公开(公告)号：US08153513B2

公开(公告)日：2012-04-10

申请号：US11782289

申请日：2007-07-24

申请人： Francois J. Henley

发明人： Francois J. Henley

IPC分类号： H01L21/425

CPC分类号： H01L21/67754 ,  H01J37/185 ,  H01J37/20 ,  H01J37/3171 ,  H01J37/32412 ,  H01J2237/184 ,  H01J2237/30 ,  H01J2237/31 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： A method for manufacturing doped substrates using a continuous large area scanning implantation process is disclosed. In one embodiment, the method includes providing a movable track member. The movable track member is provided in a chamber. The chamber includes an inlet and an outlet. In a specific embodiment, the movable track member can include one or more rollers, air bearings, belt member, and/or movable beam member to provide one or more substrates for a scanning process. The method may also include providing a first substrate. The first substrate includes a first plurality of tiles. The method maintains the first substrate including the first plurality of tiles in a vacuum. The method includes transferring the first substrate including the first plurality of tiles from the inlet port onto the movable track member. The first plurality of tiles are subjected to a scanning implant process. The method also includes maintaining a second substrate including a second plurality of tiles in the vacuum. The method includes transferring the second substrate including a second plurality of tiles from the inlet port onto the movable track member. The method includes subjecting the second plurality of tiles to an implant process using the scanning implant process.

摘要翻译： 公开了一种使用连续大面积扫描注入工艺制造掺杂衬底的方法。 在一个实施例中，该方法包括提供可移动轨道构件。 可移动轨道构件设置在腔室中。 该室包括入口和出口。 在具体实施例中，可移动轨道构件可以包括一个或多个辊，空气轴承，带构件和/或可移动梁构件，以提供用于扫描过程的一个或多个基板。 该方法还可以包括提供第一衬底。 第一基板包括第一多个瓦片。 该方法在真空中保持包括第一多个瓦片的第一基板。 该方法包括将包括第一多个瓦片的第一基底从入口转移到可移动轨道构件上。 对第一多个瓷砖进行扫描注入工艺。 该方法还包括在真空中维持包括第二多个瓦片的第二基板。 该方法包括将包括第二多个瓦片的第二基板从入口传送到可移动轨道构件上。 该方法包括使用扫描注入工艺对第二多个瓷砖进行植入工艺。

公开(公告)号：US07973297B2

公开(公告)日：2011-07-05

申请号：US12364838

申请日：2009-02-03

申请人： Toshihiro Usa ,  Kazunori Komatsu

发明人： Toshihiro Usa ,  Kazunori Komatsu

IPC分类号： H01J3/14 ,  G11B5/02

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/20214 ,  H01J2237/24578 ,  H01J2237/30 ,  H01J2237/3045

摘要： When writing a hard disk pattern on a substrate applied with a resist by scanning an electron beam on the substrate while rotating a rotation stage, writing is started with respect to each radial direction position of each area based on a predetermined encoder pulse for each radial direction position among those generated according to the rotational angle of the rotation stage that occurs after a predefined encoder pulse that occurs ahead in a rotational direction of a radial direction position whose write start position in a circumferential direction in each area arrives first at the writing position as the rotation stage rotates and ahead of the write start position in the circumferential direction with respect to each radial direction position, and after a predetermined time from the predetermined encoder pulse.

摘要翻译： 当通过在转动旋转台的同时扫描基板上的电子束来在施加有抗蚀剂的基板上写入硬盘图案时，基于每个半径方向的预定的编码器脉冲相对于每个区域的每个径向位置开始写入 在根据旋转台的旋转角度产生的位置之间发生的位置之间发生的预定的编码器脉冲之后发生的预定的编码器脉冲，其沿着在每个区域的圆周方向上的写入开始位置首先到达写入位置的径向位置的旋转方向的旋转方向上发生， 旋转台相对于每个径向位置在周向方向上旋转并在写入开始位置之前，并且在从预定编码器脉冲起的预定时间之后旋转。

公开(公告)号：US20090194711A1

公开(公告)日：2009-08-06

申请号：US12364838

申请日：2009-02-03

申请人： Toshihiro USA ,  Kazunori Komatsu

发明人： Toshihiro USA ,  Kazunori Komatsu

IPC分类号： A61N5/00 ,  H01J3/14

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/20214 ,  H01J2237/24578 ,  H01J2237/30 ,  H01J2237/3045

摘要： When writing a hard disk pattern on a substrate applied with a resist by scanning an electron beam on the substrate while rotating a rotation stage, writing is started with respect to each radial direction position of each area based on a predetermined encoder pulse for each radial direction position among those generated according to the rotational angle of the rotation stage that occurs after a predefined encoder pulse that occurs ahead in a rotational direction of a radial direction position whose write start position in a circumferential direction in each area arrives first at the writing position as the rotation stage rotates and ahead of the write start position in the circumferential direction with respect to each radial direction position, and after a predetermined time from the predetermined encoder pulse.

