REAL-TIME MONITORING OF FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS
    1.
    发明申请
    REAL-TIME MONITORING OF FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS 审中-公开
    整体计算元素制造的实时监控

    公开(公告)号:US20160223712A1

    公开(公告)日:2016-08-04

    申请号:US14397719

    申请日:2013-12-24

    Abstract: Techniques include receiving a design of an integrated computational element (ICE) including specification of a substrate and a plurality of layers, their respective target thicknesses and complex refractive indices, complex refractive indices of adjacent layers being different from each other, and a notional ICE fabricated in accordance with the ICE design being related to a characteristic of a sample; forming at least some of the layers of a plurality of ICEs in accordance with the ICE design using a deposition source, where the layers of the ICEs being formed are supported on a support that is periodically moved relative to the deposition source during the forming; monitoring characteristics of the layers of the ICEs during the forming, the monitoring of the characteristics being performed using a timing of the periodic motion of the support relative to the deposition source; and adjusting the forming based on results of the monitoring.

    Abstract translation: 技术包括接收包括衬底和多个层的规格,它们各自的目标厚度和复折射率,相邻层的复折射率彼此不同的综合计算元件(ICE)的设计,以及名义上的ICE制造 根据ICE设计与样品的特性有关; 根据使用沉积源的ICE设计形成多个ICE的至少一些层,其中形成的IC的层被支撑在在成形期间相对于沉积源周期性移动的支撑件上; 在形成期间监测ICE层的特性,使用支撑体相对于沉积源的周期性运动的定时来监测正在执行的特性; 并根据监测结果调整成型。

    DEPOSITING COATINGS ON AND WITHIN HOUSINGS, APPARATUS, OR TOOLS UTILIZING PRESSURIZED CELLS

    公开(公告)号:US20220064793A1

    公开(公告)日:2022-03-03

    申请号:US17004724

    申请日:2020-08-27

    Abstract: A coating system for coating, with a surface coating process, an interior surface of a housing defining an interior volume, having: a first closure and a second closure to sealingly engage with the housing; one or more first flow lines and second flow lines fluidically coupled to the first and second closure, respectively; a pressurized cell comprising a pressurized gas comprising at least one reactant and at a pressure of greater than a pressure within the housing, wherein the pressurized cell is fluidically coupled to a pressurized cell line comprising one of the first flow lines or second flow lines; and a controller in electronic communication with the pressurized cell and configured to control injection of a pulse of the pressurized gas into a flow of inert gas in the pressurized cell line, whereby the pulse is introduced into the interior volume, coating the interior surface with a coating layer.

    INTEGRATED COMPUTATIONAL ELEMENTS INCORPORATING A STRESS RELIEF LAYER

    公开(公告)号:US20180171781A1

    公开(公告)日:2018-06-21

    申请号:US15735541

    申请日:2015-07-30

    Abstract: An optical computing device includes an electromagnetic radiation source that emits electromagnetic radiation to optically interact with a substance and an integrated computational element (ICE) core. The ICE core includes a substrate, and a first plurality of thin films alternatingly deposited on the substrate with a second plurality of thin films via a thin film deposition process, wherein the first plurality of thin films is made of a high refractive index material and the second plurality of thin films is made of low refractive index material. A stress relief layer is deposited on the substrate via the thin film deposition process and interposes the substrate and a first layer of the first plurality of thin films. A detector is positioned to receive modified electromagnetic radiation that has optically interacted with the substance and the ICE core and generate an output signal indicative of the characteristic of the substance.

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