公开(公告)号：US20210233740A1

公开(公告)日：2021-07-29

申请号：US16094281

申请日：2016-04-22

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Minami SHOUJI ,  Natsuki TSUNO ,  Yuusuke OOMINAMI

IPC: H01J37/244 ,  H01J37/12

Abstract: The present invention provides an electron microscope and an observation method capable of observing secondary electrons in the atmosphere. In detail, a charged particle microscope of the invention includes: a partition wall that separates a non-vacuum space in which a sample is loaded from a vacuum space inside a charged particle optical lens barrel; an upper electrode; a lower electrode on which the sample is loaded; a power supply for applying a voltage to at least one of the upper electrode and the lower electrode; a sample gap adjusting mechanism for adjusting a gap between the sample and the partition wall; and an image forming unit for forming an image of the sample based on the current absorbed by the lower electrode. The secondary electrons are selectively measured by using an amplification effect due to ionization collision between electrons and gas molecules generated when a voltage is applied between the upper electrode and the lower electrode. As a detection method, a method is used which measures a current value flowing in a substrate.

公开(公告)号：US20180174796A1

公开(公告)日：2018-06-21

申请号：US15580403

申请日：2015-06-29

Applicant: Hitachi High-Technologies Corporation

Inventor： Makoto NAKABAYASHI ,  Yuusuke OOMINAMI ,  Shinsuke KAWANISHI

IPC: H01J37/20 ,  H01J37/16 ,  H01J37/18 ,  H01J37/22

CPC classification number: H01J37/20 ,  H01J37/16 ,  H01J37/18 ,  H01J37/22 ,  H01J37/26 ,  H01J37/32

Abstract: In a device for performing observation with a charged particle microscope at an atmospheric pressure using a diaphragm, while there was a demand that a distance between the diaphragm and a sample be reduced as much as possible, there was a problem that a limit for how close the diaphragm and the sample can be brought to each other was unknown in the past. In the present invention, a height adjustment member is used, and the position of a diaphragm in a charged particle beam device with respect to the height adjustment member is defined as the specific point of an optical device, so that the positional relationship between the height adjustment member and the diaphragm in the optical device is reproduced, and the height of a sample table with a Z-axis driving mechanism is adjusted so as to locate the surface of the sample at the position of the specific point of the optical device. According to this, the distance between the diaphragm and the sample can be safely and simply adjusted, and thus, an object is to adjust the distance between the diaphragm and the sample so that the distance is reduced as much as possible or the distance is fixed every time the sample is replaced.

公开(公告)号：US20170330724A1

公开(公告)日：2017-11-16

申请号：US15527562

申请日：2015-11-26

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Taiga OKUMURA ,  Takashi OHSHIMA ,  Yuusuke OOMINAMI ,  Minami SHOUJI ,  Akiko HISADA ,  Akio YONEYAMA

IPC: H01J37/28 ,  H01J37/20

CPC classification number: H01J37/28 ,  G01N2223/418 ,  H01J37/20 ,  H01J37/22 ,  H01J37/222 ,  H01J2237/0245 ,  H01J2237/20 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/228 ,  H01J2237/2802

Abstract: An electronic microscope has a great depth of focus compared with an optical microscope. Thus, information is superimposed in the depth direction in one image. Thus, observation of a three-dimensional structure inside a specimen with use of the electronic microscope requires accurate specification of a three-dimensional position or density of a structure inside the specimen. Furthermore, the specimen on a slide glass that is observed with the optical microscope may not be put in a TEM device in the related art. Thus, a very complicated preparation of the specimen is required for performing three-dimensional internal structure observation, with the electronic microscope, of a location that is observed with the optical microscope.Provided is a charged particle beam device including a charged particle optical column that irradiates a specimen with a primary charged particle beam, and a specimen base rotating unit that is capable of rotating the specimen base in a state of an angle formed by a surface of the specimen base and an optical axis of the primary charged particle beam being inclined to a non-perpendicular angle, in which the specimen base is configured to include a detecting element that detects a charged particle scattered or transmitted inside the specimen, and transmitted charged particle images of the specimen corresponding to each angle is acquired by irradiating the specimen in a state of the specimen base rotating unit being rotated at a plurality of different angles.

公开(公告)号：US20160343538A1

公开(公告)日：2016-11-24

申请号：US15111907

申请日：2015-02-10

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shinsuke KAWANISHI ,  Yuusuke OOMINAMI

IPC: H01J37/18 ,  H01J37/28

CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J37/28 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2605

Abstract: In a scanning electron microscope, an atmospheric pressure space having a specimen arranged therein and a vacuum space arranged on a charged particle optical system side are isolated from each other using an isolation film that transmits charged particle beams. The scanning electron microscope has an electron optical lens barrel, a chassis, and an isolation film. The electron optical lens barrel radiates a primary electron beam onto a specimen. The chassis is directly bonded to the inside of the electron optical lens barrel and has an inside that turns into a lower vacuum state than the inside of the electron optical lens barrel at least during the radiation of the primary electron beam. The isolation film isolates a space in an atmospheric pressure atmosphere having a specimen mounted therein and the inside of the chassis in a lower vacuum state, and transmits the primary charged particle beam.

Abstract translation: 在扫描型电子显微镜中，使用透过带电粒子束的隔离膜将具有布置在其中的试样的空气压力空间和布置在带电粒子光学系统侧的真空空间彼此隔离。 扫描电子显微镜具有电子光学镜筒，底盘和隔离膜。 电子光学镜筒将一次电子束辐射到样品上。 底盘直接接合到电子光学镜筒的内部，并且至少在一次电子束的辐射期间具有变成比电子光学镜筒的内部更低的真空状态的内部。 隔离膜将具有安装在其中的试样的大气压气氛中的空间与底盘的内部隔离，并且透射初级带电粒子束。

公开(公告)号：US20170069458A1

公开(公告)日：2017-03-09

申请号：US15119950

申请日：2015-01-09

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Minami SHOUJI ,  Takashi OHSHIMA ,  Yuusuke OOMINAMI ,  Hideo MORISHITA ,  Kunio HARADA

IPC: H01J37/244 ,  H01J37/20 ,  H01J37/26

CPC classification number: H01J37/244 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element (23) whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means (203) to generate a transmission charged particle image of the sample.

Abstract translation: 本发明的目的是简单地通过透射带电粒子进行图像观察。 由带电粒子束照射的样品直接或通过预定部件设置在发光元件（23）上，其中穿过或散射在样品内的带电粒子进入，从而从中收集光， 使用光传输装置（203）有效地检测以产生样本的透射带电粒子图像。