公开(公告)号：US5027137A

公开(公告)日：1991-06-25

申请号：US444243

申请日：1989-12-01

Applicant: Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

Inventor： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

IPC: B41J2/44 ,  B23K26/00 ,  B23K26/08 ,  G03B27/34 ,  G03B27/50 ,  G03F7/20

CPC classification number: G03F7/20

Abstract: A drawing surface adjusting mechanism for use with a scanning pattern drawing apparatus capable of not only moving a drawing board in a vertical direction but also tilting it, whereby the chance of bringing the drawing surface within the depth of focus of a scanning lens is increased even if the drawing surface has waviness or other flaws within the width of a single storke of scanning. The drawing surface adjusting mechanism of the invention includes a drawing board for supporting a workpiece that is to be scanned with a scanning optical system by means of a unidirectionally tracing light beam, transport means for allowing the drawing board and the scanning optical system to slide relative to each other in a direction that crosses the direction of beam tracing at right angles, a first and a second drive mechanism which are spaced apart in the tracing direction and which move one side of the drawing board in a direction parallel to the direction of the beam, tilt control means for inclining the drawing board with respect to the transport means by making the drive amount of the first drive means different from that of the second drive means, and translation control means for effecting a translational movement of the drawing board with respect to the transport means by making the drive amount of the first drive means equal to that of the second drive means.

Abstract translation: 一种与扫描图形绘图装置一起使用的绘图表面调节机构，其不仅可以在垂直方向上移动绘图板，而且可以倾斜它，由此使得在扫描透镜的深度范围内的绘图表面的机会甚至增加 如果绘图表面在单个扫描鹳的宽度内具有波纹或其他缺陷。 本发明的拉伸面调整机构包括：用于通过单向跟踪光束用扫描光学系统支撑待扫描的工件的绘图板，用于允许绘图板和扫描光学系统相对滑动的传送装置 彼此沿着与直角的光束跟踪方向交叉的方向;第一和第二驱动机构，其在跟踪方向上间隔开，并且沿平行于所述方向的方向移动所述绘图板的一侧; 横梁，倾斜控制装置，用于通过使第一驱动装置的驱动量与第二驱动装置的驱动量不同而使绘图板相对于输送装置倾斜;以及平移控制装置，用于对绘图板进行平移运动 通过使第一驱动装置的驱动量等于第二驱动装置的驱动量来传送到传送装置。

公开(公告)号：US5017949A

公开(公告)日：1991-05-21

申请号：US444245

申请日：1989-12-01

Applicant: Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

Inventor： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

IPC: B43L13/00 ,  H05K3/00

CPC classification number: H05K3/0002 ,  H05K2203/107

Abstract: A table assembly that is simple in construction and which yet resists yawing in an effective way and is adapted for use with a scanning pattern drawing apparatus which involves continuous movements of the table. The inventive table assembly includes a master table that is slidable in one direction with respect to a fixed portion of the overall assembly and to which a drive force for causing the table to slide in the one direction is transmitted directly, and a working table that is slidable in the one direction with respect to the fixed portion and which is linked to the master table by connecting means having rigidity in the one direction and elasticity in a direction perpendicular to the one direction.

Abstract translation: 一种桌面组件，其结构简单，并且以有效的方式抵抗偏航，并适用于涉及桌子的连续移动的扫描图案绘图装置。 本发明的台组件包括主工作台，其能够相对于整个组件的固定部分在一个方向上滑动，并且用于使工作台沿一个方向滑动的驱动力被直接传递到工作台 在相对于固定部分的一个方向上可滑动，并且通过在一个方向上具有刚性并且在垂直于该一个方向的方向上具有弹性的连接装置连接到主工作台。

公开(公告)号：US4613426A

公开(公告)日：1986-09-23

申请号：US625713

申请日：1984-06-28

Applicant: Toshiro Okamoto ,  Michio Ohshima

Inventor： Toshiro Okamoto ,  Michio Ohshima

IPC: C10G9/36 ,  C07C4/04 ,  C10G9/38 ,  C10G47/00 ,  C10G47/22 ,  C10G47/32 ,  C10G69/02

CPC classification number: C10G47/22

Abstract: A thermal cracking process for producing petrochemical products from hydrocarbons which comprises the steps of: burning hydrocarbons with oxygen in the presence of steam to produce a hot gas of from 1300.degree. to 3000.degree. C. comprising steam; feeding a mixture of methane and hydrogen to the hot gas in such a way that a methane/hydrogen molar ratio is over 0.05; further feeding starting hydrocarbons to the hot gas comprising the methane, hydrogen and steam so that the starting hydrocarbons containing hydrocarbon components of higher boiling points are, respectively, fed to higher temperature zones; subjecting the starting hydrocarbons to thermal cracking while keeping the cracking temperature at 650.degree. to 1500.degree. C., the total residence time at 5 to 1000 milliseconds, the pressure at 2 to 100 bars, and the partial pressure of hydrogen, after thermal cracking of a hydrocarbon comprising hydrocarbon components whose boiling point exceeds 200.degree. C., at least 0.1 bar; and quenching the resulting reaction product.

