公开(公告)号：US11929378B2

公开(公告)日：2024-03-12

申请号：US18120594

申请日：2023-03-13

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Nao Inoue ,  Ryosuke Koike ,  Haruyuki Nakayama

IPC: H01L27/146 ,  H01L23/00

CPC classification number: H01L27/14623 ,  H01L27/14618 ,  H01L27/14634 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14643 ,  H01L24/13 ,  H01L24/16 ,  H01L24/32 ,  H01L24/73 ,  H01L2224/13109 ,  H01L2224/16145 ,  H01L2224/2919 ,  H01L2224/32145 ,  H01L2224/73204 ,  H01L2224/13109 ,  H01L2924/00014 ,  H01L2224/73204 ,  H01L2224/16145 ,  H01L2224/32145 ,  H01L2924/00012

Abstract: A light detection device includes: a back-illuminated light receiving element; a circuit element; a connection member; an underfill; and a light shielding mask. The light shielding mask includes a frame having an opening and a light shielding layer formed on an inner surface of the opening. A first opening edge on the side of the circuit element in the opening is located at the outside of an outer edge of the light receiving element. A second opening edge opposite to the circuit element in the opening is located at the inside of the outer edge of the light receiving element. The opening is narrowed from the first opening edge toward the second opening edge. A width of the frame increases from the first opening edge toward the second opening edge. The underfill reaches a gap between the light receiving element and the light shielding layer.

公开(公告)号：US20240178249A1

公开(公告)日：2024-05-30

申请号：US18432122

申请日：2024-02-05

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Nao INOUE ,  Ryosuke Koike ,  Haruyuki Nakayama

IPC: H01L27/146 ,  H01L23/00

CPC classification number: H01L27/14623 ,  H01L27/14618 ,  H01L27/14634 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14643 ,  H01L24/13 ,  H01L24/16 ,  H01L24/32 ,  H01L24/73 ,  H01L2224/13109 ,  H01L2224/16145 ,  H01L2224/2919 ,  H01L2224/32145 ,  H01L2224/73204

Abstract: A light detection device includes: a back-illuminated light receiving element; a circuit element; a connection member; an underfill; and a light shielding mask. The light shielding mask includes a frame having an opening and a light shielding layer formed on an inner surface of the opening. A first opening edge on the side of the circuit element in the opening is located at the outside of an outer edge of the light receiving element. A second opening edge opposite to the circuit element in the opening is located at the inside of the outer edge of the light receiving element. The opening is narrowed from the first opening edge toward the second opening edge. A width of the frame increases from the first opening edge toward the second opening edge. The underfill reaches a gap between the light receiving element and the light shielding layer.

公开(公告)号：US11519785B2

公开(公告)日：2022-12-06

申请号：US16636539

申请日：2018-07-24

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro Yamazaki ,  Katsumi Shibayama ,  Ryusuke Kitaura ,  Ryosuke Koike ,  Go Tanaka

IPC: G01J5/20 ,  G01J1/02 ,  G01J5/02 ,  G01J5/04 ,  H01L27/144 ,  H01L31/0232 ,  H01L31/0248 ,  H01L31/09

Abstract: A light detector includes a substrate, a membrane disposed on a surface of the substrate, a first and a second electrode post supporting the membrane. The first electrode post includes a first main body portion having a tubular shape spreading from a first electrode pad toward a side opposite to the substrate, and a first flange portion provided in an end portion at the side opposite to the substrate in the first main body portion. The first flange portion is provided with a first sloped surface inclined so as to approach the substrate as it goes away from the first main body portion. A first wiring layer reaches an inner surface of the first main body portion through the first sloped surface. The second electrode post and the second wiring layer are formed similarly to the first electrode post and the first wiring layer.

公开(公告)号：US11101310B2

公开(公告)日：2021-08-24

申请号：US16827866

申请日：2020-03-24

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Nao Inoue ,  Ryosuke Koike ,  Haruyuki Nakayama

IPC: H01L27/146 ,  H01L23/00

Abstract: A light detection device includes: a back-illuminated light receiving element; a circuit element; a connection member; an underfill; and a light shielding mask. The light shielding mask includes a frame having an opening and a light shielding layer formed on an inner surface of the opening. A first opening edge on the side of the circuit element in the opening is located at the outside of an outer edge of the light receiving element. A second opening edge opposite to the circuit element in the opening is located at the inside of the outer edge of the light receiving element. The opening is narrowed from the first opening edge toward the second opening edge. A width of the frame increases from the first opening edge toward the second opening edge. The underfill reaches a gap between the light receiving element and the light shielding layer.

公开(公告)号：US11652120B2

公开(公告)日：2023-05-16

申请号：US17375176

申请日：2021-07-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Nao Inoue ,  Ryosuke Koike ,  Haruyuki Nakayama

IPC: H01L27/146 ,  H01L23/00

CPC classification number: H01L27/14623 ,  H01L27/1464 ,  H01L27/14618 ,  H01L27/14634 ,  H01L27/14636 ,  H01L27/14643 ,  H01L24/13 ,  H01L24/16 ,  H01L24/32 ,  H01L24/73 ,  H01L2224/13109 ,  H01L2224/16145 ,  H01L2224/2919 ,  H01L2224/32145 ,  H01L2224/73204 ,  H01L2224/13109 ,  H01L2924/00014 ,  H01L2224/73204 ,  H01L2224/16145 ,  H01L2224/32145 ,  H01L2924/00012

Abstract: A light detection device includes: a back-illuminated light receiving element; a circuit element; a connection member; an underfill; and a light shielding mask. The light shielding mask includes a frame having an opening and a light shielding layer formed on an inner surface of the opening. A first opening edge on the side of the circuit element in the opening is located at the outside of an outer edge of the light receiving element. A second opening edge opposite to the circuit element in the opening is located at the inside of the outer edge of the light receiving element. The opening is narrowed from the first opening edge toward the second opening edge. A width of the frame increases from the first opening edge toward the second opening edge. The underfill reaches a gap between the light receiving element and the light shielding layer.

公开(公告)号：US10672814B2

公开(公告)日：2020-06-02

申请号：US16152494

申请日：2018-10-05

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Nao Inoue ,  Ryosuke Koike ,  Haruyuki Nakayama

IPC: H01L31/0203 ,  H01L27/146 ,  H01L23/00

Abstract: A light detection device includes: a back-illuminated light receiving element; a circuit element; a connection member; an underfill; and a light shielding mask. The light shielding mask includes a frame having an opening and a light shielding layer formed on an inner surface of the opening. A first opening edge on the side of the circuit element in the opening is located at the outside of an outer edge of the light receiving element. A second opening edge opposite to the circuit element in the opening is located at the inside of the outer edge of the light receiving element. The opening is narrowed from the first opening edge toward the second opening edge. A width of the frame increases from the first opening edge toward the second opening edge. The underfill reaches a gap between the light receiving element and the light shielding layer.