公开(公告)号：US20140111085A1

公开(公告)日：2014-04-24

申请号：US14136236

申请日：2013-12-20

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hiroyuki KYUSHIMA ,  Hideki SHIMOI ,  Akihiro KAGEYAMA ,  Keisuke INOUE ,  Masuo ITO

IPC: H01J43/04

CPC classification number: H01J43/08 ,  H01J9/26 ,  H01J43/04 ,  H01J43/24

Abstract: The present invention relates to a photomultiplier having a structure for making it possible to easily realize high detection accuracy and fine processing, and a method of manufacturing the same. The photomultiplier comprises an enclosure having an inside kept in a vacuum state, whereas a photocathode emitting electrons in response to incident light, an electron multiplier section multiplying in a cascading manner the electron emitted from the photocathode, and an anode for taking out a secondary electron generated in the electron multiplier section are arranged in the enclosure. A part of the enclosure is constructed by a glass substrate having a flat part, whereas each of the electron multiplier section and anode is two-dimensionally arranged on the flat part in the glass substrate.

Abstract translation: 本发明涉及具有能够容易地实现高检测精度和精细处理的结构的光电倍增管及其制造方法。 光电倍增管包括具有内部保持在真空状态的外壳，而响应于入射光发射电子的光电阴极，电子倍增器部分以级联方式从光电阴极发射的电子和用于取出二次电子的阳极 在电子倍增器部分中产生的电极被布置在外壳中。 外壳的一部分由具有平坦部分的玻璃基板构成，而电子倍增器部分和阳极中的每一个二维地布置在玻璃基板的平坦部分上。

公开(公告)号：US20230290605A1

公开(公告)日：2023-09-14

申请号：US18020989

申请日：2021-06-09

Applicant: HAMAMATSU PHOTONICS K.K. ,  NuFlare Technology, Inc.

Inventor： Tomohiko HIRANO ,  Hiroyuki TAKETOMI ,  Motohiro SUYAMA ,  Wataru MATSUDAIRA ,  Akihiro KAGEYAMA ,  Kota IWASAKI ,  Taku YAMADA

IPC: H01J37/06 ,  H01J37/10

CPC classification number: H01J37/06 ,  H01J37/10 ,  H01J2237/026

Abstract: A photoelectric surface electron source includes a glass substrate configured to receive laser light incident from a substrate back surface to emit the laser light from a substrate main surface, a photoelectric surface provided on the substrate main surface and configured to receive the laser light and emit a photoelectron, a lens array disposed on the substrate back surface and including a plurality of microlenses for condensing the laser light toward the photoelectric surface, and a light shielding portion provided on the glass substrate. The light shielding portion has a back surface-side light shielding layer provided on a back surface-side light shielding surface interposed between the plurality of microlenses on the substrate back surface, and a main surface-side light shielding layer provided on a main surface-side light shielding surface.

公开(公告)号：US20230343541A1

公开(公告)日：2023-10-26

申请号：US18021457

申请日：2021-06-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomohiko HIRANO ,  Hiroyuki TAKETOMI ,  Motohiro SUYAMA ,  Wataru MATSUDAIRA ,  Akihiro KAGEYAMA ,  Kota IWASAKI ,  Taku YAMADA

IPC: H01J1/34 ,  H01J1/88

CPC classification number: H01J1/34 ,  H01J1/88

Abstract: A photoelectric-surface electron source includes: a glass substrate that receives laser light from a substrate light-receiving surface including microlenses and that focuses the laser light toward a substrate main surface located on the opposite side from the substrate light-receiving surface; a photoelectric surface that is provided to the substrate main surface, and that receives the focused laser light and emits photoelectrons; and an extraction electrode that is fixed to the substrate main surface and that extracts the photoelectrons from the photoelectric surface. The extraction electrode is disposed away from the photoelectric surface along the normal direction of the substrate main surface and has: an electrode part in which electrode holes for allowing the photoelectrons to pass therethrough are provided; and a frame part that is fixed to a region surrounding the photoelectric surface in the substrate main surface.

公开(公告)号：US20150371835A1

公开(公告)日：2015-12-24

申请号：US14841886

申请日：2015-09-01

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hiroyuki KYUSHIMA ,  Hideki SHIMOI ,  Akihiro KAGEYAMA ,  Keisuke INOUE ,  Masuo ITO

IPC: H01J43/08 ,  H01J9/26

CPC classification number: H01J43/08 ,  H01J9/26 ,  H01J43/04 ,  H01J43/24

Abstract: The present invention relates to a photomultiplier having a structure for making it possible to easily realize high detection accuracy and fine processing, and a method of manufacturing the same. The photomultiplier comprises an enclosure having an inside kept in a vacuum state, whereas a photocathode emitting electrons in response to incident light, an electron multiplier section multiplying in a cascading manner the electron emitted from the photocathode, and an anode for taking out a secondary electron generated in the electron multiplier section are arranged in the enclosure. A part of the enclosure is constructed by a glass substrate having a flat part, whereas each of the electron multiplier section and anode is two-dimensionally arranged on the flat part in the glass substrate.

Abstract translation: 本发明涉及具有能够容易地实现高检测精度和精细处理的结构的光电倍增管及其制造方法。 光电倍增管包括具有内部保持在真空状态的外壳，而响应于入射光发射电子的光电阴极，电子倍增器部分以级联方式从光电阴极发射的电子和用于取出二次电子的阳极 在电子倍增器部分中产生的电极被布置在外壳中。 外壳的一部分由具有平坦部分的玻璃基板构成，而电子倍增器部分和阳极中的每一个二维地布置在玻璃基板的平坦部分上。