公开(公告)号：US06300020B1

公开(公告)日：2001-10-09

申请号：US09041012

申请日：1998-03-12

Applicant: Hideki Ina ,  Setsuo Minami

Inventor： Hideki Ina ,  Setsuo Minami

IPC: H01L21027

CPC classification number: G03F7/24 ,  G03F1/42 ,  G03F1/50

Abstract: A circuit pattern surface curving in correspondence with the surface shape of a ball-like semiconductor device material such as a silicon ball is formed in a reticle. A resist-applied surface of the device material is so exposed as to move the ball-like semiconductor device material close to the circuit pattern surface. In this manner, a circuit pattern is formed on the surface of the ball-like device material.

Abstract translation: 在光罩中形成与硅球等球状半导体器件材料的表面形状对应地弯曲的电路图形表面。 使装置材料的抗蚀剂涂敷表面暴露以使球状半导体器件材料靠近电路图形表面移动。 以这种方式，在球状器件材料的表面上形成电路图案。

公开(公告)号：US4626082A

公开(公告)日：1986-12-02

申请号：US647270

申请日：1984-09-04

Applicant: Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui ,  Tadasu Taniguchi

Inventor： Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui ,  Tadasu Taniguchi

IPC: G02B3/00 ,  G02B13/24 ,  G03B27/52 ,  G02B13/26

CPC classification number: G02B3/0056 ,  G02B13/24 ,  G03B27/525

Abstract: A projecting device comprising an array of axial element lens systems, wherein each element lens system includes a single bar lens having an axial length larger than the effective aperture and adapted to form an intermediate image of a pixel of the object plane and an erect image of a magnification of unity not vertically nor laterally inverted in such a manner that the light intensity on the image plane corresponding to said pixel is defined in the form of Gaussian distribution by the eclipse of the aperture. The element lens systems are arranged in a plane perpendicular to the optical axis so as to cause the light intensity distributions of said systems to mutually overlap in the peripheral areas thereof on the image plane, wherein each row of the systems in the array is displaced by a half pitch with respect to the neighboring row to constitute a staggered arrangement thereby achieving a uniform exposure distribution, integrated in time, in the scanning direction.

Abstract translation: 一种包括轴向元件透镜系统的阵列的投影装置，其中每个元件透镜系统包括具有大于有效孔径的轴向长度的单杆透镜，并且适于形成物平面的像素的中间图像和 单位的放大率不垂直或横向倒置，使得对应于所述像素的图像平面上的光强度通过孔径的日食被限定为高斯分布的形式。 元件透镜系统布置在垂直于光轴的平面中，以便使得所述系统的光强度分布在其在像平面上的周边区域中相互重叠，其中阵列中的每一系列被位移 相对于相邻行的半间距构成交错布置，从而实现在扫描方向上集成的均匀的曝光分布。

公开(公告)号：US4431299A

公开(公告)日：1984-02-14

申请号：US134222

申请日：1980-03-26

Applicant: Yoshiya Matsui ,  Setsuo Minami ,  Noritaka Mochizuki

Inventor： Yoshiya Matsui ,  Setsuo Minami ,  Noritaka Mochizuki

IPC: G02B3/00 ,  G02B27/18 ,  G03B27/52 ,  G03G15/28 ,  G03B27/48

CPC classification number: G02B3/0056 ,  G02B27/18 ,  G03B27/528

Abstract: A projection apparatus for forming an image of original on a photosensitive material opposed to the plane of the original. The projection apparatus has a projecting system composed of a plurality of projection optical system arrays. Each individual projection optical system is composed of a first and a second lens coaxially disposed and having a relatively large length as compared with its effective lens diameter respectively. The first lens is an exit side telecentric lens whereas the second one is an incident side telecentric lens. The first lens forms an intermediate image of a portion of the original on a plane between the first and second lenses and the second lens reforms the intermediate image on the photosensitive material.

