摘要:
An organic EL panel is produced with high productivity by a method in which a first protective film (planarizing layer) can be dehydrated in a shorter time without increasing the number of steps up to the step of forming a second protective film (separation film). The second protective film has regions at which the first protective film is exposed between first electrodes.
摘要:
An organic EL panel is produced with high productivity by a method in which a first protective film (planarizing layer) can be dehydrated in a shorter time without increasing the number of steps up to the step of forming a second protective film (separation film). The second protective film has regions at which the first protective film is exposed between first electrodes.
摘要:
A method for ionization film formation to form a deposited film by ionizing vaporized particles with an ionization mechanism of the hot-cathode system and injecting the ionized particles into a substrate is provided. The method includes the step of introducing He gas inside the ionization mechanism.
摘要:
Provided is a method for manufacturing an organic electroluminescent display apparatus that includes a substrate and a plurality of pixels each including two or more types of sub-pixels, in which the pixels are arranged in a display area of the substrate, and, among the sub-pixels, one type of sub-pixels are specified sub-pixels provided at certain intervals. The specified sub-pixels are formed by selectively forming the (2n-1)th specified sub-pixels (wherein n represents an integer of 1 or more) numbered from a side end of the display area using a mask having openings at positions corresponding to the (2n-1)th specified sub-pixels numbered from the side end, and selectively forming the (2n)th specified sub-pixels numbered from the side end using a mask having openings at positions corresponding to the (2n)th specified sub-pixels numbered from the side end.
摘要:
A milling apparatus is provided in which temperature rise of a treatment-object in milling treatment, especially of the substrate thereof, is prevented. In the apparatus, ionization mechanism 2 comprises casing 20d having an opening at the center portion of the face thereof opposing to substrate 5 held by substrate holder 6; a filament is placed at the position where the straight line drawn from the filament to substrate 5 is intercepted by casing 20d; and electromagnets 31, 32 are provided around ionization mechanism 2 for generating a magnetic field to produce magnetic lines extending through opening 20j to substrate 5.
摘要:
In an organic electroluminescence display device which includes: a display region DR in which a plurality of pixels are arranged; and a power source part CC which is arranged outside the display region, each of the plurality of pixels includes: a lower electrode An; a light emitting layer stacked above the lower electrode; and an upper electrode which includes a thin silver film AG and is formed by a layer shared in common by other pixels above the light emitting layer, the upper electrode extends to the power source part for electrically connection, the thin silver film has a portion arranged between the display region and the power source part, and a background layer containing an electron pair donor is arranged as a background of at least a portion of the thin silver film between the display region and the power source part.
摘要:
In an organic electroluminescence display device which includes: a display region DR in which a plurality of pixels are arranged; and a power source part CC which is arranged outside the display region, each of the plurality of pixels includes: a lower electrode An; a light emitting layer stacked above the lower electrode; and an upper electrode which includes a thin silver film AG and is formed by a layer shared in common by other pixels above the light emitting layer, the upper electrode extends to the power source part for electrically connection, the thin silver film has a portion arranged between the display region and the power source part, and a background layer containing an electron pair donor is arranged as a background of at least a portion of the thin silver film between the display region and the power source part.
摘要:
Sputtering particles emitted from a target are ionized by the Penning ionization process. And the sputtering particles ionized are caused to fly in the direction of the substrate by a magnetic field formed by ambipolar diffusion due to a magnetic field generating means without scattering the particles to deposit the particles on the substrate. The partial pressure of a sputtering discharge gas in a discharge space is set to 1.3 Pa or less and a distance from the target to an ionization space is within twice the mean free path of the partial pressure of the sputtering discharge gas.
摘要:
The present invention provides a film forming method comprising the steps of ionizing sputtering particles and applying a periodically changing voltage to an electrode near a substrate, wherein a time for applying a voltage equal to or higher than an intermediate value between maximum and minimum values of the periodically changing voltage is shorter than a time for applying a voltage equal to or less than the intermediate value, and a film forming apparatus for carrying out the above method.
摘要:
A method for ionization film formation to form a deposited film by ionizing vaporized particles with an ionization mechanism of the hot-cathode system and injecting the ionized particles into a substrate is provided. The method includes the step of introducing He gas inside the ionization mechanism.