Abstract translation: 一种用于从烃生产石油化学产品的热裂解方法，其包括以下步骤：在蒸汽存在下用氧气燃烧烃，以产生含有蒸汽的1300℃至3000℃的热气体; 以甲烷/氢摩尔比超过0.05的方式将甲烷和氢气的混合物供给到热气体中; 进一步将起始烃进料到包括甲烷，氢气和蒸汽的热气体中，使得含有较高沸点的烃组分的起始烃分别进料到较高温度区; 将起始烃进行热裂解，同时保持裂化温度在650〜1500℃，总停留时间为5〜1000毫秒，压力为2〜100巴，氢分压在热裂化后 包含沸点超过200℃，至少0.1巴的烃组分的烃; 并淬灭所得反应产物。

公开(公告)号：US20100006756A1

公开(公告)日：2010-01-14

申请号：US11917838

申请日：2006-06-15

Applicant: Norimichi Anazawa ,  Jun Nitta ,  Michio Ohshima ,  Tatenori Jinriki ,  Naoyuki Nakamura ,  Akira Yonezawa ,  Ken-ichi Kobayashi ,  Hao Zhang

Inventor： Norimichi Anazawa ,  Jun Nitta ,  Michio Ohshima ,  Tatenori Jinriki ,  Naoyuki Nakamura ,  Akira Yonezawa ,  Ken-ichi Kobayashi ,  Hao Zhang

IPC: G01N23/225

CPC classification number: H01J37/026 ,  H01J37/28 ,  H01J2237/0047 ,  H01J2237/16 ,  H01J2237/18 ,  H01J2237/26 ,  H01J2237/3175

Abstract: When the surface of a semiconductor wafer, a photomask or the like sample is charged by irradiation with a charged particle beam, the charging is liable to hamper image observation, inspection and handling. Therefore, the sample and the surface or vicinity of the sample being charged by an electron beam or the like is held in an atmosphere or a reduced pressure atmosphere or in a predetermined gaseous atmosphere within a preliminary evacuation chamber, a sample chamber or the like, containing a soft X-ray generator which irradiates the sample or the vicinity thereof with soft X-rays which are controlled to generate positive ions and negative ions and remove charges on the surface of the sample.

Abstract translation: 当通过照射带电粒子束来对半导体晶片，光掩模等样品的表面进行充电时，充电将妨碍图像观察，检查和处理。 因此，将样品和被电子束等充电的样品的表面或附近保持在预抽真空室，样品室等中的气氛或减压气氛中或预定的气体气氛中， 含有软X射线发生器，用软X射线照射样品或其附近，该X射线被控制以产生正离子和负离子并去除样品表面上的电荷。

公开(公告)号：US4655904A

公开(公告)日：1987-04-07

申请号：US621428

申请日：1984-06-18

Applicant: Toshiro Okamoto ,  Michio Ohshima

Inventor： Toshiro Okamoto ,  Michio Ohshima

IPC: C10G9/00 ,  C07C1/00 ,  C07C4/04 ,  C07C11/02 ,  C07C15/02 ,  C07C67/00 ,  C10G9/38

CPC classification number: C10G9/38

Abstract: A process for selectively producing olefins and aromatic hydrocarbons by thermal cracking of hydrocarbons which comprises the steps of: burning hydrocarbons with oxygen in the presence of steam to produce a hot gas of from 1300.degree. to 3000.degree. C. comprising steam; feeding a heavy hydrocarbon to the hot gas to thermally crack the heavy hydrocarbon under conditions of a temperature not lower than 1000.degree. C., a pressure not higher than 100 kg/cm.sup.2 g, and a residence time of from 5 to 20 milliseconds; further feeding a light hydrocarbon downstream of the feed of the heavy hydrocarbon in such a way that a light hydrocarbon with a lower boiling point is fed at a lower temperature side downstream of the feed of the heavy hydrocarbon, thereby thermally cracking the light hydrocarbon under conditions of a reactor outlet temperature at not lower than 650.degree. C., a pressure at not higher than 100 kg/cm.sup.2 g, and a residence time at 5 to 1000 milliseconds; and quenching the resulting reaction product.