Abstract translation: 一种投影装置，用于在与原稿的平面相对的感光材料上形成原稿的图像。 投影装置具有由多个投影光学系统阵列构成的投影系统。 每个单独的投影光学系统由分别与其有效透镜直径相比同轴布置并具有相对较大长度的第一和第二透镜组成。 第一透镜是出射侧远心透镜，而第二透镜是入射侧远心透镜。 第一透镜在第一和第二透镜之间的平面上形成原稿的一部分的中间图像，并且第二透镜改变感光材料上的中间图像。

公开(公告)号：US4274733A

公开(公告)日：1981-06-23

申请号：US29109

申请日：1979-04-11

Applicant: Muneharu Sugiura ,  Setsuo Minami

Inventor： Muneharu Sugiura ,  Setsuo Minami

IPC: G03B27/50 ,  G02B13/24 ,  G03B27/52 ,  G03G15/04 ,  G03B27/34

CPC classification number: G03B27/526

Abstract: A copying apparatus comprising a flat stationary original support table, at least a movable mirror for scanning the surface of an original placed on said original support table, and an imaging optical system adapted for focusing the light beam from said movable mirror onto a photosensitive member and capable of compensating the change in the light path length from said original support table to the photosensitive member resulting from the displacement of said movable mirror while maintaining a constant image magnification.

Abstract translation: 一种复印设备，包括平坦的固定原始支撑台，至少一个用于扫描放置在所述原始支撑台上的原稿的表面的可移动镜，以及适于将来自所述可移动镜的光束聚焦到感光元件上的成像光学系统，以及 能够补偿由所述可移动反射镜的位移导致的从所述原始支撑台到感光部件的光路长度的变化，同时保持恒定的图像放大倍率。

公开(公告)号：US4259004A

公开(公告)日：1981-03-31

申请号：US48257

申请日：1979-06-13

Applicant: Masamichi Tateoka ,  Toshiaki Asano ,  Kazuo Minoura ,  Setsuo Minami

Inventor： Masamichi Tateoka ,  Toshiaki Asano ,  Kazuo Minoura ,  Setsuo Minami

IPC: G02B26/10 ,  G03B27/52 ,  G03G15/04 ,  H04N1/113 ,  G03G15/30

CPC classification number: H04N1/113 ,  G02B26/10 ,  G03B27/526 ,  G03G15/04 ,  G03G15/0435

Abstract: A scanning device for scanning a flat scanned surface by means of a rotating or rotatively vibrating deflector. The scanning device is provided with a rotational asymmetric image forming optical system disposed between the deflector and the scanned surface for forming an image of the scanned surface at a substantially equal distance from the deflecting surface of the deflector in the plane defined by the path of movement of the normal to the deflecting surface of the deflector in accordance with the rotation thereof.

Abstract translation: 一种用于通过旋转或旋转振动偏转器扫描平坦扫描表面的扫描装置。 扫描装置设置有设置在偏转器和扫描表面之间的旋转非对称图像形成光学系统，用于在由偏移器的移动路径限定的平面中与偏转器的偏转表面基本相等的距离处形成扫描表面的图像 与偏转器的偏转面垂直的方向。

公开(公告)号：US4251126A

公开(公告)日：1981-02-17

申请号：US45843

申请日：1979-06-05

Applicant: Kazuo Minoura ,  Setsuo Minami

Inventor： Kazuo Minoura ,  Setsuo Minami

IPC: B41J2/44 ,  G02B26/10 ,  G03G15/30 ,  H04N1/04 ,  H04N1/113 ,  G02B27/17

CPC classification number: H04N1/1135 ,  G02B26/10 ,  G03G15/30 ,  H04N1/04

Abstract: A light beam scanning device provided with a rotationally vibrating deflector having at least two deflective and reflective surfaces, a scanning surface subjected to scanning operation with light beam deflected by the deflector, an image-forming optical system interposed between the deflector and the scanning surface to focus the light beam from the deflector onto the scanning surface, and a light source section which emits light beam to the deflector, in which device a first deflected light beam plane to be formed by the deflected light beam immediately before entering the image-forming optical system at the forward movement of the deflector is made parallel with a second deflected light beam plane to be formed by the deflected light beam immediately before entering the image-forming optical system at the return movement of the deflector, and the deflecting direction of each beam to be deflected by the first deflected light beam plane and the second deflected light beam plane is made identical.

