公开(公告)号：US20230143711A1

公开(公告)日：2023-05-11

申请号：US17914836

申请日：2021-03-25

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Atsushi SUGIYAMA ,  Yuji KANEKO ,  Yasufumi TAKAGI

IPC: H01S5/34 ,  H01S5/227 ,  H01S5/0234

CPC classification number: H01S5/3401 ,  H01S5/2275 ,  H01S5/0234

Abstract: A method for manufacturing a quantum cascade laser element includes: a step of forming a semiconductor layer on a first major surface of a semiconductor wafer; a step of removing a part of the semiconductor layer by etching such that each of portions of the semiconductor layer includes a ridge portion; a step of forming an insulating layer such that at least a part of a surface of the ridge portion is exposed; a step of embedding the ridge portion in each of metal plating layers; a step of flattening a surface of the metal plating layers by polishing in a state where a protective member is disposed; a step of forming an electrode layer on a second major surface of the semiconductor wafer; and a step of cleaving the semiconductor wafer and the semiconductor layer in a state where the protective member is removed.

公开(公告)号：US20180301591A1

公开(公告)日：2018-10-18

申请号：US15903200

申请日：2018-02-23

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masamichi YAMANISHI ,  Akira HIGUCHI ,  Toru HIROHATA ,  Kazunori TANAKA ,  Kazuue FUJITA ,  Yasufumi TAKAGI ,  Yuta AOKI ,  Satoru OKAWARA

IPC: H01L33/00 ,  H05B33/08 ,  H01L33/38 ,  H01L33/20 ,  H01L33/06 ,  H01L33/30 ,  H01L33/46 ,  H01L33/32

Abstract: An optical semiconductor element includes: an optical waveguide body; a first electrode that is disposed on a second clad layer; a second electrode that is disposed on the second clad layer on one side of the first electrode in a light guiding direction of the optical waveguide body; a third electrode that is disposed on the second clad layer on the other side of the first electrode in the light guiding direction; and at least one fourth electrode that faces the first electrode, the second electrode, and the third electrode with the optical waveguide body interposed therebetween. The optical waveguide body includes a first separation region that electrically separates a first region under the first electrode from a second region under the second electrode and a second separation region that electrically separates the first region under the first electrode and a third region under the third electrode.