Probe chip and probe card
    4.
    发明授权
    Probe chip and probe card 失效
    探头芯片和探针卡

    公开(公告)号:US07545160B2

    公开(公告)日:2009-06-09

    申请号:US11607844

    申请日:2006-12-04

    IPC分类号: G01R31/02

    摘要: The present invention provides a probe chip and a probe card in which when troubles such as breakage etc. occur in a probe of a contact portion of a probe card, the contact portion can be easily replaced with another one. In the probe card having a guide frame, a probe chip and a fixing jig, a second arm portion of a cantilever of the probe chip is abutted on a conductive path of a fixing jig such that the probe chip is held or pressed down and fixed to the guide frame with the second arm portion being elastically deformed.

    摘要翻译: 本发明提供了一种探针芯片和探针卡,其中当探针卡的接触部分的探针中发生诸如断裂等故障时,可以容易地用接触部分替换接触部分。 在具有引导框架,探针芯片和固定夹具的探针卡中,探针芯片的悬臂的第二臂部分抵靠在固定夹具的导电路径上,使得探针芯片被保持或按下并固定 到第二臂部分的引导框架弹性变形。

    Probe chip and probe card
    6.
    发明申请
    Probe chip and probe card 失效
    探头芯片和探针卡

    公开(公告)号:US20070126442A1

    公开(公告)日:2007-06-07

    申请号:US11607844

    申请日:2006-12-04

    IPC分类号: G01R31/02

    摘要: The present invention provides a probe chip and a probe card in which when troubles such as breakage etc. occur in a probe of a contact portion of a probe card, the contact portion can be easily replaced with another one. In the probe card having a guide frame, a probe chip and a fixing jig, a second arm portion of a cantilever of the probe chip is abutted on a conductive path of a fixing jig such that the probe chip is held or pressed down and fixed to the guide frame with the second arm portion being elastically deformed.

    摘要翻译: 本发明提供了一种探针芯片和探针卡,其中当探针卡的接触部分的探针中发生诸如断裂等故障时,可以容易地用接触部分替换接触部分。 在具有引导框架,探针芯片和固定夹具的探针卡中,探针芯片的悬臂的第二臂部分抵靠在固定夹具的导电路径上,使得探针芯片被保持或按下并固定 到第二臂部分的引导框架弹性变形。

    Probe card for testing an integrated circuit
    7.
    发明授权
    Probe card for testing an integrated circuit 失效
    用于测试集成电路的探针卡

    公开(公告)号:US06809539B2

    公开(公告)日:2004-10-26

    申请号:US10031823

    申请日:2002-06-13

    IPC分类号: G01R3102

    摘要: A probe card transmits high frequency signals between an integrated circuit under test and a semiconductor-testing device. The probe card includes a substrate, a signal transmission path formed on the substrate, a contactor formed on an end portion of the signal transmission path on one side of the substrate, a grounding conductor grounded, and a hole. The contactor is made of a metallic glass material, which shows a nature of viscous fluidity in the supercooled liquid region. The contactor is separated from the substrate over the hole. The contactor elastically contacts a pad of the circuit under test.

    摘要翻译: 探针卡在被测集成电路和半导体测试装置之间传输高频信号。 探针卡包括基板,形成在基板上的信号传输路径,形成在基板一侧的信号传输路径的端部上的接触器,接地导体和孔。 接触器由金属玻璃材料制成,其表现出过冷液体区域中粘性流动性的特性。 接触器与孔上的基板分离。 接触器弹性地接触被测电路的焊盘。