公开(公告)号：US5027137A

公开(公告)日：1991-06-25

申请号：US444243

申请日：1989-12-01

申请人： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

发明人： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

IPC分类号： B41J2/44 ,  B23K26/00 ,  B23K26/08 ,  G03B27/34 ,  G03B27/50 ,  G03F7/20

CPC分类号： G03F7/20

摘要： A drawing surface adjusting mechanism for use with a scanning pattern drawing apparatus capable of not only moving a drawing board in a vertical direction but also tilting it, whereby the chance of bringing the drawing surface within the depth of focus of a scanning lens is increased even if the drawing surface has waviness or other flaws within the width of a single storke of scanning. The drawing surface adjusting mechanism of the invention includes a drawing board for supporting a workpiece that is to be scanned with a scanning optical system by means of a unidirectionally tracing light beam, transport means for allowing the drawing board and the scanning optical system to slide relative to each other in a direction that crosses the direction of beam tracing at right angles, a first and a second drive mechanism which are spaced apart in the tracing direction and which move one side of the drawing board in a direction parallel to the direction of the beam, tilt control means for inclining the drawing board with respect to the transport means by making the drive amount of the first drive means different from that of the second drive means, and translation control means for effecting a translational movement of the drawing board with respect to the transport means by making the drive amount of the first drive means equal to that of the second drive means.

摘要翻译： 一种与扫描图形绘图装置一起使用的绘图表面调节机构，其不仅可以在垂直方向上移动绘图板，而且可以倾斜它，由此使得在扫描透镜的深度范围内的绘图表面的机会甚至增加 如果绘图表面在单个扫描鹳的宽度内具有波纹或其他缺陷。 本发明的拉伸面调整机构包括：用于通过单向跟踪光束用扫描光学系统支撑待扫描的工件的绘图板，用于允许绘图板和扫描光学系统相对滑动的传送装置 彼此沿着与直角的光束跟踪方向交叉的方向;第一和第二驱动机构，其在跟踪方向上间隔开，并且沿平行于所述方向的方向移动所述绘图板的一侧; 横梁，倾斜控制装置，用于通过使第一驱动装置的驱动量与第二驱动装置的驱动量不同而使绘图板相对于输送装置倾斜;以及平移控制装置，用于对绘图板进行平移运动 通过使第一驱动装置的驱动量等于第二驱动装置的驱动量来传送到传送装置。

公开(公告)号：US5017949A

公开(公告)日：1991-05-21

申请号：US444245

申请日：1989-12-01

申请人： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

发明人： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

IPC分类号： B43L13/00 ,  H05K3/00

CPC分类号： H05K3/0002 ,  H05K2203/107

摘要： A table assembly that is simple in construction and which yet resists yawing in an effective way and is adapted for use with a scanning pattern drawing apparatus which involves continuous movements of the table. The inventive table assembly includes a master table that is slidable in one direction with respect to a fixed portion of the overall assembly and to which a drive force for causing the table to slide in the one direction is transmitted directly, and a working table that is slidable in the one direction with respect to the fixed portion and which is linked to the master table by connecting means having rigidity in the one direction and elasticity in a direction perpendicular to the one direction.

摘要翻译： 一种桌面组件，其结构简单，并且以有效的方式抵抗偏航，并适用于涉及桌子的连续移动的扫描图案绘图装置。 本发明的台组件包括主工作台，其能够相对于整个组件的固定部分在一个方向上滑动，并且用于使工作台沿一个方向滑动的驱动力被直接传递到工作台 在相对于固定部分的一个方向上可滑动，并且通过在一个方向上具有刚性并且在垂直于该一个方向的方向上具有弹性的连接装置连接到主工作台。

公开(公告)号：US5043566A

公开(公告)日：1991-08-27

申请号：US444204

申请日：1989-12-01

申请人： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

发明人： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

IPC分类号： G02B26/10 ,  G02B13/00 ,  H04N1/053 ,  H04N1/113

CPC分类号： H04N1/053 ,  G02B13/0005 ,  H04N1/113 ,  H04N2201/0471

摘要： A monitor mechanism for use with a scanning optical apparatus in which the direction of polarization is utilized to separate a source laser light beam into a pattern drawing and a monitor beamlet and to synthesize them again into a single after passing through a scanning lens and beam deflector. The two beamlets can thus be controlled so as to project towards the deflector and scanning lens in the same direction, which is effective in reducing the offset between the pattern drawing and monitor beams that may occur on account of such factors as variations in lens performance.

摘要翻译： 一种与扫描光学装置一起使用的监视器机构，其中利用偏振方向将源激光光束分离成图案图形和监视子束，并且在通过扫描透镜和光束偏转器之后将它们再次合成为单个 。 因此，可以控制两个子束，以朝向相反方向的偏转器和扫描透镜投影，这有助于减少由于诸如透镜性能变化等因素而可能发生的图案绘制和监视光束之间的偏移。

公开(公告)号：US5093561A

公开(公告)日：1992-03-03

申请号：US733078

申请日：1991-07-18

申请人： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

发明人： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

IPC分类号： B41J2/44 ,  B41J2/49 ,  B43L13/00 ,  G02B26/08 ,  G02B26/10 ,  G03F7/20 ,  G03F7/207

CPC分类号： G03F7/70833 ,  G02B26/0891

摘要： A drawing surface adjusting mechanism suitable for use with a large scanning pattern drawing apparatus in which a scanning optical system scans drawing rays of light along scanning lines on a workpiece on a drawing board. A plurality of light-emitting units project rays of light in a wavelength region outside a sensitivity range of the workpiece onto a drawing surface of the workpiece in such a way that the rays substantially converge at more than one point along a scanning line of the drawing rays of light, preferably at center and end points along the scanning line. A plurality of condenser lenses are provided for focusing beams of light from the plural light-emitting units after the beams have been reflected by the drawing surface. A plurality of light-detecting elements are disposed at points of condensation by respective ones of the condenser lenses to produce output signals representing differences in condensation points that occur as the lenses depart from or approach the drawing surface. A drive unit effects relative displacement between the scanning optical system and the drawing board in response to the outputs from the light-detecting elements.

