Lithographic mask structure and lithographic process
    1.
    发明授权
    Lithographic mask structure and lithographic process 失效
    平版印刷掩模结构和光刻工艺

    公开(公告)号:US4735877A

    公开(公告)日:1988-04-05

    申请号:US915376

    申请日:1986-10-06

    IPC分类号: G03F1/22 G03F7/20 G03F7/10

    摘要: There is disclosed a lithographic mask structure which comprises a masking material support film and an annular support substrate for supporting the masking material support film at the periphery, the masking material support film containing a fluorescent substance. Also disclosed is a lithographic process for exposing a photosensitive material to irradiation with a radiation beam through a masking material support film provided with a masking material pattern-wise.

    摘要翻译: 公开了一种光刻掩模结构,其包括掩模材料支撑膜和用于在外围支撑掩模材料支撑膜的环形支撑基板,所述掩模材料支撑膜含有荧光物质。 还公开了一种光刻工艺,用于将感光材料暴露于通过图案化地设置有掩模材料的掩模材料支撑膜的辐射束照射。

    Lithographic mask structure and method of producing the same comprising
W and molybdenum alloy absorber
    2.
    发明授权
    Lithographic mask structure and method of producing the same comprising W and molybdenum alloy absorber 失效
    平版印刷掩模结构及其制造方法,包括W和钼合金吸收体

    公开(公告)号:US5733688A

    公开(公告)日:1998-03-31

    申请号:US570686

    申请日:1995-12-11

    IPC分类号: G03F1/22 G03F9/00

    CPC分类号: G03F1/22

    摘要: A mask suitably usable in X-ray lithography has a membrane and a radiation absorbing material pattern formed on the membrane, wherein the radiation absorbing material pattern contains an alloy including tungsten (W) and molybdenum (Mo), the proportion of the molybdenum content to the alloy being in a range of 0.1-50 wt %, the alloy having crystal precedence orientation of {110}. In one preferred form, the absorbing material pattern is provided on an amolphous metal layer formed on the mask membrane.

    摘要翻译: 适用于X射线光刻的掩模具有在膜上形成的膜和辐射吸收材料图案,其中辐射吸收材料图案包含包含钨(W)和钼(Mo)的合金,钼含量与 该合金的范围为0.1-50wt%,晶体优先取向为{110}的合金。 在一个优选形式中,吸收材料图案设置在形成在掩模膜上的淀粉金属层上。

    Mask structure exposure method
    4.
    发明授权
    Mask structure exposure method 有权
    面膜结构曝光方法

    公开(公告)号:US06337161B2

    公开(公告)日:2002-01-08

    申请号:US09161372

    申请日:1998-09-28

    IPC分类号: G03F900

    CPC分类号: G03F1/22 G03F1/62

    摘要: A mask structure to be used for X-ray exposure or the like in manufacturing semiconductor devices prevents contaminants from adhering and accumulating on the surface of a mask, thereby extending the life of the mask. In this mask structure, titanium oxide films are formed on front and back pellicles that protect a mask, composed of a support film and an X-ray absorber, from dust or the like. Titanium oxide decomposes contaminants by functioning as a photocatalyst, and prevents the adhesion and accumulation of contaminants by an antistatic function based on photoconductivity. When a titanium oxide film is formed on the surface of the mask itself, it is preferable that the film be formed outside the exposure area or the like.

    摘要翻译: 在制造半导体器件中用于X射线曝光等的掩模结构防止污染物粘附并积聚在掩模的表面上,从而延长掩模的使用寿命。 在该掩模结构中,在保护由支撑膜和X射线吸收体构成的掩模的灰尘等上的前面和后面防护薄膜上形成氧化钛膜。 氧化钛通过作为光催化剂起作用来分解污染物,并且通过基于光电导性的抗静电功能来防止污染物的粘附和积累。 当在掩模本身的表面上形成氧化钛膜时,优选将膜形成在曝光区域等之外。

    Wireless base station and signal processing method
    5.
    发明授权
    Wireless base station and signal processing method 有权
    无线基站和信号处理方法

    公开(公告)号:US08649360B2

    公开(公告)日:2014-02-11

    申请号:US13094422

    申请日:2011-04-26

    IPC分类号: H04W4/00

    摘要: A total of n signal processing circuits respectively constituted by independent circuit blocks process signals at the Data Link and Physical Layers. The signal processing circuits are associated with respective n groups of M/n subcarriers each, to process signals at the Data Link and Physical Layers. For example, the signal processing circuit independently processes signals of the subcarrier group at the Data Link and Physical Layers, the signal processing circuit independently processes signals of the subcarrier group at the Data Link and Physical Layers, and so on. The signal processing circuit independently processes signals of the subcarrier group at the Data Link and Physical Layers.

