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1.发明授权Method for manufacturing a magnetic read sensor with narrow track width using amorphous carbon as a hard mask and localized CMP 有权使用无定形碳作为硬掩模和局部化CMP制造具有窄轨道宽度的磁读取传感器的方法公开(公告)号：US08617408B2
公开(公告)日：2013-12-31
申请号：US13275728
申请日：2011-10-18
申请人： Hamid Balamane , Patrick M. Braganca , Jordan A. Katine , Jui-Lung Li , Yang Li , Kanaiyalal C. Patel , Neil L. Robertson , Samuel W. Yuan
发明人： Hamid Balamane , Patrick M. Braganca , Jordan A. Katine , Jui-Lung Li , Yang Li , Kanaiyalal C. Patel , Neil L. Robertson , Samuel W. Yuan
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G01R33/093 , G11B5/3169 , G11B5/398
摘要： A method for manufacturing a magnetic read sensor at very narrow track widths. The method uses an amorphous carbon mask layer to pattern the sensor by ion milling, rather than a mask constructed of a material such as photoresist or DURIMIDE® which can bend over during ion milling at very narrow track widths. By using the amorphous carbon layer as the masking layer, the trackwidth can be very small, while avoiding this bending over of the mask that has been experienced with prior art methods. In addition, the track-width can be further reduced by using a reactive ion etching to further reduce the width of the amorphous carbon mask prior to patterning the sensor. The method also allows extraneous portions of the side insulation layer and hard bias layer to be removed above the sensor by a light CMP process.
摘要翻译： 一种以非常窄的轨道宽度制造磁读取传感器的方法。 该方法使用无定形碳掩模层通过离子研磨对传感器进行图案化，而不是由诸如光致抗蚀剂或DURIMIDE的材料构成的掩模，其可以在非常窄的轨道宽度的离子铣削过程中弯曲。 通过使用无定形碳层作为掩蔽层，轨道宽度可以非常小，同时避免了现有技术方法经历的掩模的弯曲。 此外，通过使用反应离子蚀刻，在图案化传感器之前进一步减小无定形碳掩模的宽度，可以进一步减小轨道宽度。 该方法还允许通过光CMP工艺在传感器上方去除侧绝缘层和硬偏置层的外部部分。
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2.发明申请METHOD FOR MANUFACTURING A MAGNETIC READ SENSOR WITH NARROW TRACK WIDTH USING AMORPHOUS CARBON AS A HARD MASK AND LOCALIZED CMP 有权使用非晶碳作为硬掩模和本地化CMP制造具有窄轨迹宽度的磁性读数传感器的方法公开(公告)号：US20130092654A1
公开(公告)日：2013-04-18
申请号：US13275728
申请日：2011-10-18
申请人： Hamid Balamane , Patrick M. Braganca , Jordan A. Katine , Jui-Lung Li , Yang Li , Kanaiyalal C. Patel , Neil L. Robertson , Samuel W. Yuan
发明人： Hamid Balamane , Patrick M. Braganca , Jordan A. Katine , Jui-Lung Li , Yang Li , Kanaiyalal C. Patel , Neil L. Robertson , Samuel W. Yuan
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G01R33/093 , G11B5/3169 , G11B5/398
摘要： A method for manufacturing a magnetic read sensor at very narrow track widths. The method uses an amorphous carbon mask layer to pattern the sensor by ion milling, rather than a mask constructed of a material such as photoresist or DURIMIDE® which can bend over during ion milling at very narrow track widths. By using the amorphous carbon layer as the masking layer, the trackwidth can be very small, while avoiding this bending over of the mask that has been experienced with prior art methods. In addition, the track-width can be further reduced by using a reactive ion etching to further reduce the width of the amorphous carbon mask prior to patterning the sensor. The method also allows extraneous portions of the side insulation layer and hard bias layer to be removed above the sensor by a light CMP process.