摘要翻译： 当通过在转动旋转台的同时扫描基板上的电子束来在施加有抗蚀剂的基板上写入硬盘图案时，基于每个半径方向的预定的编码器脉冲相对于每个区域的每个径向位置开始写入 在根据旋转台的旋转角度产生的位置之间发生的位置之间发生的预定的编码器脉冲之后发生的预定的编码器脉冲，其沿着在每个区域的圆周方向上的写入开始位置首先到达写入位置的径向位置的旋转方向的旋转方向上发生， 旋转台相对于每个径向位置在周向方向上旋转并在写入开始位置之前，并且在从预定编码器脉冲起的预定时间之后旋转。

公开(公告)号：US09539455B2

公开(公告)日：2017-01-10

申请号：US14737075

申请日：2015-06-11

申请人： Thomas Hoelen ,  Cesar Ovalles ,  Deyuan Kong

发明人： Thomas Hoelen ,  Cesar Ovalles ,  Deyuan Kong

IPC分类号： A62D3/17 ,  A62D3/15 ,  C05G3/00 ,  H01J37/317 ,  H01J37/20 ,  B09C1/00 ,  A62D101/20

CPC分类号： A62D3/15 ,  A62D2101/20 ,  B09C1/00 ,  C05G3/00 ,  H01J37/20 ,  H01J37/317 ,  H01J2237/063 ,  H01J2237/30

摘要： The present invention is directed to a method for irradiating of solids containing petroleum or petroleum derived compounds (PPDCs), such as soils, oily sludge, drill cuttings, sediments, and non-commercial petroleum industry products, with electron beams in order to physically and/or chemically alter the composition of the PPDCs. The method includes the step of separating PPDC gas and liquids in the presence of a gas driver. Optionally, the method includes the steps of treating off-gases and applying one or more amendments to PPCD-impacted solid material pre-irradiation, post-irradiation, or during electron beam irradiation.

摘要翻译： 本发明涉及一种用电子束照射含有石油或石油衍生化合物（PPDCs），例如土壤，油性污泥，钻屑，沉积物和非商业石油工业产品的固体的方法，以便物理和 /或化学改变PPDCs的组成。 该方法包括在气体驱动器存在下分离PPDC气体和液体的步骤。 任选地，该方法包括以下步骤：处理废气并对PPCD冲击的固体材料预辐射，后照射或电子束照射施加一个或多个修正。

公开(公告)号：US09349567B2

公开(公告)日：2016-05-24

申请号：US14787118

申请日：2014-04-23

申请人： Hitachi High-Technologies Corporation

发明人： Yoshihiro Takahoko ,  Daisuke Kobayashi ,  Masashi Kimura ,  Masahiro Sasajima

IPC分类号： H01J37/02 ,  H01J37/00 ,  H01J37/18 ,  H01J37/22 ,  H01J37/21

CPC分类号： H01J37/18 ,  H01J37/21 ,  H01J37/22 ,  H01J2237/1825 ,  H01J2237/26 ,  H01J2237/30

摘要： An evacuation structure of a charged particle beam device includes: a vacuum chamber provided with a charged particle source; vacuum piping connected to the vacuum chamber; a main vacuum pump which is connected via the vacuum piping and evacuates the inside of the vacuum chamber; a non-evaporable getter pump disposed at a position between the vacuum chamber and the main vacuum pump in the vacuum piping; and a coarse evacuation port connected at a position between the vacuum chamber and the non-evaporable getter pump in the vacuum piping The coarse evacuation port includes: a coarse evacuation valve that opens and closes the coarse evacuation port; and a leak valve to open the vacuum chamber to the atmosphere.

摘要翻译： 带电粒子束装置的抽空结构包括：设有带电粒子源的真空室; 真空管连接到真空室; 主真空泵，通过真空管道连接并抽真空室; 设置在真空管内真空室和主真空泵之间的非蒸发性吸气泵; 以及连接在真空管内的真空室与不可蒸发吸气泵之间的位置上的粗排气口。粗排气口包括：开闭粗抽风口的粗排气阀; 以及将真空室打开至大气的泄漏阀。