    摘要翻译: 分别由独立电路块构成的n个信号处理电路在数据链路和物理层处理信号。 信号处理电路分别与各n个M / n个子载波相关联,以处理数据链路和物理层上的信号。 例如,信号处理电路独立地处理数据链路和物理层上的子载波组的信号,信号处理电路独立地处理数据链路和物理层等子载波组的信号,等等。 信号处理电路独立地处理数据链路和物理层上的子载波组的信号。

    Driving support apparatus
    7.
    发明授权
    Driving support apparatus 失效
    驾驶辅助装置

    公开(公告)号:US08004562B2

    公开(公告)日:2011-08-23

    申请号:US11189796

    申请日:2005-07-27

    IPC分类号: H04N7/18

    摘要: A driving support apparatus includes an imaging member taking an image corresponding to a vehicle peripheral area; a steering angle detecting member detecting a steering-wheel steering angle; a display member disposed in a vehicle interior to display the image; and a control member predicting a driving course of the vehicle according to the detected steering-wheel angle. The control member synthesizes a predicted driving course image relating to the predicted driving course. The control member superposes the predicted driving course image at a corresponding position of the image. The control member displays on the display member the image where at least one image, on which an index is marked at least at one height position, is superposed at least on the predicted driving course image and onto a side of the predicted driving course image while the control member displays the superposed image on the display member.

    摘要翻译: 驱动支撑装置包括拍摄对应于车辆周边区域的图像的摄像部件; 检测方向盘转向角的转向角检测部件; 布置在车辆内部以显示图像的显示部件; 以及控制构件,根据检测到的方向盘角度来预测车辆的行驶过程。 控制构件合成与预测驾驶路线相关的预测行驶路线图像。 控制构件将预测的驾驶路线图像叠加在图像的对应位置。 控制构件在显示构件上显示其上至少在一个高度位置标记了索引的至少一个图像至少在预测的驾驶路线图像上并且在预测驾驶路线图像的一侧上叠加的图像,同时 控制构件在显示构件上显示叠加的图像。

    Graphite Crucible and Silicon Single Crystal Manufacturing Apparatus
    8.
    发明申请
    Graphite Crucible and Silicon Single Crystal Manufacturing Apparatus 有权
    石墨坩埚和硅单晶制造装置

    公开(公告)号:US20110139064A1

    公开(公告)日:2011-06-16

    申请号:US12913957

    申请日:2010-10-28

    IPC分类号: C30B15/10

    摘要: A graphite crucible for silicon single crystal manufacturing by the Czochralski method, having a long life cycle, contains at least one gas venting hole provided in a corner portion of the crucible. Gas generated by reaction between the graphite crucible and a quartz crucible is released to the outside through the gas venting hole, and formation of SiC on the surface of the graphite crucible and deformation of the quartz crucible caused by the pressure of the generated gas are prevented.

    摘要翻译: 用于通过切克劳斯基法制造的硅单晶石墨坩埚,具有长寿命周期,在坩埚的角部包含至少一个排气孔。 通过石墨坩埚与石英坩埚的反应产生的气体通过排气孔被释放到外部,并且在石墨坩埚的表面上形成SiC,并且防止了由所产生的气体的压力引起的石英坩埚的变形 。

    Data reproduction device, method thereof and storage medium
    10.
    发明授权
    Data reproduction device, method thereof and storage medium 失效
    数据再现装置,方法和存储介质

    公开(公告)号:US07418393B2

    公开(公告)日:2008-08-26

    申请号:US09788514

    申请日:2001-02-21

    IPC分类号: G10L21/04

    CPC分类号: G10L21/04

    摘要: A frame, which is the data unit, is extracted without decoding MPEG audio data. Then, a scale factor included in the frame is extracted and an evaluation function is calculated based on the scale factor. If the value of the evaluation function is larger than a prescribed threshold value, the speed of the frame is converted. If the value of the evaluation function is smaller than the prescribed threshold value, the frame is judged to be a frame in a silent section and neglected. The speed conversion is made by thinning out frames or repeating the same frame as many times as required according to prescribed rules.

    摘要翻译: 在不对MPEG音频数据进行解码的情况下提取作为数据单元的帧。 然后,提取包含在帧中的比例因子,并根据比例因子计算评价函数。 如果评估函数的值大于规定的阈值,则转换帧的速度。 如果评估函数的值小于规定的阈值,则将该帧判断为无声部分中的帧并被忽略。 速度转换通过根据规定的规则,根据需要稀疏帧或重复相同的帧多次进行。