中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

11 records (took 0.028 seconds)

    CHARGED PARTICLE BEAM DEVICE
    6.
    发明申请
    CHARGED PARTICLE BEAM DEVICE 审中-公开

    公开(公告)号：US20170330724A1

    公开(公告)日：2017-11-16

    申请号：US15527562

    申请日：2015-11-26

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Taiga OKUMURA ,  Takashi OHSHIMA ,  Yuusuke OOMINAMI ,  Minami SHOUJI ,  Akiko HISADA ,  Akio YONEYAMA

    IPC: H01J37/28 ,  H01J37/20

    CPC classification number: H01J37/28 ,  G01N2223/418 ,  H01J37/20 ,  H01J37/22 ,  H01J37/222 ,  H01J2237/0245 ,  H01J2237/20 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/228 ,  H01J2237/2802

    Abstract: An electronic microscope has a great depth of focus compared with an optical microscope. Thus, information is superimposed in the depth direction in one image. Thus, observation of a three-dimensional structure inside a specimen with use of the electronic microscope requires accurate specification of a three-dimensional position or density of a structure inside the specimen. Furthermore, the specimen on a slide glass that is observed with the optical microscope may not be put in a TEM device in the related art. Thus, a very complicated preparation of the specimen is required for performing three-dimensional internal structure observation, with the electronic microscope, of a location that is observed with the optical microscope.Provided is a charged particle beam device including a charged particle optical column that irradiates a specimen with a primary charged particle beam, and a specimen base rotating unit that is capable of rotating the specimen base in a state of an angle formed by a surface of the specimen base and an optical axis of the primary charged particle beam being inclined to a non-perpendicular angle, in which the specimen base is configured to include a detecting element that detects a charged particle scattered or transmitted inside the specimen, and transmitted charged particle images of the specimen corresponding to each angle is acquired by irradiating the specimen in a state of the specimen base rotating unit being rotated at a plurality of different angles.

    SAMPLE HOLDER, OBSERVATION SYSTEM, AND IMAGE GENERATION METHOD
    8.
    发明申请
    SAMPLE HOLDER, OBSERVATION SYSTEM, AND IMAGE GENERATION METHOD 有权
    样本持有人，观察系统和图像生成方法

    公开(公告)号：US20170069458A1

    公开(公告)日：2017-03-09

    申请号：US15119950

    申请日：2015-01-09

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Minami SHOUJI ,  Takashi OHSHIMA ,  Yuusuke OOMINAMI ,  Hideo MORISHITA ,  Kunio HARADA

    IPC: H01J37/244 ,  H01J37/20 ,  H01J37/26

    CPC classification number: H01J37/244 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2445 ,  H01J2237/2808

    Abstract: The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element (23) whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means (203) to generate a transmission charged particle image of the sample.

    Abstract translation: 本发明的目的是简单地通过透射带电粒子进行图像观察。 由带电粒子束照射的样品直接或通过预定部件设置在发光元件（23）上，其中穿过或散射在样品内的带电粒子进入，从而从中收集光， 使用光传输装置（203）有效地检测以产生样本的透射带电粒子图像。

    ELECTRON MICROSCOPE
    10.
    发明申请
    ELECTRON MICROSCOPE 审中-公开

    公开(公告)号：US20200303152A1

    公开(公告)日：2020-09-24

    申请号：US16089281

    申请日：2016-03-29

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Takashi OHSHIMA ,  Hiroyuki MINEMURA ,  Yumiko ANZAI ,  Momoyo ENYAMA ,  Yoichi OSE ,  Toshihide AGEMURA

    IPC: H01J37/073 ,  H01J37/22

    Abstract: To provide an electron microscope capable of performing the switching-over between normal illumination and annular illumination, wide-area irradiation, an interference pattern as desired or normal illumination in an expeditious and readily manner or achieving a better S/N ratio, the electron microscope comprises a photocathode 101 with negative electron affinity in use; an excitation optical system to excite the photocathode; and an electron optics system to irradiate an electron beam 13 generated from the photocathode by excitation light 12 irradiated through the excitation optical system onto a sample, the excitation optical system including a light source device 107 for the excitation light; and an optical modulation means 108 which is disposed in an optical path of the excitation light to perform spatial phase modulation to the excitation light.

Patent Agency Ranking