摘要翻译： 一种以非常窄的轨道宽度制造磁读取传感器的方法。 该方法使用无定形碳掩模层通过离子研磨对传感器进行图案化，而不是由诸如光致抗蚀剂或DURIMIDE的材料构成的掩模，其可以在非常窄的轨道宽度的离子铣削过程中弯曲。 通过使用无定形碳层作为掩蔽层，轨道宽度可以非常小，同时避免了现有技术方法经历的掩模的弯曲。 此外，通过使用反应离子蚀刻，在图案化传感器之前进一步减小无定形碳掩模的宽度，可以进一步减小轨道宽度。 该方法还允许通过光CMP工艺在传感器上方去除侧绝缘层和硬偏置层的外部部分。
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公开(公告)号：US20090266790A1
公开(公告)日：2009-10-29
申请号：US12110388
申请日：2008-04-28
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/3903
摘要： A method of making a magnetoresistive sensor includes defining a track width of a magnetoresistive element stack of the sensor with a hard mask and photoresist. Further, processes of the method enable depositing of hard magnetic bias material on each side of the stack after the hard mask used to define the track width is removed. A separate chemical mechanical polishing (CMP) stop layer that is different from the hard mask enables subsequent creating of a planar surface via CMP to remove unwanted material on top of the sensor stack.
摘要翻译： 制造磁阻传感器的方法包括用硬掩模和光致抗蚀剂限定传感器的磁阻元件堆的轨道宽度。 此外，该方法的过程使得在用于限定轨道宽度的硬掩模被去除之后，能够在堆叠的每一侧上沉积硬磁偏置材料。 与硬掩模不同的单独的化学机械抛光（CMP）停止层可以随后通过CMP产生平坦表面以去除传感器堆叠顶部的不需要的材料。
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4.发明授权Wrap-around antenna design for improved performance in thermally-assisted magnetic recording 有权环绕式天线设计，可提高热辅助磁记录的性能公开(公告)号：US08498182B1
公开(公告)日：2013-07-30
申请号：US13490283
申请日：2012-06-06
IPC分类号： G11B11/00
CPC分类号： G11B5/3116 , G02B6/107 , G11B5/314 , G11B2005/0021
摘要： The presented embodiments generally relate to designing an antenna of an optical transducer (e.g., a near-field transducer or near-field optical source) that focuses the optical energy of a radiation source (e.g., a laser) onto a magnetic media, thereby heating the media. Specifically, the antenna is designed to wrap-around an aperture of the optical transducer such that at least a portion of the antenna is between a main pole of a write head and a surface of the aperture that faces the main pole. Moreover, the antenna may wrap-around the aperture such that it directly contacts the main pole.
摘要翻译： 所提出的实施例通常涉及将辐射源（例如，激光）的光能聚焦到磁性介质上的光学换能器（例如，近场换能器或近场光源）的天线的设计，从而加热 媒体。 具体地说，天线被设计成环绕光学换能器的孔径，使得天线的至少一部分位于写入头的主极和面对主极的孔的表面之间。 此外，天线可以环绕孔径使得其直接接触主极。
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5.发明授权Thermally assisted magnetic write head employing a near field transducer (NFT) having a diffusion barrier layer between the near field transducer and a magnetic lip 有权使用在近场换能器和磁性唇之间具有扩散阻挡层的近场换能器（NFT）的热辅助磁写头公开(公告)号：US08351151B2
公开(公告)日：2013-01-08
申请号：US12938234
申请日：2010-11-02
CPC分类号： G11B5/6088 , G11B5/314 , G11B2005/001 , G11B2005/0021
摘要： A thermally assisted magnetic write head having a near-field transducer, a magnetic lip and a diffusion barrier layer between the near-field transducer and the magnetic lip. The near-field transducer includes a transparent aperture constructed of a material such as SiO2 and an opaque metallic antenna constructed of a metal such as Au formed at a first edge of the aperture. A magnetic lip, connected with the write pole is formed near a second edge of the aperture with a diffusion barrier layer being disposed between the magnetic lip and the aperture. The diffusion barrier layer prevents migration of atomic between the aperture and the magnetic lip, thereby ensuring robust performance at localized high temperatures generated by the near-field transducer.
