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    SCINTILLATOR FOR CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTICLE BEAM APPARATUS
    1.
    发明申请
    SCINTILLATOR FOR CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTICLE BEAM APPARATUS 有权

    公开(公告)号：US20220244412A1

    公开(公告)日：2022-08-04

    申请号：US17617277

    申请日：2019-07-10

    Applicant: Hitachi High-Tech Corporation

    Inventor： Eri TAKAHASHI ,  Shin IMAMURA ,  Makoto SUZUKI ,  Shunsuke MIZUTANI

    IPC: G01T1/202 ,  H01J49/02 ,  H01J37/244

    Abstract: The purpose of the present invention is to provide a scintillator for a charged particle beam device and a charged particle beam device which achieve both an increase in emission intensity and a reduction in afterglow intensity. This scintillator for a charged particle beam device is characterized by comprising a substrate (13), a buffer layer (14) formed on a surface of the substrate (13), a stack (12) of a light emitting layer (15) and a barrier layer (16) formed on a surface of the buffer layer (14), and a conductive layer (17) formed on a surface of the stack (12) and by being configured such that the light emitting layer (15) contains InGaN, the barrier layer (16) contains GaN, and the ratio b/a of the thickness b of the barrier layer (16) to the thickness a of the light emitting layer (15) is 11 to 25.

    CHARGED PARTICLE DETECTOR, CHARGED PARTICLE RAY DEVICE, RADIATION DETECTOR, AND RADIATION DETECTION DEVICE
    3.
    发明申请
    CHARGED PARTICLE DETECTOR, CHARGED PARTICLE RAY DEVICE, RADIATION DETECTOR, AND RADIATION DETECTION DEVICE 有权

    公开(公告)号：US20230050424A1

    公开(公告)日：2023-02-16

    申请号：US17791933

    申请日：2020-03-02

    Applicant: Hitachi High-Tech Corporation

    Inventor： Takumu IWANAKA ,  Yoshifumi SEKIGUCHI ,  Toshiaki KUSUNOKI ,  Shin IMAMURA ,  Hajime KAWANO

    IPC: G01N23/2251 ,  G01T1/20

    Abstract: Provided are a charged particle detector and a radiation detector capable of obtaining an observation image with correct contrast without saturation even when the number of signal electrons incident on a detector is increased due to an increase in the current of a primary electron beam. The charged particle detector is characterized by having a scintillator (109) having a signal electron detection surface (109a) for detecting signal electrons emitted when a specimen is irradiated with primary electrons and converting the signal electrons into light, a light detector (111) having a light detection surface (111a) for detecting the light emitted from the scintillator (109), and a light guide (110) disposed between the scintillator (109) and the light detector (111), wherein the area of the light detection surface (111a) is larger than the area of the signal electron detection surface (109a).

    CHARGED PARTICLE BEAM APPARATUS
    4.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS 有权

    公开(公告)号：US20230030651A1

    公开(公告)日：2023-02-02

    申请号：US17962915

    申请日：2022-10-10

    Applicant: HITACHI HIGH-TECH CORPORATION

    Inventor： Yoshifumi SEKIGUCHI ,  Shin IMAMURA ,  Shunsuke MIZUTANI ,  Shahedul HOQUE ,  Uki IKEDA

    IPC: H01J37/244 ,  G01N23/2251 ,  G02B6/42

    Abstract: A charged particle beam apparatus using a light guide that improves light utilization efficiency includes a detector including a scintillator for emitting light when a charged particle is incident, a light receiving element, and a light guide for guiding the light from the scintillator to the light receiving element. The light guide includes: an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident; an emitting surface that is configured to emit light; and a reflecting surface that is inclined with respect to the incident surface so that the light from the incident surface is reflected toward the emitting surface. The emitting surface is smaller than the incident surface. A slope surface is provided between the incident surface and the emitting surface, faces the reflecting surface, and is inclined with respect to the incident surface.

    CHARGED PARTICLE BEAM APPARATUS
    5.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS 有权

    公开(公告)号：US20210183614A1

    公开(公告)日：2021-06-17

    申请号：US17269424

    申请日：2018-09-21

    Applicant: HITACHI HIGH-TECH CORPORATION

    Inventor： Yoshifumi SEKIGUCHI ,  Shin IMAMURA ,  Shunsuke MIZUTANI ,  Shahedul HOQUE ,  Uki IKEDA

    IPC: H01J37/244 ,  G02B6/42 ,  G01N23/2251

    Abstract: A charged particle beam apparatus using a light guide that improves light utilization efficiency includes a detector including a scintillator for emitting light when a charged particle is incident, a light receiving element, and a light guide for guiding the light from the scintillator to the light receiving element. The light guide includes: an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident; an emitting surface that is configured to emit light; and a reflecting surface that is inclined with respect to the incident surface so that the light from the incident surface is reflected toward the emitting surface. The emitting surface is smaller than the incident surface. A slope surface is provided between the incident surface and the emitting surface, faces the reflecting surface, and is inclined with respect to the incident surface.

