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公开(公告)号：US20230417660A1
公开(公告)日：2023-12-28
申请号：US18039316
申请日：2021-11-22
IPC分类号： G01N21/3504 , G01N21/03 , G01N21/39
CPC分类号： G01N21/3504 , G01N21/0332 , G01N21/39 , G01N2201/127
摘要： The present invention is a gas analysis device that measures a concentration or partial pressure of a halide contained in a material gas used in semiconductor manufacturing process or a by-product gas generated in semiconductor manufacturing process with good accuracy, the device being for analyzing a concentration or partial pressure of a halide contained in a material gas used in a semiconductor manufacturing process or a by-product gas generated in a semiconductor manufacturing process, the device including a gas cell into which the material gas or the by-product gas is introduced, a laser light source that irradiates the gas cell with laser light whose wavelength is modulated, a light detector that detects the laser light transmitted through the gas cell, and a signal processing unit that calculates the concentration or partial pressure of the halide by using a light absorption signal obtained from an output signal of the light detector.
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公开(公告)号：US20240201078A1
公开(公告)日：2024-06-20
申请号：US18287544
申请日：2022-03-16
IPC分类号： G01N21/3504
CPC分类号： G01N21/3504 , G01N2201/0233 , G01N2201/0633 , G01N2201/0636
摘要： In order to provide a more practical gas analysis device than that having conventionally been, while keeping the laser source and the photodetector separated from the gas cell, thereby preventing exposure to a high temperature, the gas analysis device includes: a gas cell; a laser source or a photodetector separated from the gas cell; and a laser light transmission mechanism provided between the gas cell and the laser source or the photodetector. The laser light transmission mechanism includes one or a plurality of tubular members, and an inner space of the one or the plurality of tubular members provides a light path for the laser light.
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公开(公告)号：US20230204498A1
公开(公告)日：2023-06-29
申请号：US17928388
申请日：2021-05-25
申请人： HORIBA, LTD.
发明人： Kyoji SHIBUYA
CPC分类号： G01N21/31 , G01N33/0027
摘要： The invention is for measuring the concentration of a target component accurately, and is an analysis device that analyzes a target component included in a sample. The analysis device includes a light source that outputs the reference light toward the sample, a photodetector that detects an intensity of sample light that is the reference light having transmitted through the sample, a parameter determining unit that determines a parameter representing a change in a light absorption spectrum of the target component or a change in a light absorption spectrum of an interference component, the change being caused by a coexisting component included in the sample or by a wavelength shift of the reference light, and a concentration calculating unit that calculates a corrected concentration of the target component, by using the parameter representing the change in the light absorption spectrum.
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公开(公告)号：US20200210651A1
公开(公告)日：2020-07-02
申请号：US16724306
申请日：2019-12-22
申请人： HORIBA, LTD.
发明人： Kyoji SHIBUYA
摘要： The present invention enables an analysis device that utilizes light absorption to measure concentrations of target components by means of a simple calculation, and without any complex spectrum calculation processing being required, and analyzes target components that are contained in a sample, and is provided with a light source that emits modulated light whose wavelength is modulated relative to a central wavelength using a predetermined modulation frequency, a photodetector that detects an intensity of sample light obtained when the modulated light is transmitted through the sample, a correlation value calculation unit that calculates correlation values between intensity-related signals that are related to the intensity of the sample light, and predetermined feature signals, and a concentration calculation unit that calculates concentrations of the target components using the correlation values obtained by the correlation value calculation unit.
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公开(公告)号：US20190113442A1
公开(公告)日：2019-04-18
申请号：US16157799
申请日：2018-10-11
申请人： HORIBA, Ltd.
发明人： Kyoji SHIBUYA
CPC分类号： G01N21/031 , G01N21/39 , G01N21/59 , G01N2201/0668
摘要： The present claimed invention makes it possible to simplify a structure of a multiple-reflection cell and to measure both a measuring objective component having a high concentration and a measuring objective component having a low concentration. The analysis device of this invention is to irradiate a light to a multiple-reflection cell into which a sample is introduced, to detect the light exiting from the multiple-reflection cell and to analyze a measuring objective component contained in the sample, and comprises a first light irradiation part that allows a first light to enter the multiple-reflection cell and a second light irradiation part that allows a second light to enter the multiple-reflection cell. The multiple-reflection cell has a pair of reflecting mirrors that reflect the first light and the second light.