摘要翻译： 一种适用于大型扫描图形绘图装置的绘图表面调节机构，其中扫描光学系统沿着绘图板上的工件上的扫描线扫描光线。 多个发光单元将工件的感光度范围外的波长范围内的光线投射到工件的拉伸面上，使得光线沿着图的扫描线基本上会聚在多于一个点 光线，优选沿着扫描线的中心点和终点。 提供多个聚光透镜，用于在光束已经被拉伸表面反射之后聚焦来自多个发光单元的光束。 多个光检测元件通过聚光透镜中的各个聚焦透镜设置在冷凝点处，以产生表示透镜离开或接近拉伸表面时发生的冷凝点差异的输出信号。 驱动单元响应于来自光检测元件的输出而影响扫描光学系统和绘图板之间的相对位移。

公开(公告)号：US5046796A

公开(公告)日：1991-09-10

申请号：US444230

申请日：1989-12-01

申请人： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

发明人： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

IPC分类号： G02B26/10 ,  G02B26/12 ,  G02B27/00 ,  H04N1/047 ,  H04N1/113

CPC分类号： G02B26/127 ,  G02B27/0031 ,  H04N1/0473 ,  H04N1/1135 ,  H04N2201/0471 ,  H04N2201/04765

摘要： An apparatus for correcting a scranning beam produced by a polygonal mirror tilting in small surface segments in each mirror surface segment caused by uneven mirror surfaces of the polygonal mirror. Data indicative of the amount of tilting in each of the surface segments is stored in a memory, which is addressed by a data signal indicative of the present scanning position of the polygonal mirror. Output data from the memory is applied to an acousto-optical modulator disposed in the beam path between the light source and the polygonal mirror.

摘要翻译： 一种用于校正由多面镜的不平坦镜面引起的每个镜面区段中的小表面段倾斜的多面镜产生的扫掠光束的装置。 指示每个表面段中的倾斜量的数据被存储在存储器中，存储器由表示多面镜的当前扫描位置的数据信号来寻址。 来自存储器的输出数据被施加到设置在光源和多面镜之间的光束路径中的声光调制器。

公开(公告)号：US5117106A

公开(公告)日：1992-05-26

申请号：US734034

申请日：1991-06-23

申请人： Hiroaki Andon ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonoka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

发明人： Hiroaki Andon ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonoka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

IPC分类号： B41J2/44 ,  B41J2/49 ,  B43L13/00 ,  H04N1/053 ,  H04N1/113

CPC分类号： H04N1/053 ,  H04N1/1135 ,  H04N2201/0471 ,  H04N2201/04767

摘要： A scanning pattern drawing apparatus which scans the surface of a workpiece with a light beam so that a pattern is described on the workpiece with the issued light beam being controlled on the basis of pattern drawing data stored in a pattern memory, wherein the pattern drawing apparatus is able to read many pieces of data in a short period of time even if the frequency of the timing pulses is reduced and which therefore is capable of drawing a precise pattern on a workpiece. A scanning pulse generator produces as scanning pulse in response to a predetermined amount of scanning with the light beam. The scanning pulse is converted to a plurality of resulting timing pulses, and successive parallel outputs of the timing pulses are produced after delaying by a predetermined time. The pattern drawing data is read from the pattern memory in response to the delayed timing pulses.

摘要翻译： 一种扫描图形绘制装置，其利用光束扫描工件的表面，使得基于存储在图案存储器中的图案绘制数据来控制所发出的光束，在工件上描述图案，其中，图案描绘装置 即使定时脉冲的频率降低，因此能够在工件上绘制精确的图案，也能够在短时间内读取许多数据。 扫描脉冲发生器响应于光束的预定量的扫描而产生扫描脉冲。 将扫描脉冲转换为多个定时脉冲，并且在延迟预定时间之后产生定时脉冲的连续并行输出。 响应于延迟的定时脉冲，从模式存储器读取模式绘制数据。

公开(公告)号：US5055663A

公开(公告)日：1991-10-08

申请号：US372536

申请日：1989-06-28

申请人： Akira Morimoto ,  Akira Ohwaki

发明人： Akira Morimoto ,  Akira Ohwaki

IPC分类号： G02B13/00 ,  G02B13/22

CPC分类号： G02B13/0005 ,  G02B13/22

摘要： An optical scanning system has a deflector for deflecting a beam emitted from a light source portion, a telecentric scanning lens for focusing the deflected beam onto a scanning surface, a beam splitter for splitting a beam reflected by the scanning surface on an optical path between the deflector and the light source portion from an outgoing optical path, and a focus point detector for receiving the beam split by the beam splitter and detecting a focused state of the beam on the scanning surface.

摘要翻译： 光学扫描系统具有用于偏转从光源部分发射的光束的偏转器，用于将偏转光束聚焦到扫描表面上的远心扫描透镜，用于将由扫描表面反射的光束分离在光路上的光路上的分束器 偏转器和来自出射光路的光源部分，以及聚焦点检测器，用于接收由分束器分离的光束并且检测光束在扫描表面上的聚焦状态。