Abstract translation: 一种通过碳氢化合物热裂解选择性生产烯烃和芳烃的方法，包括以下步骤：在蒸汽存在下用氧气燃烧烃，以产生含有蒸汽的1300〜3000℃的热气体; 向热气体中加入重质烃，在不低于1000℃，压力不高于100kg / cm2g，停留时间为5至20毫秒的条件下热裂解重质烃; 进一步向重质烃进料下游供给轻质烃，使得在较低温度下一侧加入较低沸点的轻烃，在重烃进料下游，从而在轻质烃条件下 反应器出口温度不低于650℃，压力不高于100kg / cm2g，停留时间为5至1000毫秒; 并淬灭所得反应产物。

公开(公告)号：US4599479A

公开(公告)日：1986-07-08

申请号：US705974

申请日：1985-02-27

Applicant: Toshiro Okamoto ,  Michio Ohshima

Inventor： Toshiro Okamoto ,  Michio Ohshima

IPC: C10G47/32 ,  C10G9/38 ,  C10G47/00 ,  C10G47/22 ,  C07C4/04

CPC classification number: C10G9/38 ,  C10G2400/20 ,  Y02P30/40

Abstract: A thermal cracking process for producing olefins from hydrocarbons which comprises the steps of burning hydrocarbons with less than the theoretical amount of oxygen in the presence of steam to give a hot gas of from 1400.degree. to 300.degree. C. comprising steam and hydrogen prior to reaction; feeding to the hot gas comprising the steam and hydrogen, a mixture of methane and hydrogen so that a methane/hydrogen molar ratio in said hot gas is over 0.05; further feeding a starting hydrocarbon to the hot gas mixture comprising the methane, hydrogen and steam; subjecting the starting hydrocarbon to thermal cracking while keeping the partial pressure of hydrogen at least 0.1 bar at the outlet of a reactor, the temperature at 800.degree. to 1200.degree. C., and the residence time at 5 to 300 milliseconds; and quenching the resulting reaction product.

公开(公告)号：US4599478A

公开(公告)日：1986-07-08

申请号：US705976

申请日：1985-02-27

Applicant: Makoto Kamisaka ,  Toshiro Okamoto ,  Michio Ohshima ,  Mamoru Tamai

Inventor： Makoto Kamisaka ,  Toshiro Okamoto ,  Michio Ohshima ,  Mamoru Tamai

IPC: C10G47/00 ,  C07C1/00 ,  C07C4/04 ,  C07C11/02 ,  C07C67/00 ,  C10G9/38 ,  C10G47/22 ,  C10G47/32 ,  C10G69/02

CPC classification number: C10G9/38 ,  C10G2400/20 ,  Y02P30/40

Abstract: In methods of manufacturing olefines by thermally cracking hydrocarbons, there is disclosed a thermal cracking method for producing olefines from hydrocarbons, characterized in that hydrocarbon in burnt with oxygen in the presence of steam to generate a high-temperature gas containing steam of 1500.degree.-3000.degree. C., methane and hydrogen are supplied into the high-temperature gas containing said steam, with the molar ratio of methane to hydrogen in said high temperature gas being 0.05 or more, then hydrocarbon to be cracked is supplied into said high-temperature gas containing said methane, hydrogen and steam, so that the hydrocarbon is subjected to thermal cracking by maintaining the partial pressure of hydrogen at more than at least 0.1 bar at the outlet of a reactor, under conditions of reaction temperature, 800.degree.-1200.degree. C. and residence time in the reactor 5-300 milli second, and then the reaction product is cooled in a rapid manner.

公开(公告)号：US4587011A

公开(公告)日：1986-05-06

申请号：US625714

申请日：1984-06-28

Applicant: Toshiro Okamoto ,  Michio Ohshima

Inventor： Toshiro Okamoto ,  Michio Ohshima

IPC: C10G9/36 ,  C07C4/04 ,  C10G9/38 ,  C10G47/00 ,  C10G47/22 ,  C10G69/02

CPC classification number: C10G47/22

Abstract: A thermal cracking process for selectively producing petrochemical products from hydrocarbons which comprises the steps of: burning hydrocarbons with oxygen in the presence of steam to produce a hot gas of from 1300.degree. to 3000.degree. C. comprising steam; feeding hydrogen to the hot gas; further feeding starting hydrocarbons to the hot gas comprising the steam and hydrogen so that the starting hydrocarbons containing hydrocarbon components of higher boiling points are, respectively, fed to higher temperature zones so as to thermally crack the respective hydrocarbons under different conditions while keeping the cracking temperature at 650.degree. to 1500.degree. C., the total residence time at 5 to 1000 milliseconds, the pressure at 2 to 100 bars, and the partial pressure of hydrogen, after thermal cracking of a hydrocarbon comprising hydrocarbon components whose boiling point exceeds 200.degree. C., at least 0.1 bar; and quenching the resulting reaction product.