公开(公告)号：US20150360065A1

公开(公告)日：2015-12-17

申请号：US14737075

申请日：2015-06-11

申请人： THOMAS HOELEN ,  CESAR OVALLES ,  DEYUAN KONG

发明人： THOMAS HOELEN ,  CESAR OVALLES ,  DEYUAN KONG

IPC分类号： A62D3/15 ,  H01J37/317 ,  H01J37/20 ,  C05G3/00

CPC分类号： A62D3/15 ,  A62D2101/20 ,  B09C1/00 ,  C05G3/00 ,  H01J37/20 ,  H01J37/317 ,  H01J2237/063 ,  H01J2237/30

摘要： The present invention is directed to a method for irradiating of solids containing petroleum or Petroleum derived compounds (PPDCs), such as soils, oily sludge, drill cuttings, sediments, and non-commercial petroleum industry products, with electron beams in order to physically and/or chemically alter the composition of the PPDCs. The method includes the step of separating PPDC gas and liquids in the presence of a gas driver. Optionally, the method includes the steps of treating off-gases and applying one or more amendments to PPCD-impacted solid material pre-irradiation, post-irradiation, or during electron beam irradiation.

摘要翻译： 本发明涉及一种用电子束照射含有石油或石油衍生化合物（PPDCs），例如土壤，油性污泥，钻屑，沉积物和非商业石油工业产品的固体的方法，以便物理和 /或化学改变PPDCs的组成。 该方法包括在气体驱动器存在下分离PPDC气体和液体的步骤。 任选地，该方法包括以下步骤：处理废气并对PPCD冲击的固体材料预辐射，后照射或电子束照射施加一个或多个修正。

公开(公告)号：US08153966B2

公开(公告)日：2012-04-10

申请号：US12992788

申请日：2009-05-15

申请人： Noriaki Arai ,  Hideyuki Kazumi

发明人： Noriaki Arai ,  Hideyuki Kazumi

IPC分类号： H01J37/244

CPC分类号： H01J37/026 ,  H01J3/027 ,  H01J37/04 ,  H01J37/28 ,  H01J2237/0041 ,  H01J2237/0048 ,  H01J2237/30 ,  H01J2237/31749

摘要： A high-resolution sample image is acquired by eliminating both of charge over an entire sample (global charge) and charge in a local region irradiated with a primary charged particle beam (local charge). An electrode unit (50) according to the present invention is used in a charged particle beam device. The electrode unit (50) includes a plate electrode disposed facing an insulator sample between an objective lens and the sample, and further includes: a first charge-neutralization charged particle beam source which emits a first charged particle beam to eliminate local charge on the sample; and a second charge-neutralization charged particle beam source (25) which emits a second charged particle beam to eliminate global charge on the sample. A first hole (53) through which a primary charged particle beam passes, and a second hole through which the second charged particle beam is emitted are provided in the plate electrode, and the first and second charge-neutralization charged particle beam sources are disposed at such positions as not to interfere with each other. The charged particle beam emitted from the first charge-neutralization charged particle beam source is introduced in the vicinity of the first hole (53).

摘要翻译： 通过在整个样品（全局电荷）上消除电荷并在用初级带电粒子束（局部电荷）照射的局部区域中的电荷获得高分辨率采样图像。 根据本发明的电极单元（50）用于带电粒子束装置。 电极单元（50）包括面对物镜和样品之间的绝缘体样品的平板电极，还包括：第一电荷中和带电粒子束源，其发射第一带电粒子束以消除样品上的局部电荷 ; 以及发射第二带电粒子束以消除样品上的全局电荷的第二电荷中和带电粒子束源（25）。 初级带电粒子束通过的第一孔53和第二带电粒子束发射的第二孔设置在板电极中，第一和第二电荷中和带电粒子束源设置在 这样的位置不会相互干扰。 从第一电荷中和带电粒子束源发射的带电粒子束被引入第一孔（53）附近。

公开(公告)号：US07777404B1

公开(公告)日：2010-08-17

申请号：US11523001

申请日：2006-09-19

申请人： Tadashi Fujieda ,  Kishio Hidaka ,  Mitsuo Hayashibara

发明人： Tadashi Fujieda ,  Kishio Hidaka ,  Mitsuo Hayashibara

IPC分类号： H01J19/06 ,  H01K1/04

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/073 ,  H01J37/28 ,  H01J2201/30469 ,  H01J2237/06341 ,  H01J2237/30 ,  Y10S977/743 ,  Y10S977/745

摘要： Means for achieving the purpose of the present invention includes an field emission type cathode composed of a single fibrous carbon substance and a conductive substrate supporting the same; an extraction apparatus for causing field emission of electrons; and an accelerator for accelerating electrons, wherein the aforementioned field emission type electron gun is further contains means for heating the aforementioned field emission cathode, and means for applying the voltage of the polarity that does not allow the aforementioned field emission type cathode to field-emit electrons.Thereby, the amorphous carbon is removed from the tip end of the fibrous carbon substance of the field emission type electron gun, without the tip end thereof being damaged.

