公开(公告)号：US20170330724A1

公开(公告)日：2017-11-16

申请号：US15527562

申请日：2015-11-26

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Taiga OKUMURA ,  Takashi OHSHIMA ,  Yuusuke OOMINAMI ,  Minami SHOUJI ,  Akiko HISADA ,  Akio YONEYAMA

IPC: H01J37/28 ,  H01J37/20

CPC classification number: H01J37/28 ,  G01N2223/418 ,  H01J37/20 ,  H01J37/22 ,  H01J37/222 ,  H01J2237/0245 ,  H01J2237/20 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/228 ,  H01J2237/2802

Abstract: An electronic microscope has a great depth of focus compared with an optical microscope. Thus, information is superimposed in the depth direction in one image. Thus, observation of a three-dimensional structure inside a specimen with use of the electronic microscope requires accurate specification of a three-dimensional position or density of a structure inside the specimen. Furthermore, the specimen on a slide glass that is observed with the optical microscope may not be put in a TEM device in the related art. Thus, a very complicated preparation of the specimen is required for performing three-dimensional internal structure observation, with the electronic microscope, of a location that is observed with the optical microscope.Provided is a charged particle beam device including a charged particle optical column that irradiates a specimen with a primary charged particle beam, and a specimen base rotating unit that is capable of rotating the specimen base in a state of an angle formed by a surface of the specimen base and an optical axis of the primary charged particle beam being inclined to a non-perpendicular angle, in which the specimen base is configured to include a detecting element that detects a charged particle scattered or transmitted inside the specimen, and transmitted charged particle images of the specimen corresponding to each angle is acquired by irradiating the specimen in a state of the specimen base rotating unit being rotated at a plurality of different angles.

公开(公告)号：US20210233740A1

公开(公告)日：2021-07-29

申请号：US16094281

申请日：2016-04-22

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Minami SHOUJI ,  Natsuki TSUNO ,  Yuusuke OOMINAMI

IPC: H01J37/244 ,  H01J37/12

Abstract: The present invention provides an electron microscope and an observation method capable of observing secondary electrons in the atmosphere. In detail, a charged particle microscope of the invention includes: a partition wall that separates a non-vacuum space in which a sample is loaded from a vacuum space inside a charged particle optical lens barrel; an upper electrode; a lower electrode on which the sample is loaded; a power supply for applying a voltage to at least one of the upper electrode and the lower electrode; a sample gap adjusting mechanism for adjusting a gap between the sample and the partition wall; and an image forming unit for forming an image of the sample based on the current absorbed by the lower electrode. The secondary electrons are selectively measured by using an amplification effect due to ionization collision between electrons and gas molecules generated when a voltage is applied between the upper electrode and the lower electrode. As a detection method, a method is used which measures a current value flowing in a substrate.

公开(公告)号：US20170069458A1

公开(公告)日：2017-03-09

申请号：US15119950

申请日：2015-01-09

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Minami SHOUJI ,  Takashi OHSHIMA ,  Yuusuke OOMINAMI ,  Hideo MORISHITA ,  Kunio HARADA

IPC: H01J37/244 ,  H01J37/20 ,  H01J37/26

CPC classification number: H01J37/244 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element (23) whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means (203) to generate a transmission charged particle image of the sample.

Abstract translation: 本发明的目的是简单地通过透射带电粒子进行图像观察。 由带电粒子束照射的样品直接或通过预定部件设置在发光元件（23）上，其中穿过或散射在样品内的带电粒子进入，从而从中收集光， 使用光传输装置（203）有效地检测以产生样本的透射带电粒子图像。