公开(公告)号：US20230417660A1

公开(公告)日：2023-12-28

申请号：US18039316

申请日：2021-11-22

Applicant: HORIBA STEC, Co., Ltd. ,  HORIBA, LTD.

Inventor： Yuhei SAKAGUCHI ,  Masakazu MINAMI ,  Kyoji SHIBUYA ,  Motonobu TAKAHASHI

IPC: G01N21/3504 ,  G01N21/03 ,  G01N21/39

CPC classification number: G01N21/3504 ,  G01N21/0332 ,  G01N21/39 ,  G01N2201/127

Abstract: The present invention is a gas analysis device that measures a concentration or partial pressure of a halide contained in a material gas used in semiconductor manufacturing process or a by-product gas generated in semiconductor manufacturing process with good accuracy, the device being for analyzing a concentration or partial pressure of a halide contained in a material gas used in a semiconductor manufacturing process or a by-product gas generated in a semiconductor manufacturing process, the device including a gas cell into which the material gas or the by-product gas is introduced, a laser light source that irradiates the gas cell with laser light whose wavelength is modulated, a light detector that detects the laser light transmitted through the gas cell, and a signal processing unit that calculates the concentration or partial pressure of the halide by using a light absorption signal obtained from an output signal of the light detector.

公开(公告)号：US20240201078A1

公开(公告)日：2024-06-20

申请号：US18287544

申请日：2022-03-16

Applicant: HORIBA STEC, Co., Ltd.

Inventor： Motonobu TAKAHASHI ,  Takeshi AKAMATSU ,  Masahiro NAKANE ,  Kenji HARA ,  Kyoji SHIBUYA

IPC: G01N21/3504

CPC classification number: G01N21/3504 ,  G01N2201/0233 ,  G01N2201/0633 ,  G01N2201/0636

Abstract: In order to provide a more practical gas analysis device than that having conventionally been, while keeping the laser source and the photodetector separated from the gas cell, thereby preventing exposure to a high temperature, the gas analysis device includes: a gas cell; a laser source or a photodetector separated from the gas cell; and a laser light transmission mechanism provided between the gas cell and the laser source or the photodetector. The laser light transmission mechanism includes one or a plurality of tubular members, and an inner space of the one or the plurality of tubular members provides a light path for the laser light.