摘要翻译： 一种热辅助磁写头，其具有在近场换能器和磁唇之间的近场换能器，磁唇和扩散阻挡层。 近场换能器包括由诸如SiO 2的材料构成的透明孔和由形成在孔的第一边缘处的诸如Au的金属构成的不透明金属天线。 与写入极连接的磁性唇形成在孔的第二边缘附近，扩散阻挡层设置在磁性唇缘和孔之间。 扩散阻挡层防止原子在孔径和磁性唇缘之间的迁移，从而确保由近场换能器产生的局部高温下的鲁棒性能。
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6.发明申请THERMALLY ASSISTED MAGNETIC WRITE HEAD EMPLOYING A NEAR FIELD TRANSDUCER (NFT) HAVING A DIFFUSION BARRIER LAYER BETWEEN THE NEAR FIELD TRANSDUCER AND A MAGNETIC LIP 有权使用近旁磁场传感器和磁悬浮液之间的扩散障碍层的近场磁传感器（NFT）的热辅助磁头公开(公告)号：US20120105996A1
公开(公告)日：2012-05-03
申请号：US12938234
申请日：2010-11-02
IPC分类号： G11B5/02
CPC分类号： G11B5/6088 , G11B5/314 , G11B2005/001 , G11B2005/0021
摘要： A thermally assisted magnetic write head having a near-field transducer, a magnetic lip and a diffusion barrier layer between the near-field tranducer and the magnetic lip. The near-field transducer includes a transparent aperture constructed of a material such as SiO2 and an opaque metallic antenna constructed of a metal such as Au formed at a first edge of the aperture. A magnetic lip, connected with the write pole is formed near a second edge of the aperture with a diffusion barrier layer being disposed between the magnetic lip and the aperture. The diffusion barrier layer prevents migration of atomic between the aperture and the magnetic lip, thereby ensuring robust performance at localized high temperatures generated by the near-field transducer.
摘要翻译： 一种热辅助磁写头，其具有在近场传感器和磁唇之间的近场换能器，磁唇和扩散阻挡层。 近场换能器包括由诸如SiO 2的材料构成的透明孔和由形成在孔的第一边缘处的诸如Au的金属构成的不透明金属天线。 与写入极连接的磁性唇形成在孔的第二边缘附近，扩散阻挡层设置在磁性唇缘和孔之间。 扩散阻挡层防止原子在孔径和磁性唇缘之间的迁移，从而确保由近场换能器产生的局部高温下的鲁棒性能。
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公开(公告)号：US20080206602A1
公开(公告)日：2008-08-28
申请号：US11712644
申请日：2007-02-28
IPC分类号： G11B5/65
摘要： One embodiment in accordance with the invention is a method comprising depositing a material above a disk substrate. The disk substrate is for a data storage device. The material above the disk substrate can be nanoimprinted. The material can be processed to transform it into a substantially solidified material. A magnetic material can be deposited on the substantially solidified material.
摘要翻译： 根据本发明的一个实施例是一种方法，包括在盘基底上沉积材料。 磁盘基板用于数据存储装置。 磁盘基板上方的材料可以是纳米压印的。 可以将该材料加工成基本上固化的材料。 可以将磁性材料沉积在基本上凝固的材料上。
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公开(公告)号：US08136227B2
公开(公告)日：2012-03-20
申请号：US11247081
申请日：2005-10-11
CPC分类号： G11B5/1278 , G11B5/3106 , G11B5/3133 , G11B5/3967 , G11B5/40 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A magnetic head having non-GMR shunt for perpendicular recording and method for making magnetic head having non-GMR shunt for perpendicular recording is disclosed. A shunt is provided for shunting charge from a read sensor. The shunt is formed co-planar with the read sensor and is fabricated using non-GMR materials.