Abstract translation: 一种具有旋转振动偏转器的光束扫描装置，其具有至少两个偏转和反射表面，经由偏转器偏转的光束进行扫描操作的扫描表面;插入在偏转器和扫描表面之间的图像形成光学系统， 将来自偏转器的光束聚焦到扫描表面上，以及光源部分，该光源部分向偏转器发射光束，在该光源部分中，设备将在进入图像形成光学器件之前由偏转光束形成的第一偏转光束平面 在偏转器的向前运动的过程中，系统在与偏转光束平行的状态下与偏转的光束平行，偏转的光束在偏转器的返回运动之前立即进入图像形成光学系统之前，并且每个光束的偏转方向 由第一偏转光束平面和第二偏转光束平面偏转 相同。

公开(公告)号：US4426132A

公开(公告)日：1984-01-17

申请号：US500804

申请日：1983-06-07

Applicant: Atsuo Tsunoda ,  Koyo Midorikawa ,  Hidetoshi Murase ,  Mikio Suzuta ,  Masazumi Moriwaki ,  Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui

Inventor： Atsuo Tsunoda ,  Koyo Midorikawa ,  Hidetoshi Murase ,  Mikio Suzuta ,  Masazumi Moriwaki ,  Noritaka Mochizuki ,  Setsuo Minami ,  Yoshiya Matsui

IPC: G03B27/50 ,  G02B3/00 ,  G02B7/00 ,  G02B27/18 ,  G03B27/52

CPC classification number: G02B3/0062 ,  G03B27/525 ,  G02B3/0012 ,  G02B3/0056 ,  G02B3/0068

Abstract: A projecting device is disclosed which has plural element lens systems arranged in at least two rows in a staggered fashion in two grooved blocks, with one row displaced relative to the adjacent row by a distance equal to half the pitch of the adjacent row. Each lens system is composed of at least one bar lens for imaging a part of the object as a part of the corresponding image. An opaque elastomer material fills the space between the rows for preventing light from entering into the space while allowing the positional relation between the rows to be fine-adjusted.

Abstract translation: 公开了一种投影装置，其具有多个元件透镜系统，其以交错的方式布置在至少两行中的两个凹槽块中，一行相对于相邻行移位等于相邻行的间距的一半的距离。 每个透镜系统由至少一个条形透镜组成，用于将物体的一部分成像为相应图像的一部分。 不透明的弹性体材料填充行之间的空间，以防止光进入空间，同时允许行之间的位置关系被微调。

公开(公告)号：US4368975A

公开(公告)日：1983-01-18

申请号：US240835

申请日：1981-03-05

Applicant: Yoshiya Matsui ,  Setsuo Minami ,  Noritaka Mochizuki ,  Isao Harumoto ,  Atsuo Tsunoda ,  Shiro Hirai ,  Masami Ohkubo

Inventor： Yoshiya Matsui ,  Setsuo Minami ,  Noritaka Mochizuki ,  Isao Harumoto ,  Atsuo Tsunoda ,  Shiro Hirai ,  Masami Ohkubo

IPC: G03B27/50 ,  G02B3/00 ,  G02B13/22 ,  G02B13/24 ,  G02B27/18 ,  G03G15/04 ,  G03G15/047 ,  G03B27/48

CPC classification number: G02B13/24 ,  G02B13/22 ,  G02B3/00

Abstract: This specification discloses a projection device in which a plurality of element lens systems for projecting a part area of an object onto a predetermined part area on the image plane at erect one-to-one magnification are arranged parallel to one another in a plane perpendicular to the optical axis. Each element lens system is a telecentric system comprising three thin lenses of the same shape arranged in the direction of the optical axis, and an intermediate lens is provided at a position deviated from the intermediate point between the object side lens and the image plane side lens. A light absorbing member for extinguishing any light rays exceeding the effective lens diameter is provided between the lenses, and the light intensity distribution on the image plane of each element lens system is controlled substantially to Gauss distribution form by aperture eclipse and, even if there is any error in the arrangement interval, the exposure amount distribution in the arrangement direction superposed on the image plane is uniform.

