公开(公告)号：US20200328101A1

公开(公告)日：2020-10-15

申请号：US16911669

申请日：2020-06-25

申请人： Hitachi, Ltd.

发明人： Takeshi OHMORI ,  Junichi TANAKA ,  Hikaru KOYAMA ,  Masaru KURIHARA

IPC分类号： H01L21/67 ,  G06F16/903 ,  H01L21/66 ,  G01D1/00 ,  G06N5/04

摘要： A search apparatus receives each input of a target value and a reference value indicated by the target value; generates a prediction model indicating a relation between the condition and the result based on a setting value of the condition inside the search area and a measured value of the result; acquires a prediction value from the prediction model by assigning the target value to the prediction model and specifies a presence area of the prediction value from the search area; determines whether the prediction value is closer to the target value than the reference value; sets the measured value of the result corresponding to the prediction value to the reference value when the prediction value is closer to the target value, and sets the prediction value presence area to the search area; and outputs a prediction value satisfying an achievement condition when the prediction value satisfies the achievement condition.

公开(公告)号：US20180082873A1

公开(公告)日：2018-03-22

申请号：US15658844

申请日：2017-07-25

申请人： Hitachi, Ltd.

发明人： Takeshi OHMORI ,  Junichi TANAKA ,  Hikaru KOYAMA ,  Masaru KURIHARA

IPC分类号： H01L21/67 ,  G06F17/30 ,  G06N5/04 ,  G01D1/00

摘要： A search apparatus receives an input target value, which indicates a condition to be set in a semiconductor processing apparatus or a result obtained by processing the semiconductor using the processing apparatus, a reference value of the condition inside a search area, and the result, wherein the reference value is indicated by the target value. A prediction model indicating a relation between the condition and the result based on a setting value of the condition inside the search area is generated and, a measured value of the result is obtained. A prediction value is acquired by assigning the target value to the prediction model. The prediction value is set to the reference value when it is determined that the prediction value is closer to the target value, and a prediction value satisfying an achievement condition is set when the prediction value satisfies the achievement condition of the target value.

公开(公告)号：US20170213695A1

公开(公告)日：2017-07-27

申请号：US15329638

申请日：2014-07-28

申请人： HITACHI, LTD.

发明人： Daisuke BIZEN ,  Makoto SAKAKIBARA ,  Hiroya OHTA ,  Junichi TANAKA

IPC分类号： H01J37/244 ,  H01J37/26 ,  H01J37/24

CPC分类号： H01J37/244 ,  H01J37/222 ,  H01J37/24 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/226

摘要： A simulation device calculates a detection number of electrons generated by charged particles radiated to a sample by a simulation and generates a simulation image of the sample. The simulation device holds penetration length information (272) in which incidence conditions of the charged particles and a penetration length are associated with each other, sample configuration information (271) which shows a configuration of a sample, and emission electron number information in which the incidence conditions of the charged particles and an emission electron number are associated with each other. The simulation device calculates the number of electrons emitted from a predetermined incidence point, on the basis of incidence conditions at the predetermined incidence point, the penetration length information (272), the sample configuration information (271), and the emission electron number information.