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公开(公告)号：US20180172581A1
公开(公告)日：2018-06-21
申请号：US15827542
申请日：2017-11-30
申请人： HORIBA, Ltd.
IPC分类号： G01N21/39 , G01J3/433 , G01N21/3504
CPC分类号： G01N21/39 , G01J3/433 , G01J3/4338 , G01J2003/104 , G01N21/3504 , G01N2021/399
摘要： The present invention is adapted to include: a light source adapted to emit reference light that is light whose wavelength is modulated at a predetermined modulation frequency; a light detector adapted to detect the intensity of measurement target light that is light after the reference light has transmitted through the measurement target component, and the intensity of the reference light; a first calculation part adapted to calculate an intensity ratio logarithm that is the logarithm of the ratio between the intensity of the measurement target light and the intensity of the reference light; a frequency component extraction part adapted to lock-in detect the intensity ratio logarithm with a reference signal having a frequency n times the modulation frequency; and a second calculation part adapted to, on the basis of the result of the detection by the frequency component extraction part, calculate the concentration or absorbance of the measurement target component.
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公开(公告)号：US20190101491A1
公开(公告)日：2019-04-04
申请号：US16150948
申请日：2018-10-03
申请人： HORIBA, Ltd.
IPC分类号： G01N21/39
摘要： The present invention relates to an analysis apparatus adapted to analyze a measurement target component contained in a sample by irradiating a measurement cell into which the sample is introduced with pulse-oscillated light, whereby suppressing reduction in wavelength resolution without shortening the pulse width. The analysis apparatus includes multiple light sources adapted to produce pulse oscillations, a light detector adapted to detect light emitted from the light source and transmitted through the measurement cell, and a signal separation part adapted to separate, from a light intensity signal obtained by the light detector, signals corresponding to a part of pulses from the light sources.
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公开(公告)号：US20190101487A1
公开(公告)日：2019-04-04
申请号：US16150877
申请日：2018-10-03
申请人： HORIBA, Ltd.
发明人： Kyoji SHIBUYA , Masahiro NAKANE
CPC分类号： G01N21/031 , G01N21/474 , G01N2021/058 , G01N2021/4761 , G01N2201/068
摘要： To provide a multipass cell permitting a reduction in a volume of an inner space into which sample gas is introduced, there are provided: a cell main body with the inner space into which the sample gas is introduced; and a pair of mirrors provided oppositely to each other in the inner space, wherein light incident from an incidence window of the cell main body is subjected to multireflection between the pair of mirrors and is emitted from an emission window of the cell main body, wherein: each of the mirrors is shaped such that light spots formed on a reflecting surface of each of the mirrors are scattered in an elongated region of a predetermined width through the light multireflection; and each of the mirrors is formed into an elongated shape along a longitudinal direction of the elongated region.
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公开(公告)号：US20220244176A1
公开(公告)日：2022-08-04
申请号：US17611471
申请日：2020-05-12
申请人： HORIBA, Ltd.
发明人： Takahito INOUE , Hiroshi UCHIHARA , Kyoji SHIBUYA
IPC分类号： G01N21/3518 , G01N21/39 , G01N1/44
摘要： A sample analyzing apparatus analyzes a component to be measured securely while reducing a frequency of maintenance of the sample analyzing apparatus. The sample analyzing apparatus includes a heating furnace that heats a sample held by a sample holding body and a gas analysis section that analyzes a component to be measured contained in a gas generated by heating the sample, and the gas analysis section includes a laser light source that irradiates the gas with a laser light, and a photodetector that detects an intensity of a sample light as being the laser light that has transmitted through the gas.
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公开(公告)号：US20220236180A1
公开(公告)日：2022-07-28
申请号：US17615548
申请日：2020-06-26
申请人： HORIBA, LTD.
发明人： Kyoji SHIBUYA , Shota HAMAUCHI , Hiroki NISHIGAI
IPC分类号： G01N21/39 , G01N21/3504
摘要： In an analysis device that irradiates light from three or more light sources onto a cell, embodiments proposed herein prevent a reduction in the intensity of light from each light source, and are provided with at least a first light source, a second light source, and a third light source, and an optical system that guides light from the respective light sources onto a cell. The optical system is provided with a second light source optical element that reflects the light from the first light source and transmits the light from the second light source, and a third light source optical element that reflects the light from the first light source that has been reflected by the second light source optical element and the light from the second light source that has been transmitted through the second light source optical element, and transmits the light from the third light source.
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