摘要翻译： 公开了一种具有用于垂直记录的非GMR分路的磁头和用于制造具有用于垂直记录的非GMR分路的磁头的方法。 提供分流器用于从读取传感器分流电荷。 分流器与读取传感器形成共面并且使用非GMR材料制造。
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9.发明授权
公开(公告)号：US5491605A
公开(公告)日：1996-02-13
申请号：US363460
申请日：1994-12-23
申请人： Timothy S. Hughbanks , Hin Pong E. Lee , Peter B. P. Phipps , Neil L. Robertson , Albert J. Wallash
发明人： Timothy S. Hughbanks , Hin Pong E. Lee , Peter B. P. Phipps , Neil L. Robertson , Albert J. Wallash
CPC分类号： G11B5/3903 , G11B5/11 , G11B5/40 , G11B5/3967
摘要： In a magnetic read/write transducer, the elements of the magnetoresistive (MR) and inductive heads are shorted together and to the slider substrate to provide a low resistance, conductive path bypassing the MR sensor element and minimizing electrical current through the MR sensor element during discharge of static electric charge. The MR sensor element, the MR conductive leads, the MR magnetic shield elements and inductive pole tips exposed at the slider air bearing surface are shorted together and to the slider substrate by a layer of conductive material, such as tungsten, formed over the slider air bearing surface. The conductive layer shorts the head elements together and to the slider substrate thus protecting the head against ESD/EOS damage during subsequent handling and assembly. The conductive layer is removed by wet etching prior to placing the magnetic head into operation in a magnetic storage system.
摘要翻译： 在磁读/写换能器中，磁阻（MR）和感应头的元件在一起和滑块基板短路，以提供绕阻MR传感器元件的低电阻导电路径，并使通过MR传感器元件的电流最小化 放电静电。 在滑块空气轴承表面处暴露的MR传感器元件，MR导电引线，MR磁屏蔽元件和感应极端部通过形成在滑块空气上的一层导电材料（例如钨）短路在一起并且滑块基板 承载面。 导电层将头元件组合在一起并滑动到滑块基板，从而在随后的处理和组装过程中保护头部免受ESD / EOS损坏。 在磁头在磁存储系统中运行之前，通过湿蚀刻去除导电层。
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公开(公告)号：US5393376A
公开(公告)日：1995-02-28
申请号：US175886
申请日：1993-12-30
申请人： Mao-Min Chen , Kochan Ju , Neil L. Robertson , Po-Kang Wang
发明人： Mao-Min Chen , Kochan Ju , Neil L. Robertson , Po-Kang Wang
CPC分类号： G11B5/3163 , G11B5/3116 , G11B5/3183
摘要： A simplified method is provided for making a thin film magnetic head pole tip structure which includes a sidegap G sandwiched between pole tips PT1 and PT2. The method includes depositing bottom and top seedlayers with an insulation layer sandwiched therebetween. The pole tip PT2 is frame plated on top of the top seedlayer with top and bottom film surfaces which are bounded in part by a pair of spaced-apart sidewalls. The second seedlayer and preferably a depth portion of the insulation layer are removed with the exception of width portions of these layers below the pole tip PT1. A gap insulation layer is deposited on a sidewall of the pole tip PT1 to form the sidegap. The insulation layer with the exception of a portion of an insulation layer below the pole tip PT1 is removed to expose a portion of the bottom seedlayer adjacent to the pole tip PT1 where the pole tip PT2 is to be formed. The pole tip PT2 is then frame plated on top of the exposed portion of the first seedlayer adjacent to the sidegap to complete the desired thin film magnetic head.
摘要翻译： 提供了一种制造薄膜磁头极尖端结构的简化方法，其包括夹在极尖PT1和PT2之间的侧隙G。 该方法包括沉积具有夹在其间的绝缘层的底部和顶部种子层。 极尖PT2被框架镀在顶部种子层的顶部上，顶部和底部膜表面部分地由一对间隔开的侧壁限定。 除了绝缘层的深度部分之外，除了这些层在极端PT1下方的宽度部分之外，除去第二种子层。 间隙绝缘层沉积在极尖PT1的侧壁上以形成侧隙。 去除绝缘层，绝缘层除极点PT1下方的绝缘层除外以露出与要形成极尖PT2的极尖PT1相邻的底部种子层的一部分。 然后将极端PT2框架电镀在与侧隙相邻的第一种子层的暴露部分的顶部上，以完成所需的薄膜磁头。
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