公开(公告)号：US20210020422A1

公开(公告)日：2021-01-21

申请号：US16306911

申请日：2016-06-23

申请人： Hitachi High-Technologies Corporation

发明人： Mitsuhiro NAKAMURA ,  Hironori ITABASHI ,  Hirofumi SATOU ,  Tsutomu SAITO ,  Masahiro SASAJIMA ,  Natsuki TSUNO ,  Yohei NAKAMURA

IPC分类号： H01J49/08 ,  H01J37/147 ,  H01J49/10 ,  H01J3/36 ,  H01J3/26

摘要： In order to provide a charged particle beam apparatus capable of stably detecting secondary particles and electromagnetic waves even for a non-conductive sample under high vacuum environment and enabling excellent observation and analysis, the charged particle beam apparatus includes a charged particle gun (12), scanning deflectors (17 and 18) configured to scan a charged particle beam (20) emitted from the charged particle gun (12) onto a sample (21), detectors (40 and 41) configured to detect a scanning control voltage input from an outside into the scanning deflectors, an arithmetic unit (42) configured to calculate, based on the detected scanning control voltage, irradiation pixel coordinates for the charged particle beam; and an irradiation controller (45) configured to control irradiation of the sample with the charged particle beam according to the irradiation pixel coordinates.

公开(公告)号：US20160086766A1

公开(公告)日：2016-03-24

申请号：US14787118

申请日：2014-04-23

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Yoshihiro TAKAHOKO ,  Daisuke KOBAYASHI ,  Masashi KIMURA ,  Masahiro SASAJIMA

IPC分类号： H01J37/18 ,  H01J37/21 ,  H01J37/22

CPC分类号： H01J37/18 ,  H01J37/21 ,  H01J37/22 ,  H01J2237/1825 ,  H01J2237/26 ,  H01J2237/30

摘要： An evacuation structure of a charged particle beam device includes: a vacuum chamber provided with a charged particle source; vacuum piping connected to the vacuum chamber; a main vacuum pump which is connected via the vacuum piping and evacuates the inside of the vacuum chamber; a non-evaporable getter pump disposed at a position between the vacuum chamber and the main vacuum pump in the vacuum piping; and a coarse evacuation port connected at a position between the vacuum chamber and the non-evaporable getter pump in the vacuum piping The coarse evacuation port includes: a coarse evacuation valve that opens and closes the coarse evacuation port; and a leak valve to open the vacuum chamber to the atmosphere.

摘要翻译： 带电粒子束装置的抽空结构包括：设有带电粒子源的真空室; 真空管连接到真空室; 主真空泵，通过真空管道连接并抽真空室; 设置在真空管内真空室和主真空泵之间的非蒸发性吸气泵; 以及连接在真空管内的真空室与不可蒸发吸气泵之间的位置上的粗排气口。粗排气口包括：开闭粗抽风口的粗排气阀; 以及将真空室打开至大气的泄漏阀。