Abstract translation: 本说明书公开了一种投影装置，其中用于将物体的一部分区域以直立的一对一放大率在像面上的预定部分区域投影的多个元件透镜系统在垂直于...的平面中彼此平行地布置 光轴。 每个元件透镜系统是一种远心系统，包括沿光轴方向布置的相同形状的三个薄透镜，并且在偏离物侧透镜和像平面侧透镜之间的中间点的位置处设置中间透镜 。 在透镜之间设置用于熄灭超过有效透镜直径的光线的光吸收部件，并且每个元件透镜系统的像面上的光强度分布基本上由孔眼日蚀控制为高斯分布形式，并且即使存在 布置间隔中的任何误差，叠加在图像平面上的排列方向上的曝光量分布是均匀的。

公开(公告)号：US4352541A

公开(公告)日：1982-10-05

申请号：US971439

申请日：1978-12-20

Applicant: Kazuo Minoura ,  Setsuo Minami

Inventor： Kazuo Minoura ,  Setsuo Minami

IPC: G02B26/12 ,  G02B9/02 ,  G02B9/04 ,  G02B13/00 ,  G02B26/10 ,  G06T1/00 ,  H04N1/113 ,  G02B27/17 ,  G02B3/02

CPC classification number: G02B13/0005 ,  G02B26/10

Abstract: Optical scanning device of this invention includes an optical source to produce light rays, means for deflecting light rays toward a predetermined direction, a surface to be scanned by the deflected light rays, a single lens disposed between the deflecting means and the surface to focus the deflected light rays on the surface to be scanned, a partial optical system consisting of said deflecting means and the single lens having means to move light rays on the surface at a constant speed.

Abstract translation: 本发明的光学扫描装置包括用于产生光线的光源，用于使光线朝向预定方向偏转的装置，被偏转的光线扫描的表面，设置在偏转装置和表面之间的单个透镜，以便聚焦 被扫描表面上的偏转的光线，由所述偏转装置和单个透镜组成的部分光学系统具有以恒定速度移动表面上的光线的装置。

公开(公告)号：US4252423A

公开(公告)日：1981-02-24

申请号：US116751

申请日：1980-01-30

Applicant: Yoshiya Matsui ,  Setsuo Minami ,  Noritaka Mochizuki

Inventor： Yoshiya Matsui ,  Setsuo Minami ,  Noritaka Mochizuki

IPC: G03B27/50 ,  G02B3/00 ,  G02B27/18 ,  G03B27/52

CPC classification number: G03B27/525 ,  G02B27/18 ,  G02B3/005 ,  G02B3/0056 ,  G02B3/0068

Abstract: An ommateal image projector of a type, in which a single or a plurality of rows of the so-called bar lenses having a longer length in the direction of its optical axis than the effective lens diameter thereof are arranged, each bar lens projecting a partial image of an object to be projected onto a mirror surface, and the partial image formed on this mirror surface forming again this partial image onto the image projecting surface by the same bar lens. The entire image of the object is formed on the projecting surface by row of the bar lenses, and the total image thus formed is an erected image.

Abstract translation: 一种类型的投影图像投影仪，其中布置了单列或多列所谓的条形透镜，其在其光轴方向上的长度比其有效透镜直径更长，每个条形透镜突出部分 要投影到镜面上的物体的图像，以及形成在该镜面上的部分图像，通过相同的条形透镜将该部分图像再次形成在图像投影面上。 物体的整个图像通过条形透镜的一排形成在突出表面上，并且由此形成的总图像是竖立的图像。