摘要翻译： 用于实现本发明目的的手段包括由单个纤维状碳物质和支撑它的导电基底组成的场发射型阴极; 用于引起电子的场发射的提取装置; 以及用于加速电子的加速器，其中上述场发射型电子枪还包括用于加热上述场致发射阴极的装置，以及用于施加不允许上述场致发射型阴极场极化的极性电压的装置 电子。 由此，从场致发射型电子枪的纤维状碳物质的前端除去无定形碳，其末端不被损坏。

公开(公告)号：US20100193687A1

公开(公告)日：2010-08-05

申请号：US11523001

申请日：2006-09-19

申请人： Tadashi Fujieda ,  Kishio Hidaka ,  Mitsuo Hayashibara

发明人： Tadashi Fujieda ,  Kishio Hidaka ,  Mitsuo Hayashibara

IPC分类号： H01J29/48 ,  H01J37/26 ,  H01J37/28 ,  H01J37/30

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/073 ,  H01J37/28 ,  H01J2201/30469 ,  H01J2237/06341 ,  H01J2237/30 ,  Y10S977/743 ,  Y10S977/745

摘要： Means for achieving the purpose of the present invention includes an field emission type cathode composed of a single fibrous carbon substance and a conductive substrate supporting the same; an extraction apparatus for causing field emission of electrons; and an accelerator for accelerating electrons, wherein the aforementioned field emission type electron gun is further contains means for heating the aforementioned field emission cathode, and means for applying the voltage of the polarity that does not allow the aforementioned field emission type cathode to field-emit electrons.Thereby, the amorphous carbon is removed from the tip end of the fibrous carbon substance of the field emission type electron gun, without the tip end thereof being damaged.

摘要翻译： 用于实现本发明目的的手段包括由单个纤维状碳物质和支撑它的导电基底组成的场发射型阴极; 用于引起电子的场发射的提取装置; 以及用于加速电子的加速器，其中上述场发射型电子枪还包括用于加热上述场致发射阴极的装置，以及用于施加不允许上述场致发射型阴极场极化的极性电压的装置 电子。 由此，从场致发射型电子枪的纤维状碳物质的前端除去无定形碳，其末端不被损坏。

公开(公告)号：US20080038908A1

公开(公告)日：2008-02-14

申请号：US11782289

申请日：2007-07-24

申请人： Francois Henley

发明人： Francois Henley

IPC分类号： H01L21/425 ,  H01L21/677

CPC分类号： H01L21/67754 ,  H01J37/185 ,  H01J37/20 ,  H01J37/3171 ,  H01J37/32412 ,  H01J2237/184 ,  H01J2237/30 ,  H01J2237/31 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： A method for manufacturing doped substrates using a continuous large area scanning implantation process is disclosed. In one embodiment, the method includes providing a movable track member. The movable track member is provided in a chamber. The chamber includes an inlet and an outlet. In a specific embodiment, the movable track member can include one or more rollers, air bearings, belt member, and/or movable beam member to provide one or more substrates for a scanning process. The method may also include providing a first substrate. The first substrate includes a first plurality of tiles. The method maintains the first substrate including the first plurality of tiles in a vacuum. The method includes transferring the first substrate including the first plurality of tiles from the inlet port onto the movable track member. The first plurality of tiles are subjected to a scanning implant process. The method also includes maintaining a second substrate including a second plurality of tiles in the vacuum. The method includes transferring the second substrate including a second plurality of tiles from the inlet port onto the movable track member. The method includes subjecting the second plurality of tiles to an implant process using the scanning implant process.

摘要翻译： 公开了一种使用连续大面积扫描注入工艺制造掺杂衬底的方法。 在一个实施例中，该方法包括提供可移动轨道构件。 可移动轨道构件设置在腔室中。 该室包括入口和出口。 在具体实施例中，可移动轨道构件可以包括一个或多个辊，空气轴承，带构件和/或可移动梁构件，以提供用于扫描过程的一个或多个基板。 该方法还可以包括提供第一衬底。 第一基板包括第一多个瓦片。 该方法在真空中保持包括第一多个瓦片的第一基板。 该方法包括将包括第一多个瓦片的第一基底从入口转移到可移动轨道构件上。 对第一多个瓷砖进行扫描注入工艺。 该方法还包括在真空中维持包括第二多个瓦片的第二基板。 该方法包括将包括第二多个瓦片的第二基板从入口传送到可移动轨道构件上。 该方法包括使用扫描注入工艺对第二多个瓷砖进行植入工艺。