    DEVICE FOR DETECTING CHARGED PARTICLES OR RADIATION
    6.
    发明公开
    DEVICE FOR DETECTING CHARGED PARTICLES OR RADIATION 审中-公开

    公开(公告)号：US20230266485A1

    公开(公告)日：2023-08-24

    申请号：US17926951

    申请日：2020-06-17

    Applicant: Hitachi High-Tech Corporation

    Inventor： Laila Ambar SARI ,  Shin IMAMURA ,  Takumu IWANAKA ,  Yoshifumi SEKIGUCHI

    IPC: G01T1/20

    CPC classification number: G01T1/2018 ,  G01T1/2002

    Abstract: A charged-particle detecting device 108, 108a, 108b, 108c, 108d, 108e, 108f, 108g or a radiation detecting device 203 detects charged particles or radiation as a detection target. These detection devices are each provided with: a scintillator 109 provided with a fluorescent layer 109a that converts the detection target into light 112; a light detector 111, 111b that detects the light 112 emitted from the scintillator 109; a light guide 110, 117 provided between the scintillator 109 and the light detector 111, 111b; and a blocking part 113, 114 that blocks a portion of the detection target incident on the scintillator 109 or the light emitted from the scintillator 109.

    Ion Detector
    8.
    发明申请
    Ion Detector 有权

    公开(公告)号：US20220181138A1

    公开(公告)日：2022-06-09

    申请号：US17433133

    申请日：2020-01-22

    Applicant: Hitachi High-Tech Corporation

    Inventor： Kiyomi YOSHINARI ,  Masuyuki SUGIYAMA ,  Yuichiro HASHIMOTO ,  Shin IMAMURA

    IPC: H01J49/42 ,  G01T1/20 ,  G01T1/28

    Abstract: The present invention implements an ion detector with which it is possible to avoid direct collisions of negative ions with a scintillator, prevent degradation of the scintillator, prolong life of the scintillator, reduce the need for maintenance, and perform highly sensitive detection of both positive and negative ions. With respect to a reference line 65 connecting a central point 63 of a positive ion CD 52 and a central point 64 of a counter electrode 54, a central point 66 of a negative ion CD 53 is provided in a region of a side opposite to a region of a side of a central point 67 of a scintillator 56. Positive ions entering from an ion entrance 62 receive a deflection force and collide with the positive ion CD 52 to generate secondary electrons. The generated secondary electrons collide with the scintillator 56 to generate light. The generated light passes through a light guide 59 and is detected by a photomultiplier tube 58. A negative potential barrier is generated along the reference line 65. Negative ions entering form the ion entrance 62 are attracted to and collide with the negative ion CD 53 to generate positive ions. The generated positive ions collide with the positive ion CD 52 to generate secondary electrons. The generated secondary electrons collide with the scintillator 56 and are detected by the photomultiplier tube 58.

    SCINTILLATOR, MEASURING DEVICE, MASS SPECTROMETER, AND ELECTRON MICROSCOPE
    10.
    发明申请
    SCINTILLATOR, MEASURING DEVICE, MASS SPECTROMETER, AND ELECTRON MICROSCOPE 有权

    公开(公告)号：US20220413169A1

    公开(公告)日：2022-12-29

    申请号：US17787617

    申请日：2020-11-19

    Applicant: HITACHI HIGH-TECH CORPORATION

    Inventor： Shin IMAMURA ,  Toshiaki KUSUNOKI ,  Eri TAKAHASHI ,  Yoshifumi SEKIGUCHI ,  Takayuki KANDA

    IPC: G01T1/20 ,  H01J49/02

    Abstract: Provided are a scintillator and the like capable of improving emission intensity. A scintillator (S) comprises a sapphire substrate (6), a GaN layer (4) that is provided on the incident side to the sapphire substrate (6) and includes GaN, a quantum well structure (3) provided on the incident side to the GaN layer (4), and a conductive layer (2) provided on the incident side to the quantum well structure (3), wherein a plurality of emitting layers (21) including InGaN and a plurality of barrier layers (22) including GaN are alternatively stacked in the quantum well structure (3), and an oxygen-containing layer (23) including oxygen is provided between the quantum well structure (3) and the conductive layer (2).

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