摘要:
There is disclosed a lithographic mask structure which comprises a masking material support film and an annular support substrate for supporting the masking material support film at the periphery, the masking material support film containing a fluorescent substance. Also disclosed is a lithographic process for exposing a photosensitive material to irradiation with a radiation beam through a masking material support film provided with a masking material pattern-wise.
摘要:
A mask suitably usable in X-ray lithography has a membrane and a radiation absorbing material pattern formed on the membrane, wherein the radiation absorbing material pattern contains an alloy including tungsten (W) and molybdenum (Mo), the proportion of the molybdenum content to the alloy being in a range of 0.1-50 wt %, the alloy having crystal precedence orientation of {110}. In one preferred form, the absorbing material pattern is provided on an amolphous metal layer formed on the mask membrane.
摘要:
X-ray or vacuum-ultraviolet-ray transmissive mask membrane is constituted by a laminated film. The laminated film is obtained by continuously forming a SiCN film on one of or each of sides of a SiC film. Thereby, a membrane, which is superior in physical or mechanical strength and in surface conditions and optical transmittance, is provided. Moreover, there is provided a mask using the membrane.
摘要:
A mask structure to be used for X-ray exposure or the like in manufacturing semiconductor devices prevents contaminants from adhering and accumulating on the surface of a mask, thereby extending the life of the mask. In this mask structure, titanium oxide films are formed on front and back pellicles that protect a mask, composed of a support film and an X-ray absorber, from dust or the like. Titanium oxide decomposes contaminants by functioning as a photocatalyst, and prevents the adhesion and accumulation of contaminants by an antistatic function based on photoconductivity. When a titanium oxide film is formed on the surface of the mask itself, it is preferable that the film be formed outside the exposure area or the like.
摘要:
A total of n signal processing circuits respectively constituted by independent circuit blocks process signals at the Data Link and Physical Layers. The signal processing circuits are associated with respective n groups of M/n subcarriers each, to process signals at the Data Link and Physical Layers. For example, the signal processing circuit independently processes signals of the subcarrier group at the Data Link and Physical Layers, the signal processing circuit independently processes signals of the subcarrier group at the Data Link and Physical Layers, and so on. The signal processing circuit independently processes signals of the subcarrier group at the Data Link and Physical Layers.
摘要:
A stop method for a fuel cell system including a fuel cell unit in which hydrogen is supplied to an anode, and air is supplied to a cathode so as to generate electrical power via an electrochemical reaction. The stop method includes the steps of stopping supply of hydrogen to the anode, electrically connecting the anode and the cathode via an electrical load, and supplying air to the anode.
摘要:
A driving support apparatus includes an imaging member taking an image corresponding to a vehicle peripheral area; a steering angle detecting member detecting a steering-wheel steering angle; a display member disposed in a vehicle interior to display the image; and a control member predicting a driving course of the vehicle according to the detected steering-wheel angle. The control member synthesizes a predicted driving course image relating to the predicted driving course. The control member superposes the predicted driving course image at a corresponding position of the image. The control member displays on the display member the image where at least one image, on which an index is marked at least at one height position, is superposed at least on the predicted driving course image and onto a side of the predicted driving course image while the control member displays the superposed image on the display member.
摘要:
A graphite crucible for silicon single crystal manufacturing by the Czochralski method, having a long life cycle, contains at least one gas venting hole provided in a corner portion of the crucible. Gas generated by reaction between the graphite crucible and a quartz crucible is released to the outside through the gas venting hole, and formation of SiC on the surface of the graphite crucible and deformation of the quartz crucible caused by the pressure of the generated gas are prevented.
摘要:
A fuel cell system includes a fuel cell, an oxidant gas passage, a cathode off-gas passage, a fuel gas passage, a circulation passage, an anode off-gas passage, a fuel shutoff valve, a supply device, a humidifier and a control device. The supply device supplies a scavenging gas, which is for scavenging the fuel cell, to the anode and the cathode. The humidifier humidifies the scavenging gas. The control device controls the supply device when the fuel cell is turned off so that supply of the fuel gas to the anode is shut off and the scavenging gas is supplied to the anode and the cathode, wherein supply of the scavenging gas to the cathode is conducted through the humidifier.
摘要:
A frame, which is the data unit, is extracted without decoding MPEG audio data. Then, a scale factor included in the frame is extracted and an evaluation function is calculated based on the scale factor. If the value of the evaluation function is larger than a prescribed threshold value, the speed of the frame is converted. If the value of the evaluation function is smaller than the prescribed threshold value, the frame is judged to be a frame in a silent section and neglected. The speed conversion is made by thinning out frames or repeating the same frame as many times as required according to prescribed rules.