass substrate, a base layer of indium cerium oxide is deposited, and on this a thin copper-containing silver layer, both produced by means of DC sputtering. On top there is another indium cerium oxide layer, which is produced by means of AC-superimposed DC sputter deposition. This layer system boasts very low surface resistivity combined with high transparency in the visible part of the spectrum, which means it has a high Haacke quality factor.
摘要翻译： 在玻璃基板上沉积氧化铟镓的基底层，并在其上形成薄的含铜银层，均由DC溅射制成。 在顶部还有另一个氧化铟铈层，它通过AC叠加的DC溅射沉积法生产。 该层系统具有非常低的表面电阻率，并且在可见光谱部分具有高透明度，这意味着它具有较高的Haacke品质因数。
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