Abstract translation: 一种用于从烃选择性生产石油化学产品的热裂解方法，其包括以下步骤：在蒸汽存在下用氧气燃烧烃，以产生含有蒸汽的1300℃至3000℃的热气体; 将氢气供给热气体; 进一步将起始烃进料到包含蒸汽和氢气的热气体中，使得含有较高沸点的烃组分的起始烃分别进料到较高温度的区域，以便在不同条件下热裂解各种烃，同时保持裂化温度 在沸点超过200℃的烃类组分的热裂解后，在650〜1500℃，总停留时间为5〜1000毫秒，压力为2〜100巴，氢的分压 至少0.1巴; 并淬灭所得反应产物。

公开(公告)号：US4527003A

公开(公告)日：1985-07-02

申请号：US583939

申请日：1984-02-27

Applicant: Toshiro Okamoto ,  Michio Ohshima

Inventor： Toshiro Okamoto ,  Michio Ohshima

IPC: C10G47/32 ,  C10G9/38 ,  C10G47/00 ,  C10G47/22 ,  C07C4/04

CPC classification number: C10G9/38 ,  C10G2400/20 ,  Y02P30/40

Abstract: A thermal cracking process for producing olefins from hydrocarbons which comprises the steps of burning hydrocarbons with less than the theoretical amount of oxygen in the presence of steam to give a hot gas of from 1400.degree. to 300.degree. C. comprising steam and hydrogen prior to reaction; feeding to the hot gas comprising the steam and hydrogen, a mixture of methane and hydrogen so that the methane/hydrogen molar ratio in said hot gas is over 0.05; further feeding a starting hydrocarbon to the hot gas mixture comprising the methane, hydrogen and steam; subjecting the starting hydrocarbon to thermal cracking while keeping the partial pressure of hydrogen at least 0.1 bar at the outlet of a reactor, the temperature at 800.degree. to 1200.degree. C., and the residence time at 5 to 300 milliseconds; and quenching the resulting reaction product.

Abstract translation: 一种用于从烃生产烯烃的热裂解方法，其包括以下步骤：在蒸汽存在下，以低于理论量的氧燃烧碳氢化合物，得到在反应之前含有蒸汽和氢气的1400℃至300℃的热气体 ; 供给包括蒸汽和氢气的热气体，甲烷和氢气的混合物，使得所述热气体中的甲烷/氢摩尔比为0.05以上; 进一步将起始烃进料到包含甲烷，氢气和蒸汽的热气体混合物中; 使起始烃进行热裂解，同时在反应器出口处保持氢的分压至少为0.1巴，温度为800至1200℃，停留时间为5至300毫秒; 并淬灭所得反应产物。

公开(公告)号：US5043566A

公开(公告)日：1991-08-27

申请号：US444204

申请日：1989-12-01

Applicant: Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

Inventor： Hiroaki Andoh ,  Michio Ohshima ,  Yuji Matsui ,  Takashi Okuyama ,  Toshitaka Yoshimura ,  Hidetaka Yamaguchi ,  Yasushi Ikeda ,  Jun Nonaka ,  Tamihiro Miyoshi ,  Mitsuo Kakimoto ,  Masatoshi Iwama ,  Hideyuki Morita ,  Satoru Tachihara ,  Akira Morimoto ,  Akira Ohwaki

IPC: G02B26/10 ,  G02B13/00 ,  H04N1/053 ,  H04N1/113

CPC classification number: H04N1/053 ,  G02B13/0005 ,  H04N1/113 ,  H04N2201/0471

Abstract: A monitor mechanism for use with a scanning optical apparatus in which the direction of polarization is utilized to separate a source laser light beam into a pattern drawing and a monitor beamlet and to synthesize them again into a single after passing through a scanning lens and beam deflector. The two beamlets can thus be controlled so as to project towards the deflector and scanning lens in the same direction, which is effective in reducing the offset between the pattern drawing and monitor beams that may occur on account of such factors as variations in lens performance.

Abstract translation: 一种与扫描光学装置一起使用的监视器机构，其中利用偏振方向将源激光光束分离成图案图形和监视子束，并且在通过扫描透镜和光束偏转器之后将它们再次合成为单个 。 因此，可以控制两个子束，以朝向相反方向的偏转器和扫描透镜投影，这有助于减少由于诸如透镜性能变化等因素而可能发生的图案绘制和监视光束之间的偏移。