Laser diode with vertical resonator and method for fabricating the diode
    2.
    发明授权
    Laser diode with vertical resonator and method for fabricating the diode 失效
    具有垂直谐振器的激光二极管和制造二极管的方法

    公开(公告)号:US07075961B2

    公开(公告)日:2006-07-11

    申请号:US10653794

    申请日:2003-09-03

    IPC分类号: H01S5/00

    摘要: The invention relates to a laser diode including a vertical resonator and to a method for producing the laser diode such that at least one active layer is configured between reflective layers. The invention is characterized by configuring at least one antioxidation layer between the reflective layers, thus preventing distortion caused by unintentional oxidation. The antioxidation layer consists of a III–V semiconductor material with a proportion of a molar aluminum of less than 0.7 and/or a III–V semiconductor material with an optical depth of at least two quarter waves.

    摘要翻译: 本发明涉及一种包括垂直谐振器的激光二极管和用于制造激光二极管的方法,使得至少一个有源层配置在反射层之间。 本发明的特征在于在反射层之间配置至少一个抗氧化层,从而防止由无意氧化引起的变形。 抗氧化层由具有小于0.7的摩尔铝的III-V族半导体材料和/或具有至少两个四分之一波长的光学深度的III-V半导体材料组成。

    VCSEL with monolithically integrated photodetector
    3.
    发明授权
    VCSEL with monolithically integrated photodetector 有权
    VCSEL具有单片集成光电检测器

    公开(公告)号:US06717972B2

    公开(公告)日:2004-04-06

    申请号:US10211102

    申请日:2002-08-02

    IPC分类号: H01S500

    摘要: A VCSEL has an active layer, a photodetector in one of the DBR gratings and with a radiation-absorbing layer that is arranged in an antinode of a laser mode. The laser and the photodetector are electrically driven by a common contact on a thick, heavily doped spacer layer that ensures low laser impedance and little electrical crosstalk between the laser and the photodetector.

    摘要翻译: VCSEL具有有源层,其中一个DBR光栅中的光电检测器和布置在激光模式的波腹中的辐射吸收层。 激光器和光电检测器由厚的重掺杂间隔层上的公共接触电驱动,确保激光器和光电检测器之间的低激光阻抗和很小的电串扰。